{"id":"https://openalex.org/W2107470558","doi":"https://doi.org/10.1109/nems.2009.5068550","title":"Effect of temperature and elastic constant correction on piezoresistivity of silicon nanobeams","display_name":"Effect of temperature and elastic constant correction on piezoresistivity of silicon nanobeams","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2107470558","doi":"https://doi.org/10.1109/nems.2009.5068550","mag":"2107470558"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068550","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068550","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101438595","display_name":"Jiahong Zhang","orcid":"https://orcid.org/0000-0002-1254-0819"},"institutions":[{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"government","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jia-Hong Zhang","raw_affiliation_strings":["Key Laboratory of MEMS of Ministry of Education, South-East University, China","Key Laboratory of MEMS of Ministry of Education, Southeast University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, South-East University, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, Southeast University, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038334345","display_name":"Qing\u2010An Huang","orcid":"https://orcid.org/0000-0002-0646-7635"},"institutions":[{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"government","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qing-An Huang","raw_affiliation_strings":["Key Laboratory of MEMS of Ministry of Education, South-East University, China","Key Laboratory of MEMS of Ministry of Education, Southeast University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, South-East University, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, Southeast University, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5010708299","display_name":"Hong Yu","orcid":"https://orcid.org/0000-0002-8953-5495"},"institutions":[{"id":"https://openalex.org/I1327237609","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934","country_code":"CN","type":"government","lineage":["https://openalex.org/I1327237609","https://openalex.org/I4210127390"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hong Yu","raw_affiliation_strings":["Key Laboratory of MEMS of Ministry of Education, South-East University, China","Key Laboratory of MEMS of Ministry of Education, Southeast University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, South-East University, China","institution_ids":["https://openalex.org/I1327237609"]},{"raw_affiliation_string":"Key Laboratory of MEMS of Ministry of Education, Southeast University, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2273,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59445835,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"25","issue":null,"first_page":"164","last_page":"167"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.9097701907157898},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.771135687828064},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6744810938835144},{"id":"https://openalex.org/keywords/lattice-constant","display_name":"Lattice constant","score":0.5375245809555054},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.45050883293151855},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.4437682628631592},{"id":"https://openalex.org/keywords/constant","display_name":"Constant (computer programming)","score":0.4194856286048889},{"id":"https://openalex.org/keywords/quantization","display_name":"Quantization (signal processing)","score":0.41208118200302124},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.19445785880088806},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.18548542261123657},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1600024700164795},{"id":"https://openalex.org/keywords/diffraction","display_name":"Diffraction","score":0.11421185731887817}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.9097701907157898},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.771135687828064},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6744810938835144},{"id":"https://openalex.org/C132612359","wikidata":"https://www.wikidata.org/wiki/Q625641","display_name":"Lattice constant","level":3,"score":0.5375245809555054},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.45050883293151855},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4437682628631592},{"id":"https://openalex.org/C2777027219","wikidata":"https://www.wikidata.org/wiki/Q1284190","display_name":"Constant (computer programming)","level":2,"score":0.4194856286048889},{"id":"https://openalex.org/C28855332","wikidata":"https://www.wikidata.org/wiki/Q198099","display_name":"Quantization (signal processing)","level":2,"score":0.41208118200302124},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.19445785880088806},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18548542261123657},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1600024700164795},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.11421185731887817},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068550","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068550","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6000000238418579}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1975639600","https://openalex.org/W1984276059","https://openalex.org/W1987416224","https://openalex.org/W1998363344","https://openalex.org/W1999325739","https://openalex.org/W2002609766","https://openalex.org/W2038141038","https://openalex.org/W2040983792","https://openalex.org/W2048602107","https://openalex.org/W2051927521","https://openalex.org/W2053670009","https://openalex.org/W2066901269","https://openalex.org/W2069572181","https://openalex.org/W2069655806","https://openalex.org/W2073720450","https://openalex.org/W2075567099","https://openalex.org/W2081246924","https://openalex.org/W2110914293","https://openalex.org/W2138630866","https://openalex.org/W2155605920","https://openalex.org/W4253020066"],"related_works":["https://openalex.org/W2084250491","https://openalex.org/W2375562665","https://openalex.org/W2184008233","https://openalex.org/W3130958947","https://openalex.org/W1985482365","https://openalex.org/W2025294681","https://openalex.org/W2550172429","https://openalex.org/W2119335613","https://openalex.org/W2162820097","https://openalex.org/W2391516670"],"abstract_inverted_index":{"A":[0,66],"strain":[1],"k.p":[2],"model":[3,43],"is":[4,44,83,108],"used":[5],"to":[6,46,85,92,121,129],"investigate":[7],"lattice":[8,117],"temperature":[9,53,118],"dependence":[10],"of":[11,14,22,30,50,57,69,96,133,149,157],"the":[12,20,27,31,48,58,70,94,97,125,130,134,137,147,150,155],"piezoresistivity":[13,95],"p-doped":[15],"silicon":[16,59,98],"nanobeam":[17,60,151],"sensor":[18,61],"in":[19,90,124,166,176],"range":[21],"100-600":[23],"K":[24],"based":[25],"on":[26,37,54],"self-consistent":[28],"solution":[29],"Schodinger":[32],"and":[33,52,75,140],"Poisson":[34],"equations.":[35],"Based":[36],"quasiharmonic":[38],"approximation,":[39],"an":[40],"analytical":[41],"semi-continuum":[42],"presented":[45],"describe":[47],"effect":[49,160,164],"size":[51],"elastic":[55,78,87,105,113],"constants":[56],"by":[62],"using":[63],"Keating":[64],"model.":[65],"quantitative":[67],"comparison":[68],"piezoresistive":[71,126,159],"coefficient":[72,127],"calculated":[73],"with":[74,161],"without":[76],"considering":[77],"constant":[79,88,106,114],"correction":[80,89,107],"indicates":[81],"it":[82],"crucial":[84],"incorporate":[86],"order":[91],"quantify":[93],"nanobeam.":[99],"Our":[100],"calculations":[101],"demonstrate":[102],"that":[103],"size-dependent":[104],"more":[109],"important":[110],"than":[111],"temperature-dependent":[112],"correction,":[115],"however,":[116],"can":[119],"lead":[120],"considerable":[122],"changes":[123],"due":[128],"large":[131],"redistribution":[132],"carriers":[135],"between":[136],"heavy":[138],"hole":[139,142,162],"light":[141],"subbands,":[143],"which":[144],"may":[145],"impact":[146],"application":[148,175],"as":[152],"sensors.":[153,178],"Fortunately,":[154],"interaction":[156],"a":[158,167,173],"quantization":[163],"results":[165],"remarkable":[168],"enhanced":[169],"electromechanical":[170],"properties,":[171],"exhibiting":[172],"promising":[174],"mechanical":[177]},"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}