{"id":"https://openalex.org/W2145975340","doi":"https://doi.org/10.1109/nems.2009.5068630","title":"CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer","display_name":"CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2145975340","doi":"https://doi.org/10.1109/nems.2009.5068630","mag":"2145975340"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068630","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068630","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100657635","display_name":"Yuntao Liu","orcid":"https://orcid.org/0000-0002-4334-0406"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yuntao Liu","raw_affiliation_strings":["MEMS Center, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101857541","display_name":"Xiaowei Liu","orcid":"https://orcid.org/0000-0002-3384-853X"},"institutions":[{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaowei Liu","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, China","MEMS Center, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100672015","display_name":"Liang Yin","orcid":"https://orcid.org/0000-0002-6230-374X"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liang Yin","raw_affiliation_strings":["MEMS Center, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100652322","display_name":"Weiping Chen","orcid":"https://orcid.org/0000-0001-5658-1914"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"funder","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weiping Chen","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, China","MEMS Center, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101650280","display_name":"Qun Wu","orcid":"https://orcid.org/0000-0001-9144-048X"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qun Wu","raw_affiliation_strings":["MEMS Center, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100657635"],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":null,"apc_paid":null,"fwci":0.5982,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.73097773,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"510","last_page":"513"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8287929892539978},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7419372200965881},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.707334578037262},{"id":"https://openalex.org/keywords/correlated-double-sampling","display_name":"Correlated double sampling","score":0.6654232740402222},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.5884568095207214},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5696186423301697},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5334911942481995},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5250808000564575},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5006415843963623},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.4859267771244049},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4763903021812439},{"id":"https://openalex.org/keywords/charge-amplifier","display_name":"Charge amplifier","score":0.42602401971817017},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3837060332298279},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.35781580209732056},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3181207478046417},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.31132829189300537},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.2992601692676544},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2115929126739502},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1874360740184784},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.10715749859809875}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8287929892539978},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7419372200965881},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.707334578037262},{"id":"https://openalex.org/C118277053","wikidata":"https://www.wikidata.org/wiki/Q5172837","display_name":"Correlated double sampling","level":4,"score":0.6654232740402222},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.5884568095207214},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5696186423301697},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5334911942481995},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5250808000564575},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5006415843963623},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.4859267771244049},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4763903021812439},{"id":"https://openalex.org/C169076538","wikidata":"https://www.wikidata.org/wiki/Q1800062","display_name":"Charge amplifier","level":5,"score":0.42602401971817017},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3837060332298279},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35781580209732056},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3181207478046417},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.31132829189300537},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.2992601692676544},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2115929126739502},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1874360740184784},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10715749859809875},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068630","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068630","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8100000023841858,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2031424373","https://openalex.org/W2034618373","https://openalex.org/W2103198996","https://openalex.org/W2104431065","https://openalex.org/W2108498141","https://openalex.org/W2118982144","https://openalex.org/W2149128480","https://openalex.org/W2164010209"],"related_works":["https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2502505565","https://openalex.org/W756886103","https://openalex.org/W610643341","https://openalex.org/W2060384436","https://openalex.org/W2153484902","https://openalex.org/W1516193960","https://openalex.org/W1536956648","https://openalex.org/W1968014829"],"abstract_inverted_index":{"CMOS":[0,69],"interface":[1],"circuitry":[2],"for":[3,21],"closed-loop":[4],"capacitive":[5,23],"MEMS":[6],"accelerometer":[7],"is":[8,19,30,89,96,110],"presented":[9],"in":[10],"this":[11],"paper.":[12],"The":[13,79],"switched-capacitor":[14],"(SC)":[15],"charge":[16],"integration":[17],"method":[18],"used":[20],"the":[22,34,53,84,87,92,100],"sensing,":[24],"correlated":[25],"double":[26],"sampling":[27],"(CDS)":[28],"technique":[29],"introduced":[31],"to":[32,47,98],"compensate":[33],"finite":[35],"gain":[36],"of":[37,50,86],"operation":[38],"amplifiers,":[39],"reduce":[40],"1/f":[41],"noise":[42],"and":[43,52,73,77],"offsets.":[44],"In":[45],"order":[46],"enhance":[48],"stability":[49],"system":[51,88],"frequency":[54],"response":[55],"performance,":[56],"proportional-integral-differential":[57],"(PID)":[58],"adjuster":[59],"are":[60,75],"applied.":[61],"An":[62],"elaborate":[63],"layout":[64],"design":[65],"with":[66],"0.5":[67],"um":[68],"process":[70],"was":[71],"completed":[72],"nonidealities":[74],"analyzed":[76],"optimized.":[78],"post-simulation":[80],"results":[81],"indicate":[82],"that":[83],"sensitivity":[85],"1.22":[90],"V/g,":[91],"full":[93],"measurement":[94],"range":[95],"-3g":[97],"+3g,":[99],"minimum":[101],"acceleration":[102],"detected":[103],"can":[104],"be":[105],"achieved":[106],"30":[107],"ug,":[108],"nonlinearity":[109],"less":[111],"than":[112],"0.16%.":[113]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-01-13T01:12:25.745995","created_date":"2025-10-10T00:00:00"}