{"id":"https://openalex.org/W2163048902","doi":"https://doi.org/10.1109/nems.2009.5068721","title":"A novel 3D flexible parylene-metal structure fabrication technique","display_name":"A novel 3D flexible parylene-metal structure fabrication technique","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2163048902","doi":"https://doi.org/10.1109/nems.2009.5068721","mag":"2163048902"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068721","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068721","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086525905","display_name":"Xianju Huang","orcid":"https://orcid.org/0000-0002-0218-6983"},"institutions":[{"id":"https://openalex.org/I4210128628","display_name":"Peking University Shenzhen Hospital","ror":"https://ror.org/03kkjyb15","country_code":"CN","type":"healthcare","lineage":["https://openalex.org/I4210128628"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xianju Huang","raw_affiliation_strings":["Shenzhen Graduate School, Peking University, Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Peking University, Shenzhen, China","institution_ids":["https://openalex.org/I4210128628"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103209145","display_name":"Yu Tang","orcid":"https://orcid.org/0009-0006-3432-6924"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Tang","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021885614","display_name":"Renxin Wang","orcid":"https://orcid.org/0000-0002-3441-9286"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Renxin Wang","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100771809","display_name":"Chuang Qian","orcid":"https://orcid.org/0000-0002-7207-4995"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuang Qian","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100391999","display_name":"Wei Wang","orcid":"https://orcid.org/0000-0002-5257-7675"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Wang","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100389157","display_name":"Zhihong Li","orcid":"https://orcid.org/0000-0002-5978-7894"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhihong Li","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5086525905"],"corresponding_institution_ids":["https://openalex.org/I4210128628"],"apc_list":null,"apc_paid":null,"fwci":0.1206,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.46187738,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"145 141","issue":null,"first_page":"907","last_page":"910"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9879999756813049,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8035969734191895},{"id":"https://openalex.org/keywords/microelectrode","display_name":"Microelectrode","score":0.7642966508865356},{"id":"https://openalex.org/keywords/parylene","display_name":"Parylene","score":0.7296885251998901},{"id":"https://openalex.org/keywords/deep-reactive-ion-etching","display_name":"Deep reactive-ion etching","score":0.7161461114883423},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6348561644554138},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6309287548065186},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6006631255149841},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.596259593963623},{"id":"https://openalex.org/keywords/retinal-implant","display_name":"Retinal implant","score":0.5594552755355835},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5444849133491516},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45960310101509094},{"id":"https://openalex.org/keywords/electropolishing","display_name":"Electropolishing","score":0.4190128445625305},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4119044244289398},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"Reactive-ion etching","score":0.38263019919395447},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.16437125205993652},{"id":"https://openalex.org/keywords/electrolyte","display_name":"Electrolyte","score":0.13402557373046875},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.1279483437538147},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.09112712740898132},{"id":"https://openalex.org/keywords/retinal","display_name":"Retinal","score":0.08414053916931152},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.07861447334289551}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8035969734191895},{"id":"https://openalex.org/C111670793","wikidata":"https://www.wikidata.org/wiki/Q16979465","display_name":"Microelectrode","level":3,"score":0.7642966508865356},{"id":"https://openalex.org/C2777385008","wikidata":"https://www.wikidata.org/wiki/Q448540","display_name":"Parylene","level":3,"score":0.7296885251998901},{"id":"https://openalex.org/C124634506","wikidata":"https://www.wikidata.org/wiki/Q486936","display_name":"Deep reactive-ion etching","level":5,"score":0.7161461114883423},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6348561644554138},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6309287548065186},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6006631255149841},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.596259593963623},{"id":"https://openalex.org/C158383150","wikidata":"https://www.wikidata.org/wiki/Q3149439","display_name":"Retinal implant","level":3,"score":0.5594552755355835},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5444849133491516},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45960310101509094},{"id":"https://openalex.org/C2777848306","wikidata":"https://www.wikidata.org/wiki/Q1327527","display_name":"Electropolishing","level":4,"score":0.4190128445625305},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4119044244289398},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.38263019919395447},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.16437125205993652},{"id":"https://openalex.org/C68801617","wikidata":"https://www.wikidata.org/wiki/Q162908","display_name":"Electrolyte","level":3,"score":0.13402557373046875},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.1279483437538147},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.09112712740898132},{"id":"https://openalex.org/C2780827179","wikidata":"https://www.wikidata.org/wiki/Q422001","display_name":"Retinal","level":2,"score":0.08414053916931152},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07861447334289551},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068721","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068721","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2005392635","https://openalex.org/W2030786835","https://openalex.org/W2096956842","https://openalex.org/W2110581670","https://openalex.org/W2115443030","https://openalex.org/W2116092910","https://openalex.org/W2116095215","https://openalex.org/W2164330331"],"related_works":["https://openalex.org/W2507729704","https://openalex.org/W3163667899","https://openalex.org/W2106529860","https://openalex.org/W2360464821","https://openalex.org/W1504164758","https://openalex.org/W2014359839","https://openalex.org/W2027983671","https://openalex.org/W2512909473","https://openalex.org/W1997614918","https://openalex.org/W2141838890"],"abstract_inverted_index":{"Flexible":[0],"microelectrode":[1],"array":[2],"(MEA)":[3],"has":[4],"been":[5],"widely":[6],"used":[7,93],"in":[8],"neural":[9],"prosthesis,":[10],"such":[11],"as":[12],"artificial":[13,137],"retinal":[14,138],"chip.":[15,139],"Specially,":[16],"this":[17,31],"sort":[18],"of":[19,99],"MEA":[20],"for":[21],"highly":[22],"efficient":[23],"electrical":[24,122],"stimulation":[25,123],"is":[26],"more":[27],"urgently":[28],"required.":[29],"In":[30],"work,":[32],"a":[33,82,129,134],"3D":[34,60,83,101,112],"flexible":[35,84,113],"parylene-metal":[36,85],"structure":[37,41,62,86],"was":[38,46,63,87,92],"fabricated":[39],"by":[40,48,65,116],"transfer":[42],"technique.":[43],"Silicon":[44],"wafer":[45],"etched":[47],"deep":[49],"reactive":[50],"ion":[51],"etching":[52,56],"and":[53,103],"isotropic":[54],"wet":[55],"sequentially.":[57],"The":[58,107],"so-etched":[59],"silicon":[61,80],"replicated":[64],"the":[66,79,96,100,104,111,117],"parylene":[67],"with/without":[68],"metal":[69],"depositions":[70],"that":[71,110],"followed.":[72],"After":[73],"releasing":[74],"these":[75],"functional":[76],"films":[77],"from":[78],"mold,":[81],"obtained.":[88],"A":[89],"numerical":[90],"simulation":[91],"to":[94,132],"compare":[95],"stimulating":[97],"performance":[98],"electrode":[102],"planar":[105],"one.":[106],"results":[108],"indicated":[109],"microelectrodes":[114],"prepared":[115],"present":[118],"technique":[119],"could":[120],"enhance":[121],"characteristics":[124],"considerably,":[125],"which":[126],"made":[127],"it":[128],"promising":[130],"candidate":[131],"prepare":[133],"high":[135],"quality":[136]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}