{"id":"https://openalex.org/W2047758308","doi":"https://doi.org/10.1109/nems.2009.5068664","title":"Ferroelectric and dielectric properties of Pb(Zr,Ti)O<inf>3</inf> thin film capacitors","display_name":"Ferroelectric and dielectric properties of Pb(Zr,Ti)O<inf>3</inf> thin film capacitors","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2047758308","doi":"https://doi.org/10.1109/nems.2009.5068664","mag":"2047758308"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068664","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068664","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100620783","display_name":"Minh D. Nguyen","orcid":"https://orcid.org/0000-0002-1300-7717"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"M. D. Nguyen","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083086580","display_name":"Ruud Steenwelle","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"R. J. A. Steenwelle","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058184756","display_name":"Paul M. te Riele","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"P. M. te Riele","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033943545","display_name":"Jan M. Dekkers","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J. M. Dekkers","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042299232","display_name":"D. H. A. Blank","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"D. H. A. Blank","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068067980","display_name":"Guus Rijnders","orcid":"https://orcid.org/0000-0002-4638-0630"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"G. Rijnders","raw_affiliation_strings":["Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA, Institute of Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5100620783"],"corresponding_institution_ids":["https://openalex.org/I94624287"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.10888709,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"649","last_page":"652"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12155","display_name":"Microwave Dielectric Ceramics Synthesis","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.7475041747093201},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.7363535761833191},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.663392186164856},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5747637748718262},{"id":"https://openalex.org/keywords/dissipation-factor","display_name":"Dissipation factor","score":0.5668584108352661},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5086008310317993},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.5053189396858215},{"id":"https://openalex.org/keywords/coercivity","display_name":"Coercivity","score":0.49947285652160645},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.48123931884765625},{"id":"https://openalex.org/keywords/crystallite","display_name":"Crystallite","score":0.4176105558872223},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.25886356830596924},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2586830258369446},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.2461811900138855},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.2246459424495697},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.17296132445335388},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.14589285850524902},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.14498671889305115},{"id":"https://openalex.org/keywords/physical-chemistry","display_name":"Physical chemistry","score":0.1302255392074585},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.10575047135353088}],"concepts":[{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.7475041747093201},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7363535761833191},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.663392186164856},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5747637748718262},{"id":"https://openalex.org/C97274863","wikidata":"https://www.wikidata.org/wiki/Q1040795","display_name":"Dissipation factor","level":3,"score":0.5668584108352661},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5086008310317993},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5053189396858215},{"id":"https://openalex.org/C126530901","wikidata":"https://www.wikidata.org/wiki/Q432635","display_name":"Coercivity","level":2,"score":0.49947285652160645},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.48123931884765625},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.4176105558872223},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.25886356830596924},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2586830258369446},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.2461811900138855},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.2246459424495697},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17296132445335388},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.14589285850524902},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.14498671889305115},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.1302255392074585},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.10575047135353088},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2009.5068664","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068664","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:ris.utwente.nl:openaire_cris_publications/a9524307-a4ec-40cc-9d45-4831f616d36b","is_oa":false,"landing_page_url":"https://research.utwente.nl/en/publications/a9524307-a4ec-40cc-9d45-4831f616d36b","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nguyen, D M, Steenwelle, R J A, te Riele, P M, Dekkers, J M, Blank, D H A & Rijnders, A J H M 2009, Ferroelectric and dielectric properties of Pb(Zr,Ti)O3 thin film capacitors. in 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2009). Proceedings of the IEEE, IEEE, Piscataway, NJ, pp. 644-647, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2009, Shenzhen, China, 5/01/09. https://doi.org/10.1109/NEMS.2009.5068664","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1985103002","https://openalex.org/W2026335191","https://openalex.org/W2067021285","https://openalex.org/W2161349314","https://openalex.org/W4256381683"],"related_works":["https://openalex.org/W1979864087","https://openalex.org/W2044642251","https://openalex.org/W3093027776","https://openalex.org/W1986796332","https://openalex.org/W4283367861","https://openalex.org/W2080773395","https://openalex.org/W2099626417","https://openalex.org/W2019514496","https://openalex.org/W2085450379","https://openalex.org/W2354552488"],"abstract_inverted_index":{"Ferroelectric":[0],"thin":[1],"films":[2,20],"with":[3,23,51],"compositions":[4],"PbZr0.52Ti0.48O3":[5],"(PZT)":[6],"have":[7],"been":[8],"processed":[9],"by":[10,35],"pulsed":[11],"laser":[12],"deposition":[13],"on":[14,121],"the":[15,27,63,108,112,122],"SrRuO3(110)/YSZ(001)/Si(001)":[16],"substrates.":[17],"The":[18,30,41,56,84,105],"obtained":[19],"are":[21],"polycrystalline,":[22],"perovskite":[24],"structure":[25,32],"and":[26,48,69,80,87,95,100],"(110)-dominant":[28],"orientation.":[29],"columnar":[31],"was":[33],"observed":[34],"cross-sectional":[36],"scanning":[37],"electron":[38],"microscopy":[39],"(SEM).":[40],"polarization":[42,65],"hysteresis":[43],"loops":[44],"(P-E),":[45],"capacitance-voltage":[46],"(C-V)":[47],"dielectric":[49,85],"properties":[50],"different":[52],"frequency":[53],"were":[54,90],"studied.":[55],"250":[57],"nm":[58],"thick":[59],"PZT":[60],"film":[61,123],"showed":[62],"remnant":[64],"of":[66,73,107],"25":[67],"\u00b5C/cm2":[68],"coercive":[70],"electric":[71],"field":[72],"34.1":[74],"kV/cm":[75,78],"at":[76,97,111],"200":[77],"amplitude":[79],"1":[81],"kHz":[82,102],"frequency.":[83],"constant":[86],"dissipation":[88],"factor":[89],"measured":[91],"to":[92],"be":[93,116],"1255":[94],"0.04":[96],"room":[98],"temperature":[99],"10":[101],"frequency,":[103],"respectively.":[104],"existence":[106],"interfacial":[109],"dead-layer":[110],"electrode-film":[113],"interface":[114],"can":[115],"evaluated":[117],"from":[118],"capacitance":[119],"dependence":[120],"thickness.":[124]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}