{"id":"https://openalex.org/W2165128526","doi":"https://doi.org/10.1109/nems.2009.5068766","title":"Design of a novel sensor based on piezo-resistive effect of GaAs/AlGaAs/InGaAs PHEMT","display_name":"Design of a novel sensor based on piezo-resistive effect of GaAs/AlGaAs/InGaAs PHEMT","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2165128526","doi":"https://doi.org/10.1109/nems.2009.5068766","mag":"2165128526"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068766","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068766","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112062802","display_name":"Jing Cui","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jing Cui","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108140523","display_name":"Bingzhen Zhang","orcid":"https://orcid.org/0009-0003-6990-3523"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bingzhen Zhang","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100361964","display_name":"Jun Liu","orcid":"https://orcid.org/0000-0002-8627-5085"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Liu","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074119129","display_name":"Chengyang Xue","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengyang Xue","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100461510","display_name":"Guowen Liu","orcid":"https://orcid.org/0000-0002-2672-6104"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guowen Liu","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044323254","display_name":"Xiaojuan Jia","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaojuan Jia","raw_affiliation_strings":["Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China"],"affiliations":[{"raw_affiliation_string":"Affiliation 1 (Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5112062802"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":1.1415,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.78959481,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1103","last_page":"1106"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-electron-mobility-transistor","display_name":"High-electron-mobility transistor","score":0.8753888607025146},{"id":"https://openalex.org/keywords/resistive-touchscreen","display_name":"Resistive touchscreen","score":0.7359165549278259},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.7221742868423462},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7070632576942444},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.64766526222229},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.6298993229866028},{"id":"https://openalex.org/keywords/gallium-arsenide","display_name":"Gallium arsenide","score":0.5592552423477173},{"id":"https://openalex.org/keywords/field-effect-transistor","display_name":"Field-effect transistor","score":0.49326103925704956},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.4165690243244171},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3779190480709076},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.222627192735672},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16615837812423706},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.08932557702064514}],"concepts":[{"id":"https://openalex.org/C162057924","wikidata":"https://www.wikidata.org/wiki/Q1617706","display_name":"High-electron-mobility transistor","level":4,"score":0.8753888607025146},{"id":"https://openalex.org/C6899612","wikidata":"https://www.wikidata.org/wiki/Q852911","display_name":"Resistive touchscreen","level":2,"score":0.7359165549278259},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.7221742868423462},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7070632576942444},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.64766526222229},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.6298993229866028},{"id":"https://openalex.org/C510052550","wikidata":"https://www.wikidata.org/wiki/Q422819","display_name":"Gallium arsenide","level":2,"score":0.5592552423477173},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.49326103925704956},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4165690243244171},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3779190480709076},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.222627192735672},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16615837812423706},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.08932557702064514},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068766","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068766","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7900000214576721,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1480606358","https://openalex.org/W1972242032","https://openalex.org/W1995314372","https://openalex.org/W2089135572"],"related_works":["https://openalex.org/W4285099144","https://openalex.org/W4317346967","https://openalex.org/W4384818178","https://openalex.org/W2044189165","https://openalex.org/W3107655241","https://openalex.org/W3023789712","https://openalex.org/W2048794087","https://openalex.org/W2607451680","https://openalex.org/W3015255412","https://openalex.org/W1664355441"],"abstract_inverted_index":{"A":[0],"novel":[1],"nano":[2],"electro":[3],"mechanical":[4],"system":[5],"(NEMS)":[6],"accelerated":[7,15,65],"sensor":[8,16,42,66],"was":[9],"presented":[10],"in":[11],"this":[12,63],"paper.":[13],"The":[14],"is":[17,36,51,55],"based":[18],"on":[19],"piezo-resistive":[20],"effect":[21,30,33],"of":[22,31,40],"GaAs/AlAs/InGaAs":[23],"pseudomorph-high":[24],"electron":[25],"mobility":[26],"transistor":[27,34],"(PHEMT).":[28],"Piezo-resistive":[29],"field":[32],"(FET)":[35],"analyzed,":[37],"the":[38,41,58],"structure":[39],"and":[43,49,57],"its":[44],"sensitive":[45],"element":[46],"are":[47],"designed,":[48],"process":[50],"introduced.":[52],"Abecedarian":[53],"test":[54,59],"performed,":[56],"result":[60],"shows":[61],"that":[62],"NEMS":[64],"could":[67],"sense":[68],"exterior":[69],"stress":[70],"well.":[71]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
