{"id":"https://openalex.org/W2165570492","doi":"https://doi.org/10.1109/nems.2009.5068730","title":"Two new micro programmable gratings and their potential applications","display_name":"Two new micro programmable gratings and their potential applications","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2165570492","doi":"https://doi.org/10.1109/nems.2009.5068730","mag":"2165570492"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068730","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068730","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028770395","display_name":"Yiting Yu","orcid":"https://orcid.org/0000-0001-9405-1869"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yiting Yu","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105840489","display_name":"Weizheng Yuan","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weizheng Yuan","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101054684","display_name":"Bin Yan","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Yan","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102827940","display_name":"Taiping Li","orcid":"https://orcid.org/0000-0003-3023-6498"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Taiping Li","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100738124","display_name":"Lanlan Wang","orcid":"https://orcid.org/0000-0003-2051-6541"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lanlan Wang","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"41","issue":null,"first_page":"946","last_page":"949"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.8592870235443115},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7582988142967224},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7494093775749207},{"id":"https://openalex.org/keywords/blazed-grating","display_name":"Blazed grating","score":0.7343670129776001},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6585663557052612},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.5625956654548645},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5137808918952942},{"id":"https://openalex.org/keywords/diffraction-efficiency","display_name":"Diffraction efficiency","score":0.4844105839729309},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10856890678405762}],"concepts":[{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.8592870235443115},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7582988142967224},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7494093775749207},{"id":"https://openalex.org/C1363856","wikidata":"https://www.wikidata.org/wiki/Q883195","display_name":"Blazed grating","level":4,"score":0.7343670129776001},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6585663557052612},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.5625956654548645},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5137808918952942},{"id":"https://openalex.org/C18355248","wikidata":"https://www.wikidata.org/wiki/Q850922","display_name":"Diffraction efficiency","level":3,"score":0.4844105839729309},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10856890678405762},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068730","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068730","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.4300000071525574,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W9901194","https://openalex.org/W1604973630","https://openalex.org/W2010215162","https://openalex.org/W2061245700","https://openalex.org/W2061813362","https://openalex.org/W2072425624","https://openalex.org/W2089743120","https://openalex.org/W2113934884","https://openalex.org/W2143914153","https://openalex.org/W2153923914","https://openalex.org/W2167896955","https://openalex.org/W2259450726","https://openalex.org/W2328303680","https://openalex.org/W6600417160","https://openalex.org/W6665909459","https://openalex.org/W6682944299"],"related_works":["https://openalex.org/W2073524920","https://openalex.org/W2351403114","https://openalex.org/W4280537711","https://openalex.org/W2100956557","https://openalex.org/W4280555649","https://openalex.org/W1965944318","https://openalex.org/W4321262545","https://openalex.org/W2442194584","https://openalex.org/W2808384726","https://openalex.org/W2055615132"],"abstract_inverted_index":{"This":[0,152],"paper":[1],"presents":[2],"the":[3,42,52,64,69,78,89,102,111,120,134,155],"basic":[4],"concepts":[5],"of":[6,149],"design":[7],"and":[8,16,55,88,107,132],"fabrication":[9],"for":[10,21,51,85,145,159],"two":[11],"new":[12],"micro":[13,29,79,96],"programmable":[14,80,97],"gratings,":[15],"gives":[17],"preliminary":[18],"research":[19],"results":[20,91],"demonstrating":[22],"their":[23,56],"potential":[24],"applications.":[25,162],"Firstly,":[26],"a":[27,95],"surface-micromachined":[28],"programable":[30],"grating":[31,53,82,99,121,157],"with":[32],"its":[33],"blazed":[34,43,72,81],"angle":[35,73,138],"electrostatically":[36],"modulated":[37],"was":[38,58,83,105],"described.":[39],"To":[40],"maximize":[41],"angle,":[44],"dimples":[45],"were":[46,92],"taken":[47],"as":[48],"key":[49],"components":[50],"beams":[54],"depth":[57],"specially":[59],"designed":[60],"to":[61,63,117,128,143],"close":[62],"air":[65],"gap.":[66],"After":[67],"fabrication,":[68],"realized":[70],"maximum":[71],"can":[74],"reach":[75],"5.1deg.":[76],"Then,":[77],"applied":[84],"multispectral":[86],"imaging":[87],"initial":[90],"obtained.":[93],"Secondly,":[94],"pitch-tunable":[98,156],"based":[100],"on":[101],"silicon-on-glass":[103],"technology":[104],"introduced":[106],"fabricated.":[108],"By":[109],"changing":[110],"driving":[112],"voltage":[113],"from":[114,125,141],"0":[115],"V":[116],"45":[118],"V,":[119],"pitch":[122],"is":[123,139],"increased":[124],"10":[126],"mum":[127,130],"20":[129],"respectively":[131],"accordingly,":[133],"measured":[135],"first-order":[136],"diffraction":[137],"changed":[140],"3.86deg":[142],"1.94deg":[144],"an":[146],"incident":[147],"laser":[148],"650":[150],"nm.":[151],"property":[153],"enables":[154],"suitable":[158],"optical":[160],"switch":[161]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}