{"id":"https://openalex.org/W1976608947","doi":"https://doi.org/10.1109/nems.2010.5592238","title":"The coupling error analysis of the decoupled silicon Micro-Gyroscope","display_name":"The coupling error analysis of the decoupled silicon Micro-Gyroscope","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W1976608947","doi":"https://doi.org/10.1109/nems.2010.5592238","mag":"1976608947"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2010.5592238","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592238","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037245137","display_name":"Bo Yang","orcid":"https://orcid.org/0000-0003-2855-3662"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Bo Yang","raw_affiliation_strings":["Southeast University, Nanjing, Jiangsu, CN","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Southeast University, Nanjing, Jiangsu, CN","institution_ids":[]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076693818","display_name":"Shourong Wang","orcid":"https://orcid.org/0000-0003-3394-1299"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]},{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shourong Wang","raw_affiliation_strings":["School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100732449","display_name":"Hongsheng Li","orcid":"https://orcid.org/0000-0001-6339-2505"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]},{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongsheng Li","raw_affiliation_strings":["School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103000668","display_name":"Libin Huang","orcid":"https://orcid.org/0000-0001-9137-4398"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]},{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libin Huang","raw_affiliation_strings":["School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056134387","display_name":"Kunyu Li","orcid":"https://orcid.org/0009-0004-4025-0941"},"institutions":[{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kunyu Li","raw_affiliation_strings":["School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111009905","display_name":"Yong Yin","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]},{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yong Yin","raw_affiliation_strings":["School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Ministry of Education, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, South-East University, Nanjing, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"School of Instrument Science & Engineering Institute, Southeast University & Key laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5037245137"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.06088919,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"97 98","issue":null,"first_page":"356","last_page":"361"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8137610554695129},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.7760388851165771},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6186137199401855},{"id":"https://openalex.org/keywords/zero","display_name":"Zero (linguistics)","score":0.5843212008476257},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.547396719455719},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.5473180413246155},{"id":"https://openalex.org/keywords/coupling-coefficient-of-resonators","display_name":"Coupling coefficient of resonators","score":0.5151540040969849},{"id":"https://openalex.org/keywords/mode","display_name":"Mode (computer interface)","score":0.4767621159553528},{"id":"https://openalex.org/keywords/sense","display_name":"Sense (electronics)","score":0.4354274272918701},{"id":"https://openalex.org/keywords/error-analysis","display_name":"Error analysis","score":0.43004798889160156},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.3241635262966156},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.32185477018356323},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22098419070243835},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.20765390992164612},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.19799363613128662},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.16955634951591492},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.10857158899307251},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.10664469003677368},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1027866005897522}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8137610554695129},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.7760388851165771},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6186137199401855},{"id":"https://openalex.org/C2780813799","wikidata":"https://www.wikidata.org/wiki/Q3274237","display_name":"Zero (linguistics)","level":2,"score":0.5843212008476257},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.547396719455719},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5473180413246155},{"id":"https://openalex.org/C91397564","wikidata":"https://www.wikidata.org/wiki/Q15059729","display_name":"Coupling coefficient of resonators","level":3,"score":0.5151540040969849},{"id":"https://openalex.org/C48677424","wikidata":"https://www.wikidata.org/wiki/Q6888088","display_name":"Mode (computer interface)","level":2,"score":0.4767621159553528},{"id":"https://openalex.org/C143141573","wikidata":"https://www.wikidata.org/wiki/Q7450971","display_name":"Sense (electronics)","level":2,"score":0.4354274272918701},{"id":"https://openalex.org/C3018824978","wikidata":"https://www.wikidata.org/wiki/Q2894891","display_name":"Error analysis","level":2,"score":0.43004798889160156},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.3241635262966156},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.32185477018356323},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22098419070243835},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.20765390992164612},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19799363613128662},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.16955634951591492},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10857158899307251},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.10664469003677368},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1027866005897522},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2010.5592238","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2010.5592238","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W243463914","https://openalex.org/W1918552860","https://openalex.org/W1975528623","https://openalex.org/W2017316327","https://openalex.org/W2040886699","https://openalex.org/W2058868064","https://openalex.org/W2106296826","https://openalex.org/W2106729406","https://openalex.org/W2133244816","https://openalex.org/W2154585370","https://openalex.org/W2161403805","https://openalex.org/W2171671401","https://openalex.org/W6609340002","https://openalex.org/W6682869686"],"related_works":["https://openalex.org/W1889129279","https://openalex.org/W4387451989","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W2358715846","https://openalex.org/W2761234876","https://openalex.org/W2020920196","https://openalex.org/W4229455305","https://openalex.org/W2068060055","https://openalex.org/W2010564890"],"abstract_inverted_index":{"This":[0],"paper":[1],"deal":[2],"with":[3],"a":[4],"new":[5],"symmetrical":[6],"and":[7,33,121],"Decoupled":[8],"Silicon":[9],"Micro-Gyroscope":[10],"(DSMG).":[11],"By":[12],"the":[13,18,20,25,39,49,57,61,77,94,100,108,119,127],"simplified":[14],"motion":[15],"model":[16],"of":[17,28,42,56,65,76,99,123],"DSMG,":[19,124],"mechanical":[21,43,66,115],"coupling":[22,44,67,116],"error":[23,45,68,117],"from":[24],"width":[26],"errors":[27],"suspension":[29],"beams":[30],"is":[31,69,102],"analyzed":[32],"deduced.":[34],"The":[35,52,89,111],"simulation":[36],"shows":[37],"that":[38,60,75,93],"simulated":[40],"results":[41,55,91],"basically":[46],"equal":[47],"to":[48],"calculation":[50],"results.":[51],"characterization":[53],"test":[54],"DSMG":[58,101],"show":[59,92],"equivalent":[62],"input":[63],"rate":[64],"31\u00b0/s,":[70],"13.9":[71],"times":[72,105],"smaller":[73,106],"than":[74,107],"part-decoupled":[78,109],"SMG":[79],"developed":[80],"by":[81],"our":[82],"research":[83],"group":[84],"in":[85],"an":[86],"earlier":[87],"stage.":[88],"experiment":[90],"zero":[95],"bias":[96],"temperature":[97],"coefficient":[98],"57.68deg/h/\u00b0C,":[103],"9.42":[104],"SMG.":[110],"decoupled":[112],"structure":[113],"reduces":[114],"between":[118],"drive-mode":[120],"sense-mode":[122],"which":[125],"decrease":[126],"zero-rate":[128],"output":[129],"drift.":[130]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}