{"id":"https://openalex.org/W2150700951","doi":"https://doi.org/10.1109/nems.2009.5068573","title":"A novel multi-direction high shock reliability test on MEMS devices","display_name":"A novel multi-direction high shock reliability test on MEMS devices","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2150700951","doi":"https://doi.org/10.1109/nems.2009.5068573","mag":"2150700951"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111835448","display_name":"Wenzhong Lou","orcid":null},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenzhong LOU","raw_affiliation_strings":["National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019070134","display_name":"Renlong Song","orcid":null},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Renlong SONG","raw_affiliation_strings":["National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021591988","display_name":"Yunjian Liu","orcid":"https://orcid.org/0000-0002-8729-1351"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yunjian Liu","raw_affiliation_strings":["Systems Engineering Research Institute of Engineering Equipment, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Systems Engineering Research Institute of Engineering Equipment, Beijing, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754428","display_name":"Xiaosong Liu","orcid":"https://orcid.org/0000-0001-9219-8218"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaosong Liu","raw_affiliation_strings":["National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100400683","display_name":"Weihua Li","orcid":"https://orcid.org/0000-0003-3122-1298"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weihua Li","raw_affiliation_strings":["National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035411841","display_name":"Wan\u2010Feng Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wanfeng Lin","raw_affiliation_strings":["National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China","institution_ids":["https://openalex.org/I125839683"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"15","issue":null,"first_page":"261","last_page":"264"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9843000173568726,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13869","display_name":"Ocular and Laser Science Research","score":0.977400004863739,"subfield":{"id":"https://openalex.org/subfields/2731","display_name":"Ophthalmology"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7948165535926819},{"id":"https://openalex.org/keywords/aerospace","display_name":"Aerospace","score":0.6793102025985718},{"id":"https://openalex.org/keywords/shock","display_name":"Shock (circulatory)","score":0.579677402973175},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.5746546983718872},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.5372626185417175},{"id":"https://openalex.org/keywords/matlab","display_name":"MATLAB","score":0.5288209319114685},{"id":"https://openalex.org/keywords/shock-response-spectrum","display_name":"Shock response spectrum","score":0.5218821167945862},{"id":"https://openalex.org/keywords/drop-test","display_name":"Drop test","score":0.4743165671825409},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4664551615715027},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3569718599319458},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.3382354974746704},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.3378697335720062},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32739901542663574},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.32136932015419006},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3206212520599365},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.19618642330169678},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.11471140384674072}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7948165535926819},{"id":"https://openalex.org/C167740415","wikidata":"https://www.wikidata.org/wiki/Q2876213","display_name":"Aerospace","level":2,"score":0.6793102025985718},{"id":"https://openalex.org/C2781300812","wikidata":"https://www.wikidata.org/wiki/Q178061","display_name":"Shock (circulatory)","level":2,"score":0.579677402973175},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5746546983718872},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.5372626185417175},{"id":"https://openalex.org/C2780365114","wikidata":"https://www.wikidata.org/wiki/Q169478","display_name":"MATLAB","level":2,"score":0.5288209319114685},{"id":"https://openalex.org/C99762115","wikidata":"https://www.wikidata.org/wiki/Q7499878","display_name":"Shock response spectrum","level":3,"score":0.5218821167945862},{"id":"https://openalex.org/C2775865969","wikidata":"https://www.wikidata.org/wiki/Q17009518","display_name":"Drop test","level":2,"score":0.4743165671825409},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4664551615715027},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3569718599319458},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.3382354974746704},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3378697335720062},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32739901542663574},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.32136932015419006},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3206212520599365},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.19618642330169678},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.11471140384674072},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C126322002","wikidata":"https://www.wikidata.org/wiki/Q11180","display_name":"Internal medicine","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5899999737739563,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2087036123","https://openalex.org/W2365508298"],"related_works":["https://openalex.org/W2294335124","https://openalex.org/W4285099144","https://openalex.org/W4317346967","https://openalex.org/W1514561573","https://openalex.org/W1527636689","https://openalex.org/W2144827696","https://openalex.org/W2203580760","https://openalex.org/W1852323362","https://openalex.org/W1902246597","https://openalex.org/W2612655727"],"abstract_inverted_index":{"Most":[0],"MEMS/NEMS":[1,32],"devices":[2,33,41,72],"are":[3],"working":[4],"on":[5],"the":[6,35,48,51,68,82,122,130,138,141],"harsh":[7],"environment,":[8,15],"such":[9],"as":[10],"high":[11,84],"shock":[12,85,96,106,131],"and":[13,26,64,75,90,95],"temperature":[14],"ranging":[16],"from":[17],"aerospace":[18],"science,":[19],"automobile":[20],"industry,":[21],"mechanical":[22],"engineering,":[23],"to":[24,60,66],"medical":[25],"safety":[27],"engineering.":[28],"The":[29,102,127],"reliability":[30],"of":[31,50,70,105,129,133,140,143],"is":[34,57,112,117,135,145],"most":[36],"important":[37],"issue":[38],"today.":[39],"MEMS":[40,71,88],"must":[42],"perform":[43],"their":[44],"required":[45],"functions":[46],"for":[47,87],"duration":[49],"equipment's":[52],"requirement":[53],"profile.":[54],"However,":[55],"there":[56],"a":[58,92],"need":[59],"implement":[61],"standardized":[62],"tests":[63],"requirements":[65],"ensure":[67],"performance":[69],"in":[73,119],"fielded":[74],"emerging":[76],"military":[77],"systems.":[78],"This":[79],"paper":[80],"presents":[81],"multi-direction":[83],"environment":[86,107],"devices,":[89],"introduces":[91],"dynamic":[93],"test":[94,104],"response":[97],"spectra":[98],"(SRS)":[99],"testing":[100],"technology.":[101],"simulation":[103,139],"based":[108],"equivalent":[109],"injury":[110],"theory":[111],"studied.":[113],"A":[114],"computation":[115],"program":[116],"written":[118],"software-Matlab":[120],"with":[121],"modified":[123],"digital":[124],"filtering":[125],"algorithm.":[126],"SRS":[128,142],"signal":[132],"dispersing":[134,144],"calculated.":[136],"Also,":[137],"probed":[146],"into":[147],"by":[148],"using":[149],"drop":[150],"test.":[151]},"counts_by_year":[{"year":2014,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}