{"id":"https://openalex.org/W2134031246","doi":"https://doi.org/10.1109/nems.2009.5068586","title":"Optimization of corona-triggered PDMS-PDMS bonding method","display_name":"Optimization of corona-triggered PDMS-PDMS bonding method","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2134031246","doi":"https://doi.org/10.1109/nems.2009.5068586","mag":"2134031246"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068586","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068586","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000016867","display_name":"Chenying Yang","orcid":"https://orcid.org/0000-0002-1300-6562"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenying Yang","raw_affiliation_strings":["School of Public Health, Peking University Health Science Centre, Beijing, China","School of Public Health, Peking University Health Science Centre, Beijing, 100191, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Public Health, Peking University Health Science Centre, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"School of Public Health, Peking University Health Science Centre, Beijing, 100191, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100391665","display_name":"Wei Wang","orcid":"https://orcid.org/0000-0001-5508-7359"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Wang","raw_affiliation_strings":["Institute of Microelectronics, National Key Laboratory of MicroNano Fabrication Technology, Beijing, China","Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, National Key Laboratory of MicroNano Fabrication Technology, Beijing, China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China","institution_ids":["https://openalex.org/I4210119392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100389157","display_name":"Zhihong Li","orcid":"https://orcid.org/0000-0002-5978-7894"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhihong Li","raw_affiliation_strings":["Institute of Microelectronics, National Key Laboratory of MicroNano Fabrication Technology, Beijing, China","Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, National Key Laboratory of MicroNano Fabrication Technology, Beijing, China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China","institution_ids":["https://openalex.org/I4210119392"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":23,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"319","last_page":"322"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8268814086914062},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.6456491947174072},{"id":"https://openalex.org/keywords/contact-angle","display_name":"Contact angle","score":0.575253427028656},{"id":"https://openalex.org/keywords/curing","display_name":"Curing (chemistry)","score":0.5527530908584595},{"id":"https://openalex.org/keywords/corona","display_name":"Corona (planetary geology)","score":0.5271377563476562},{"id":"https://openalex.org/keywords/corona-discharge","display_name":"Corona discharge","score":0.485648512840271},{"id":"https://openalex.org/keywords/volumetric-flow-rate","display_name":"Volumetric flow rate","score":0.41315919160842896},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08018544316291809}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8268814086914062},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.6456491947174072},{"id":"https://openalex.org/C6556556","wikidata":"https://www.wikidata.org/wiki/Q899239","display_name":"Contact angle","level":2,"score":0.575253427028656},{"id":"https://openalex.org/C132976073","wikidata":"https://www.wikidata.org/wiki/Q2991861","display_name":"Curing (chemistry)","level":2,"score":0.5527530908584595},{"id":"https://openalex.org/C2776779350","wikidata":"https://www.wikidata.org/wiki/Q1134503","display_name":"Corona (planetary geology)","level":3,"score":0.5271377563476562},{"id":"https://openalex.org/C6025432","wikidata":"https://www.wikidata.org/wiki/Q165294","display_name":"Corona discharge","level":3,"score":0.485648512840271},{"id":"https://openalex.org/C172120300","wikidata":"https://www.wikidata.org/wiki/Q1134348","display_name":"Volumetric flow rate","level":2,"score":0.41315919160842896},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08018544316291809},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2779900269","wikidata":"https://www.wikidata.org/wiki/Q1408724","display_name":"Venus","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C87355193","wikidata":"https://www.wikidata.org/wiki/Q411","display_name":"Astrobiology","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068586","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068586","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation","score":0.5099999904632568}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1973001664","https://openalex.org/W2026908430","https://openalex.org/W2057454789","https://openalex.org/W2078782272","https://openalex.org/W2096976279","https://openalex.org/W2107542980","https://openalex.org/W2163075507","https://openalex.org/W4246674966"],"related_works":["https://openalex.org/W2068047049","https://openalex.org/W2790095056","https://openalex.org/W2107461716","https://openalex.org/W247442659","https://openalex.org/W2369318368","https://openalex.org/W2804120046","https://openalex.org/W2358955789","https://openalex.org/W2367314719","https://openalex.org/W2150432584","https://openalex.org/W2534658725"],"abstract_inverted_index":{"Presently,":[0],"inexpensive":[1],"hand-held":[2],"corona":[3,41,52],"system":[4],"has":[5,121,180,197],"been":[6,45,181,198],"widely":[7],"used":[8],"as":[9],"an":[10],"alternative":[11],"for":[12,87],"PDMS-PDMS":[13,187],"bonding,":[14],"considering":[15],"the":[16,27,51,61,75,91,107,110,122,127,155,184],"fact":[17],"that":[18,102,125],"it":[19,135],"is":[20,105],"both":[21],"effective":[22],"and":[23,40,115,141,192],"highly":[24],"portable.":[25],"In":[26],"present":[28,76],"work,":[29],"to":[30,74,213],"optimize":[31],"this":[32],"corona-triggered":[33,186],"bonding":[34,65,145,158,168,188],"technique,":[35],"different":[36,165],"PDMS":[37,54,81,114,120,157,170],"curing":[38],"conditions":[39],"exposure":[42],"time":[43],"have":[44],"tested.":[46],"The":[47],"hydrophobic":[48,103],"recovery":[49,104],"of":[50,80,94,97,112,151,169,177],"treated":[53],"surface":[55,111],"was":[56,67,206],"quantitatively":[57],"studied":[58],"by":[59],"measuring":[60],"contact":[62,98],"angle.":[63],"Meanwhile,":[64],"strength":[66,146],"preliminarily":[68],"evaluated":[69],"through":[70],"manually":[71],"peeling.":[72],"According":[73],"experimental":[77],"results,":[78],"layers":[79],"should":[82],"be":[83,138,150],"cured":[84],"at":[85],"60degC":[86],"60":[88],"minutes":[89],"with":[90,172,208],"base-to-cure":[92],"ratio":[93],"10:1.":[95],"Results":[96],"angle":[99],"analysis":[100],"indicate":[101],"generally":[106],"same":[108],"between":[109,164],"corona-treated":[113,119],"oxygen-plasma-treated":[116],"PDMS.":[117],"However,":[118],"unique":[123],"advantage":[124],"within":[126],"first":[128],"30":[129],"minutes,":[130],"sometimes":[131],"even":[132],"1":[133,214],"h,":[134],"can":[136],"still":[137],"peeled":[139],"off":[140],"rebonded":[142],"without":[143],"obvious":[144],"degradation.":[147],"This":[148],"may":[149],"significant":[152],"importance":[153],"in":[154,201],"multi-layer":[156],"process,":[159],"which":[160,202],"requires":[161],"accurate":[162],"alignment":[163],"layers.":[166],"Furthermore,":[167],"chips":[171],"a":[173,209],"minimum":[174],"feature":[175],"size":[176],"2":[178],"mum":[179],"demonstrated":[182],"using":[183],"optimized":[185],"technique.":[189],"A":[190],"long":[191],"narrowly":[193],"shaped":[194],"microfluidic":[195],"chip":[196],"sealed":[199],"successfully":[200],"no":[203],"noticeable":[204],"leakage":[205],"observed":[207],"flow":[210],"rate":[211],"up":[212],"muL/s.":[215]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":4}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}