{"id":"https://openalex.org/W2069270715","doi":"https://doi.org/10.1109/nems.2010.5592269","title":"Package improvements and testing of a novel MEMS bionic vector hydrophone","display_name":"Package improvements and testing of a novel MEMS bionic vector hydrophone","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2069270715","doi":"https://doi.org/10.1109/nems.2010.5592269","mag":"2069270715"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592269","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592269","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100374270","display_name":"Guojun Zhang","orcid":"https://orcid.org/0000-0001-8650-0847"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Guojun Zhang","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100408495","display_name":"Panpan Wang","orcid":"https://orcid.org/0000-0003-2581-6113"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Panpan Wang","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111939306","display_name":"Chenyang Xue","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyang Xue","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101195224","display_name":"Qiulin Tan","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiulin Tan","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054341902","display_name":"Jijun Xiong","orcid":"https://orcid.org/0000-0003-1560-9858"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jijun Xiong","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100739058","display_name":"Wendong Zhang","orcid":"https://orcid.org/0000-0003-1762-9246"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wendong Zhang","raw_affiliation_strings":["National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of, Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, Shanxi, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5100374270"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.13115754,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"49","issue":null,"first_page":"769","last_page":"772"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11698","display_name":"Underwater Acoustics Research","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1910","display_name":"Oceanography"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11698","display_name":"Underwater Acoustics Research","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1910","display_name":"Oceanography"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11192","display_name":"Underwater Vehicles and Communication Systems","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12697","display_name":"Water Quality Monitoring Technologies","score":0.9656999707221985,"subfield":{"id":"https://openalex.org/subfields/2312","display_name":"Water Science and Technology"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrophone","display_name":"Hydrophone","score":0.9511681795120239},{"id":"https://openalex.org/keywords/preamplifier","display_name":"Preamplifier","score":0.6894346475601196},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6681437492370605},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6239019632339478},{"id":"https://openalex.org/keywords/underwater","display_name":"Underwater","score":0.6182241439819336},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.4866360127925873},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.44279131293296814},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.42910391092300415},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.42900392413139343},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37570714950561523},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3019866943359375},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.271756112575531},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.26890674233436584},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1534656584262848},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.11995473504066467},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.10382762551307678},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.09638765454292297},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09152844548225403}],"concepts":[{"id":"https://openalex.org/C2776328434","wikidata":"https://www.wikidata.org/wiki/Q798062","display_name":"Hydrophone","level":2,"score":0.9511681795120239},{"id":"https://openalex.org/C14245642","wikidata":"https://www.wikidata.org/wiki/Q399804","display_name":"Preamplifier","level":4,"score":0.6894346475601196},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6681437492370605},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6239019632339478},{"id":"https://openalex.org/C98083399","wikidata":"https://www.wikidata.org/wiki/Q3246517","display_name":"Underwater","level":2,"score":0.6182241439819336},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.4866360127925873},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.44279131293296814},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.42910391092300415},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.42900392413139343},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37570714950561523},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3019866943359375},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.271756112575531},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.26890674233436584},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1534656584262848},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.11995473504066467},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.10382762551307678},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.09638765454292297},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09152844548225403},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592269","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592269","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/14","score":0.8199999928474426,"display_name":"Life below water"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2090711137","https://openalex.org/W1973734680","https://openalex.org/W2532423695","https://openalex.org/W2277106721","https://openalex.org/W1980494175","https://openalex.org/W2041696345","https://openalex.org/W4310502015","https://openalex.org/W2953734947","https://openalex.org/W2061138751","https://openalex.org/W2326864911"],"abstract_inverted_index":{"For":[0],"self-noise":[1],"reduction":[2],"of":[3,32,42,49,60,90,111],"underwater":[4,13],"targets,":[5],"low-frequency":[6],"detection":[7],"vector":[8,19,34,51,91,112],"hydrophone":[9,20,35,52,92,113],"is":[10,24,36,70,82,136],"necessary":[11],"in":[12,26,55,77,115],"passive":[14],"detection.":[15],"A":[16],"novel":[17],"MEMS":[18],"with":[21,129],"bionics":[22],"structure":[23],"introduced":[25],"this":[27,33,78],"paper.":[28,79],"The":[29,109,124],"sensing":[30],"principle":[31],"based":[37],"on":[38],"the":[39,50,58,61,68,84,88,101,116,130,134],"acoustic":[40,117],"theory":[41],"cylinder":[43],"utilizing":[44],"piezoresistive":[45],"effect.":[46],"Preliminary":[47],"performance":[48],"was":[53],"obtained":[54],"2007.":[56],"Now":[57],"parameter":[59],"sensitive":[62],"cell":[63],"has":[64],"been":[65],"optimized,":[66],"and":[67,133],"package":[69],"improved.":[71],"All":[72],"these":[73],"researches":[74],"are":[75,121],"presented":[76],"Besides":[80],"calibration":[81],"completed,":[83],"results":[85],"show":[86],"that":[87],"sensitivity":[89],"can":[93],"achieve":[94],"-165":[95],"dB":[96],"(conditioning":[97],"by":[98],"preamplifier)":[99],"at":[100],"frequency":[102],"from":[103],"20":[104],"Hz":[105],"to":[106],"2":[107],"kHz.":[108],"experiments":[110],"applied":[114],"source":[118],"direction":[119],"estimation":[120],"also":[122],"presented.":[123],"test":[125],"value":[126,132],"agrees":[127],"well":[128],"actual":[131],"error":[135],"within":[137],"1\u00b0.":[138]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}