{"id":"https://openalex.org/W2172181650","doi":"https://doi.org/10.1109/nems.2009.5068561","title":"Fabrication and vibration analysis of micro-cross beams","display_name":"Fabrication and vibration analysis of micro-cross beams","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2172181650","doi":"https://doi.org/10.1109/nems.2009.5068561","mag":"2172181650"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068561","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068561","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108605507","display_name":"Wei-Hsin Gau","orcid":null},"institutions":[{"id":"https://openalex.org/I202968851","display_name":"Huafan University","ror":"https://ror.org/02x5hb316","country_code":"TW","type":"education","lineage":["https://openalex.org/I202968851"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Hsin Gau","raw_affiliation_strings":["Department of Mechatronic Engineering, Huafan University, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechatronic Engineering, Huafan University, Taiwan","institution_ids":["https://openalex.org/I202968851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040114326","display_name":"Shin-Chun Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I202968851","display_name":"Huafan University","ror":"https://ror.org/02x5hb316","country_code":"TW","type":"education","lineage":["https://openalex.org/I202968851"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shin-Chun Huang","raw_affiliation_strings":["Department of Mechatronic Engineering, Huafan University, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechatronic Engineering, Huafan University, Taiwan","institution_ids":["https://openalex.org/I202968851"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110407506","display_name":"Yuh-Chung Hu","orcid":null},"institutions":[{"id":"https://openalex.org/I75430998","display_name":"National Ilan University","ror":"https://ror.org/01npf0s58","country_code":"TW","type":"education","lineage":["https://openalex.org/I75430998"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yuh-Chung Hu","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, Ilan University, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, Ilan University, Taiwan","institution_ids":["https://openalex.org/I75430998"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.18006028,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"53","issue":null,"first_page":"211","last_page":"214"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/laser-doppler-vibrometer","display_name":"Laser Doppler vibrometer","score":0.785463809967041},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.6514215469360352},{"id":"https://openalex.org/keywords/torsion","display_name":"Torsion (gastropod)","score":0.6308164000511169},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6172821521759033},{"id":"https://openalex.org/keywords/natural-frequency","display_name":"Natural frequency","score":0.6146490573883057},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.4785897731781006},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.46917086839675903},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.441048264503479},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.39038461446762085},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.32737427949905396},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2671125531196594},{"id":"https://openalex.org/keywords/laser-beams","display_name":"Laser beams","score":0.22302967309951782},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.21198531985282898}],"concepts":[{"id":"https://openalex.org/C96199931","wikidata":"https://www.wikidata.org/wiki/Q1724132","display_name":"Laser Doppler vibrometer","level":4,"score":0.785463809967041},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.6514215469360352},{"id":"https://openalex.org/C77461463","wikidata":"https://www.wikidata.org/wiki/Q7827201","display_name":"Torsion (gastropod)","level":2,"score":0.6308164000511169},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6172821521759033},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.6146490573883057},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.4785897731781006},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.46917086839675903},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.441048264503479},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39038461446762085},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.32737427949905396},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2671125531196594},{"id":"https://openalex.org/C2984025587","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser beams","level":3,"score":0.22302967309951782},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.21198531985282898},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C141071460","wikidata":"https://www.wikidata.org/wiki/Q40821","display_name":"Surgery","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068561","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068561","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.4300000071525574,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2038554669","https://openalex.org/W2050031106","https://openalex.org/W2083842242","https://openalex.org/W2112872771","https://openalex.org/W2116323432","https://openalex.org/W6677306979"],"related_works":["https://openalex.org/W3199221649","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W1975932505","https://openalex.org/W2367499065","https://openalex.org/W4244336329","https://openalex.org/W1997296189","https://openalex.org/W2006010605","https://openalex.org/W2102015927","https://openalex.org/W2367582941"],"abstract_inverted_index":{"In":[0,96],"this":[1],"investigation,":[2],"the":[3,9,25,35,38,45,68,71,92,97,114,122,125,137,145,154,160,168,175,182],"micro-cross":[4,46],"beam":[5,140],"is":[6,79,110,188],"fabricated":[7,138],"by":[8,33,66,90,112],"method":[10],"of":[11,37,44,70,73,118,128,136,147,153],"silicon":[12],"bulk":[13],"micromachining.":[14],"The":[15,48,84,156],"first":[16,39,157],"torsion":[17,22,53,158],"natural":[18,28],"frequency":[19,29,57,85,151],"included":[20,51],"a":[21,52,56,63,99],"factor":[23,54],"and":[24,55,76,94,107,159,167,185],"second":[26,161],"bending":[27,162],"can":[30,59,87,141,164,171],"be":[31,60,82,88,142,165,172],"derived":[32],"using":[34,91,113],"characteristic":[36],"two":[40],"decoupled":[41],"vibration":[42,123],"modes":[43,163],"beam.":[47,155],"Poisson's":[49,169],"ratio":[50,58,69,86,152,170],"defined":[61],"in":[62],"simple":[64],"form":[65],"setting":[67],"length-width":[72],"long":[74,129],"beams":[75,78,130],"short":[77],"designed":[80],"to":[81,149],"equal.":[83],"obtained":[89,173],"measurement":[93],"simulation.":[95],"measurement,":[98],"micro":[100],"Laser":[101],"Doppler":[102],"Vibrometer":[103],"with":[104],"20MHz":[105],"bandwidth":[106],"0.1nm":[108],"resolution":[109],"used":[111,143],"resonant":[115],"method.":[116],"Effects":[117],"input":[119,148],"voltages":[120],"on":[121],"at":[124],"tip":[126],"point":[127],"are":[131],"also":[132],"discussed.":[133],"Measured":[134],"dimensions":[135],"microcross":[139],"as":[144],"information":[146],"simulate":[150],"constructed":[166],"from":[174],"simulation":[176],"results.":[177],"A":[178],"good":[179],"agreement":[180],"between":[181],"theoretical":[183],"outcomes":[184],"experimental":[186],"results":[187],"found.":[189]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}