{"id":"https://openalex.org/W2005509268","doi":"https://doi.org/10.1109/nems.2010.5592420","title":"Rapid and nondestructive evaluations of conductivity by spectroscopic measurements at plasma edge","display_name":"Rapid and nondestructive evaluations of conductivity by spectroscopic measurements at plasma edge","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2005509268","doi":"https://doi.org/10.1109/nems.2010.5592420","mag":"2005509268"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592420","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592420","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112290525","display_name":"Teppei Onuki","orcid":null},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"T Onuki","raw_affiliation_strings":["Department of Nanomechanics, University of Tohoku, Sendai, Japan","Department of Nanomechanics, Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Nanomechanics, University of Tohoku, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"Department of Nanomechanics, Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111893555","display_name":"Hiroki Kuwano","orcid":null},"institutions":[{"id":"https://openalex.org/I103605164","display_name":"Tohoku Institute of Technology","ror":"https://ror.org/01phqre83","country_code":"JP","type":"education","lineage":["https://openalex.org/I103605164"]},{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"H Kuwano","raw_affiliation_strings":["Tohoku Daigaku, Sendai, Miyagi, JP","Department of Nanomechanics, Tohoku University, Japan"],"affiliations":[{"raw_affiliation_string":"Tohoku Daigaku, Sendai, Miyagi, JP","institution_ids":["https://openalex.org/I103605164"]},{"raw_affiliation_string":"Department of Nanomechanics, Tohoku University, Japan","institution_ids":["https://openalex.org/I201537933"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5112290525"],"corresponding_institution_ids":["https://openalex.org/I201537933"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08875597,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"413","last_page":"416"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reflectometry","display_name":"Reflectometry","score":0.7810161113739014},{"id":"https://openalex.org/keywords/conductivity","display_name":"Conductivity","score":0.7227374911308289},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6512136459350586},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.5646140575408936},{"id":"https://openalex.org/keywords/copper","display_name":"Copper","score":0.5240450501441956},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.5174882411956787},{"id":"https://openalex.org/keywords/reflection","display_name":"Reflection (computer programming)","score":0.501652717590332},{"id":"https://openalex.org/keywords/impurity","display_name":"Impurity","score":0.4608556628227234},{"id":"https://openalex.org/keywords/plasma-diagnostics","display_name":"Plasma diagnostics","score":0.43912598490715027},{"id":"https://openalex.org/keywords/thermal-conduction","display_name":"Thermal conduction","score":0.42990541458129883},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.4200414717197418},{"id":"https://openalex.org/keywords/nondestructive-testing","display_name":"Nondestructive testing","score":0.4129624366760254},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3811896741390228},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.3446187674999237},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3292108178138733},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.18097081780433655},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.17398005723953247},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16051515936851501},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.13636457920074463},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.10647192597389221}],"concepts":[{"id":"https://openalex.org/C2778925768","wikidata":"https://www.wikidata.org/wiki/Q3454718","display_name":"Reflectometry","level":3,"score":0.7810161113739014},{"id":"https://openalex.org/C131540310","wikidata":"https://www.wikidata.org/wiki/Q907564","display_name":"Conductivity","level":2,"score":0.7227374911308289},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6512136459350586},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5646140575408936},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.5240450501441956},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.5174882411956787},{"id":"https://openalex.org/C65682993","wikidata":"https://www.wikidata.org/wiki/Q1056451","display_name":"Reflection (computer programming)","level":2,"score":0.501652717590332},{"id":"https://openalex.org/C71987851","wikidata":"https://www.wikidata.org/wiki/Q7216430","display_name":"Impurity","level":2,"score":0.4608556628227234},{"id":"https://openalex.org/C43503373","wikidata":"https://www.wikidata.org/wiki/Q7201771","display_name":"Plasma diagnostics","level":3,"score":0.43912598490715027},{"id":"https://openalex.org/C172100665","wikidata":"https://www.wikidata.org/wiki/Q7465774","display_name":"Thermal conduction","level":2,"score":0.42990541458129883},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.4200414717197418},{"id":"https://openalex.org/C56529433","wikidata":"https://www.wikidata.org/wiki/Q626700","display_name":"Nondestructive testing","level":2,"score":0.4129624366760254},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3811896741390228},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.3446187674999237},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3292108178138733},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18097081780433655},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17398005723953247},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16051515936851501},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.13636457920074463},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10647192597389221},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C103824480","wikidata":"https://www.wikidata.org/wiki/Q185889","display_name":"Time domain","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592420","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592420","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1966441865","https://openalex.org/W2066966906","https://openalex.org/W2139054759"],"related_works":["https://openalex.org/W2140036717","https://openalex.org/W2091193607","https://openalex.org/W2035752977","https://openalex.org/W2597922112","https://openalex.org/W2084512058","https://openalex.org/W2022839116","https://openalex.org/W2249658485","https://openalex.org/W2139934557","https://openalex.org/W2774871574","https://openalex.org/W4295419514"],"abstract_inverted_index":{"We":[0],"report":[1],"our":[2],"evaluation":[3],"of":[4,11,32,57,64,110],"metallic":[5],"material":[6],"electric":[7],"conductivity":[8,96],"in":[9,24,85,94],"terms":[10],"spectroscopic":[12],"reflectometry":[13],"at":[14],"plasma":[15],"edges":[16],"for":[17],"examining":[18],"rapid":[19],"and":[20,41,51,62,69,82,107],"nondestructive":[21],"micro":[22],"components":[23],"microsystem.":[25],"Conductivity":[26],"(i.e.,":[27],"the":[28,58,70,79,83,86,100,108],"mean":[29,71],"free":[30,72],"time":[31,73],"conduction":[33],"electron)":[34],"estimations":[35],"were":[36,67,112],"obtained":[37,98],"through":[38,99],"spectral":[39],"measurements":[40],"fitting":[42,77],"operations":[43],"conducted":[44],"with":[45,78],"a":[46],"theoretical":[47],"model":[48,61],"using":[49],"copper":[50],"silver":[52],"metal":[53],"films.":[54],"The":[55],"validity":[56],"Drude-Lorentz":[59],"hybrid":[60],"that":[63],"set":[65],"parameters":[66],"confirmed":[68],"was":[74],"estimated":[75],"by":[76],"peak":[80],"height":[81],"wavelength":[84],"differential":[87],"reflection":[88],"spectrum":[89],"as":[90],"criteria.":[91],"Significant":[92],"differences":[93],"extracted":[95],"values":[97],"process":[101],"conditions":[102],"(e.g.,":[103],"crystalline":[104],"deficiency":[105],"density":[106],"existence":[109],"impurities)":[111],"recognized.":[113]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}