{"id":"https://openalex.org/W2130200439","doi":"https://doi.org/10.1109/nems.2009.5068596","title":"Diffraction angle prediction of surface micromachined planar curved grating and crossed grating","display_name":"Diffraction angle prediction of surface micromachined planar curved grating and crossed grating","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2130200439","doi":"https://doi.org/10.1109/nems.2009.5068596","mag":"2130200439"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068596","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068596","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100714455","display_name":"Kuan\u2010Yu Chen","orcid":"https://orcid.org/0000-0002-4020-9103"},"institutions":[{"id":"https://openalex.org/I40689657","display_name":"National Formosa University","ror":"https://ror.org/00q523p52","country_code":"TW","type":"education","lineage":["https://openalex.org/I40689657"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuan-Yu Chen","raw_affiliation_strings":["Mechanical & Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan","Mechanical & Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan 632"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mechanical & Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan","institution_ids":["https://openalex.org/I40689657"]},{"raw_affiliation_string":"Mechanical & Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan 632","institution_ids":["https://openalex.org/I40689657"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101944505","display_name":"Ju-Nan Kuo","orcid":"https://orcid.org/0000-0001-8155-4037"},"institutions":[{"id":"https://openalex.org/I40689657","display_name":"National Formosa University","ror":"https://ror.org/00q523p52","country_code":"TW","type":"education","lineage":["https://openalex.org/I40689657"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ju-Nan Kuo","raw_affiliation_strings":["Department of Automation Engineering, National Formosa University, Yunlin, Taiwan","Department of Automation Engineering, National Formosa University, Yunlin, Taiwan 632"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automation Engineering, National Formosa University, Yunlin, Taiwan","institution_ids":["https://openalex.org/I40689657"]},{"raw_affiliation_string":"Department of Automation Engineering, National Formosa University, Yunlin, Taiwan 632","institution_ids":["https://openalex.org/I40689657"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I40689657"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.20274506,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"11","issue":null,"first_page":"363","last_page":"366"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.8896627426147461},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.7758853435516357},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.7372808456420898},{"id":"https://openalex.org/keywords/blazed-grating","display_name":"Blazed grating","score":0.707566499710083},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.7017797231674194},{"id":"https://openalex.org/keywords/diffraction","display_name":"Diffraction","score":0.6819278597831726},{"id":"https://openalex.org/keywords/holographic-grating","display_name":"Holographic grating","score":0.6687562465667725},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6260029077529907},{"id":"https://openalex.org/keywords/ultrasonic-grating","display_name":"Ultrasonic grating","score":0.6246308088302612},{"id":"https://openalex.org/keywords/curvature","display_name":"Curvature","score":0.6183943152427673},{"id":"https://openalex.org/keywords/electromagnetically-induced-grating","display_name":"Electromagnetically induced grating","score":0.5767459273338318},{"id":"https://openalex.org/keywords/acousto-optics","display_name":"Acousto-optics","score":0.47740331292152405},{"id":"https://openalex.org/keywords/diffraction-efficiency","display_name":"Diffraction efficiency","score":0.4202958941459656},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26545149087905884},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.10719364881515503},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.07281076908111572},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.049514055252075195}],"concepts":[{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.8896627426147461},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7758853435516357},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.7372808456420898},{"id":"https://openalex.org/C1363856","wikidata":"https://www.wikidata.org/wiki/Q883195","display_name":"Blazed grating","level":4,"score":0.707566499710083},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.7017797231674194},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.6819278597831726},{"id":"https://openalex.org/C187384414","wikidata":"https://www.wikidata.org/wiki/Q5884105","display_name":"Holographic grating","level":4,"score":0.6687562465667725},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6260029077529907},{"id":"https://openalex.org/C162151327","wikidata":"https://www.wikidata.org/wiki/Q7880640","display_name":"Ultrasonic grating","level":5,"score":0.6246308088302612},{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.6183943152427673},{"id":"https://openalex.org/C52242126","wikidata":"https://www.wikidata.org/wiki/Q1806553","display_name":"Electromagnetically induced grating","level":5,"score":0.5767459273338318},{"id":"https://openalex.org/C8685307","wikidata":"https://www.wikidata.org/wiki/Q1181689","display_name":"Acousto-optics","level":4,"score":0.47740331292152405},{"id":"https://openalex.org/C18355248","wikidata":"https://www.wikidata.org/wiki/Q850922","display_name":"Diffraction efficiency","level":3,"score":0.4202958941459656},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26545149087905884},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.10719364881515503},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.07281076908111572},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.049514055252075195},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068596","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068596","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2038140348","https://openalex.org/W2061245700","https://openalex.org/W2069775247","https://openalex.org/W2090991144","https://openalex.org/W2109290828","https://openalex.org/W2114689113","https://openalex.org/W2115673582","https://openalex.org/W2122685933","https://openalex.org/W2136305965","https://openalex.org/W2148762832","https://openalex.org/W2259450726","https://openalex.org/W2946723398"],"related_works":["https://openalex.org/W2355920595","https://openalex.org/W2384090035","https://openalex.org/W4389538591","https://openalex.org/W3089221127","https://openalex.org/W1975166654","https://openalex.org/W1965944318","https://openalex.org/W2004607180","https://openalex.org/W2007605330","https://openalex.org/W2036018532","https://openalex.org/W2023092106"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"the":[3,46,56,76,87,92],"different":[4],"curvature":[5,60,70],"of":[6,48,61,71,86,94],"surface":[7],"micromachined":[8],"planar":[9,25,62,72,88],"curved":[10,26,63,73,89],"grating":[11,17,27,30,64,74,96],"is":[12],"systematically":[13],"investigated.":[14],"The":[15,24,42,101],"crossed":[16,29,95],"with":[18],"various":[19],"pitches":[20],"was":[21],"also":[22],"explored.":[23],"and":[28,45,59,110],"were":[31,51],"fabricated":[32],"using":[33],"multi-user":[34],"MEMS":[35],"processes":[36],"(MUMPs)":[37],"provided":[38],"by":[39],"MEMSCAP":[40],"Inc.":[41],"angular":[43],"separation":[44],"number":[47],"diffracted":[49],"orders":[50],"found.":[52],"Experimental":[53],"indicates":[54],"that":[55],"diffraction":[57,78,98],"patterns":[58,85],"reveal":[65],"a":[66,83],"close":[67],"relationship.":[68],"As":[69],"increases,":[75,80],"vertical":[77],"angle":[79,99],"resulting":[81],"in":[82],"strip":[84],"grating.":[90],"When":[91],"pitch":[93],"increased,":[97],"decreases.":[100],"proposed":[102],"gratings":[103],"can":[104],"be":[105],"applied":[106],"to":[107],"optical":[108],"measurement":[109],"micro-optics":[111],"applications.":[112]},"counts_by_year":[{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}