{"id":"https://openalex.org/W2006322480","doi":"https://doi.org/10.1109/nems.2010.5592254","title":"Processing and characteristics of piezoelectric microcantilevers without substrate","display_name":"Processing and characteristics of piezoelectric microcantilevers without substrate","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2006322480","doi":"https://doi.org/10.1109/nems.2010.5592254","mag":"2006322480"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592254","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592254","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101874703","display_name":"Ziping Cao","orcid":"https://orcid.org/0000-0002-9087-3483"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Ziping Cao","raw_affiliation_strings":["Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]"],"affiliations":[{"raw_affiliation_string":"Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089205394","display_name":"Jinya Zhang","orcid":"https://orcid.org/0000-0002-8869-2288"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Jinya Zhang","raw_affiliation_strings":["Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]"],"affiliations":[{"raw_affiliation_string":"Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111893555","display_name":"Hiroki Kuwano","orcid":null},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroki Kuwano","raw_affiliation_strings":["Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]"],"affiliations":[{"raw_affiliation_string":"Department of Nanomechanics, Graduate School of Engineering, University of Tohoku, Sendai, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"[Department of Nanomechanics Graduate School of Engineering, Tohoku University, Sendai, Japan]","institution_ids":["https://openalex.org/I201537933"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5101874703"],"corresponding_institution_ids":["https://openalex.org/I201537933"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.13180512,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"716","last_page":"719"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.8436145782470703},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7703433036804199},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6627275943756104},{"id":"https://openalex.org/keywords/energy-harvesting","display_name":"Energy harvesting","score":0.6212977170944214},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.6204161047935486},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5814340114593506},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5344278812408447},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.525240421295166},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5003495216369629},{"id":"https://openalex.org/keywords/piezoelectric-coefficient","display_name":"Piezoelectric coefficient","score":0.48381561040878296},{"id":"https://openalex.org/keywords/ceramic","display_name":"Ceramic","score":0.44913095235824585},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.44361406564712524},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.391296923160553},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3701304495334625},{"id":"https://openalex.org/keywords/energy","display_name":"Energy (signal processing)","score":0.3386533856391907},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.33218157291412354},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.19271066784858704},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.08645486831665039},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.0831688642501831},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07518541812896729}],"concepts":[{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.8436145782470703},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7703433036804199},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6627275943756104},{"id":"https://openalex.org/C101518730","wikidata":"https://www.wikidata.org/wiki/Q930236","display_name":"Energy harvesting","level":3,"score":0.6212977170944214},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6204161047935486},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5814340114593506},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5344278812408447},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.525240421295166},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5003495216369629},{"id":"https://openalex.org/C135405054","wikidata":"https://www.wikidata.org/wiki/Q7193131","display_name":"Piezoelectric coefficient","level":3,"score":0.48381561040878296},{"id":"https://openalex.org/C134132462","wikidata":"https://www.wikidata.org/wiki/Q45621","display_name":"Ceramic","level":2,"score":0.44913095235824585},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.44361406564712524},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.391296923160553},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3701304495334625},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.3386533856391907},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33218157291412354},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.19271066784858704},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.08645486831665039},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0831688642501831},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07518541812896729},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592254","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592254","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7599999904632568,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1604627362","https://openalex.org/W1970311347","https://openalex.org/W2028768072","https://openalex.org/W2130149335","https://openalex.org/W2171620025"],"related_works":["https://openalex.org/W2114051864","https://openalex.org/W2938218595","https://openalex.org/W2102304199","https://openalex.org/W3036249939","https://openalex.org/W2550854368","https://openalex.org/W1563566515","https://openalex.org/W4281705334","https://openalex.org/W1571766405","https://openalex.org/W1014036322","https://openalex.org/W2064792374"],"abstract_inverted_index":{"Based":[0],"on":[1,37],"a":[2,14,21],"4":[3],"\u03bcm":[4],"thick":[5],"PZT":[6,72],"films":[7],"with":[8,20],"(100)":[9],"orientation,":[10],"piezoelectric":[11,58],"microcantilevers":[12,26],"without":[13],"substrate":[15],"support":[16],"(free-stand)":[17],"were":[18],"fabricated":[19],"typical":[22],"micromachining":[23],"process.":[24],"These":[25],"have":[27],"low":[28],"natural":[29],"frequency":[30],"which":[31],"is":[32,64],"suitable":[33],"for":[34],"the":[35,56],"application":[36],"vibration":[38],"energy":[39],"harvesting.":[40],"Simultaneously,":[41],"their":[42],"large":[43],"linear":[44],"displacement":[45],"induced":[46],"by":[47],"voltage":[48],"indicates":[49],"they":[50],"are":[51],"also":[52],"good":[53],"microactuators,":[54],"and":[55],"calculated":[57],"coefficient":[59],"d":[60],"<sub":[61],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[62],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">31</sub>":[63],"one":[65],"of":[66,68,70],"third":[67],"that":[69],"bulky":[71],"ceramics.":[73]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}