{"id":"https://openalex.org/W2137033178","doi":"https://doi.org/10.1109/nems.2009.5068527","title":"Research on the resonant frequency formula of V-shaped cantilevers","display_name":"Research on the resonant frequency formula of V-shaped cantilevers","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2137033178","doi":"https://doi.org/10.1109/nems.2009.5068527","mag":"2137033178"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2009.5068527","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068527","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5115589268","display_name":"Kai Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Yang","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Microelectronics, China","Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Microelectronics, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100363799","display_name":"Zhigang Li","orcid":"https://orcid.org/0000-0002-2356-1594"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhigang Li","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Microelectronics, China","Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Microelectronics, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086680178","display_name":"Yupeng Jing","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yupeng Jing","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Microelectronics, China","Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Microelectronics, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100723409","display_name":"Dapeng Chen","orcid":"https://orcid.org/0000-0003-2000-401X"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dapeng Chen","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Microelectronics, China","Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Microelectronics, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#","institution_ids":["https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5008918891","display_name":"Tianchun Ye","orcid":"https://orcid.org/0000-0002-2384-9037"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tianchun Ye","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Microelectronics, China","Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Microelectronics, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China#TAB#","institution_ids":["https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"59","last_page":"62"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9815999865531921,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9815999865531921,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.945900022983551,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9395999908447266,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.9286288022994995},{"id":"https://openalex.org/keywords/rayleigh\u2013ritz-method","display_name":"Rayleigh\u2013Ritz method","score":0.7722305059432983},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6184337139129639},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5466426610946655},{"id":"https://openalex.org/keywords/rayleigh-scattering","display_name":"Rayleigh scattering","score":0.483153760433197},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4807574450969696},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.4284253716468811},{"id":"https://openalex.org/keywords/frequency-response","display_name":"Frequency response","score":0.4245303273200989},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3553151488304138},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.32225266098976135},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3069048523902893},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.285533607006073},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.26709070801734924},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.25655484199523926},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.19216540455818176},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.12669837474822998},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.12131643295288086},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.1040160059928894}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9286288022994995},{"id":"https://openalex.org/C70940138","wikidata":"https://www.wikidata.org/wiki/Q852247","display_name":"Rayleigh\u2013Ritz method","level":3,"score":0.7722305059432983},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6184337139129639},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5466426610946655},{"id":"https://openalex.org/C46244369","wikidata":"https://www.wikidata.org/wiki/Q193709","display_name":"Rayleigh scattering","level":2,"score":0.483153760433197},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4807574450969696},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4284253716468811},{"id":"https://openalex.org/C8590192","wikidata":"https://www.wikidata.org/wiki/Q1054694","display_name":"Frequency response","level":2,"score":0.4245303273200989},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3553151488304138},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.32225266098976135},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3069048523902893},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.285533607006073},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.26709070801734924},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.25655484199523926},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.19216540455818176},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.12669837474822998},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.12131643295288086},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.1040160059928894}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2009.5068527","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2009.5068527","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.5600000023841858}],"awards":[],"funders":[{"id":"https://openalex.org/F4320324787","display_name":"Peking University","ror":"https://ror.org/02v51f717"},{"id":"https://openalex.org/F4320326972","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1981155434","https://openalex.org/W1988168543","https://openalex.org/W2017803183"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2104720263","https://openalex.org/W1966104931","https://openalex.org/W2286084298","https://openalex.org/W2889334434","https://openalex.org/W2048171849"],"abstract_inverted_index":{"This":[0,20,37],"paper":[1],"deduces":[2],"a":[3,40],"remarkably":[4],"precise":[5],"analytical":[6,21],"formula":[7,38],"for":[8,27],"calculating":[9],"the":[10,46,49],"fundamental":[11],"resonant":[12,57],"frequency":[13,58],"of":[14],"V-shaped":[15,47],"cantilevers":[16],"using":[17],"Rayleigh-Ritz":[18],"method.":[19],"formula,":[22],"which":[23],"is":[24,31],"very":[25],"convenient":[26],"MEMS":[28],"sensor":[29],"design,":[30],"then":[32],"validated":[33],"by":[34],"ANSYS":[35],"simulation.":[36],"raises":[39],"new":[41],"perspective":[42],"that,":[43],"among":[44],"all":[45],"cantilevers,":[48],"simplest":[50],"triangular":[51],"cantilever":[52],"can":[53],"lead":[54],"to":[55],"maximum":[56],"and":[59],"highest":[60],"sensitivity.":[61]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}