{"id":"https://openalex.org/W1661348177","doi":"https://doi.org/10.1109/mwscas.2015.7282085","title":"Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides","display_name":"Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides","publication_year":2015,"publication_date":"2015-08-01","ids":{"openalex":"https://openalex.org/W1661348177","doi":"https://doi.org/10.1109/mwscas.2015.7282085","mag":"1661348177"},"language":"en","primary_location":{"id":"doi:10.1109/mwscas.2015.7282085","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mwscas.2015.7282085","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021198510","display_name":"Matthew A. Stott","orcid":"https://orcid.org/0000-0003-0452-391X"},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Matthew A. Stott","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","institution_ids":["https://openalex.org/I100005738"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016935744","display_name":"Thomas A. Wall","orcid":"https://orcid.org/0000-0002-0098-1975"},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas A. Wall","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","institution_ids":["https://openalex.org/I100005738"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065913707","display_name":"Erik Hamilton","orcid":"https://orcid.org/0000-0001-8532-0836"},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Erik Hamilton","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","institution_ids":["https://openalex.org/I100005738"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017540176","display_name":"Roger Chu","orcid":null},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Roger Chu","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","institution_ids":["https://openalex.org/I100005738"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063546777","display_name":"Aaron R. Hawkins","orcid":"https://orcid.org/0000-0002-3882-0771"},"institutions":[{"id":"https://openalex.org/I100005738","display_name":"Brigham Young University","ror":"https://ror.org/047rhhm47","country_code":"US","type":"education","lineage":["https://openalex.org/I100005738"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Aaron R. Hawkins","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah","institution_ids":["https://openalex.org/I100005738"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602 United States","institution_ids":["https://openalex.org/I100005738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018455045","display_name":"Damla Ozcelik","orcid":null},"institutions":[{"id":"https://openalex.org/I185103710","display_name":"University of California, Santa Cruz","ror":"https://ror.org/03s65by71","country_code":"US","type":"education","lineage":["https://openalex.org/I185103710"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Damla Ozcelik","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Santa Cruz, California","Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, California","institution_ids":["https://openalex.org/I185103710"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States","institution_ids":["https://openalex.org/I185103710"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111751840","display_name":"Joshua W. Parks","orcid":null},"institutions":[{"id":"https://openalex.org/I185103710","display_name":"University of California, Santa Cruz","ror":"https://ror.org/03s65by71","country_code":"US","type":"education","lineage":["https://openalex.org/I185103710"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Joshua W. Parks","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Santa Cruz, California","Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, California","institution_ids":["https://openalex.org/I185103710"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States","institution_ids":["https://openalex.org/I185103710"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018010619","display_name":"Gopikrishnan G. Meena","orcid":"https://orcid.org/0000-0002-5995-6264"},"institutions":[{"id":"https://openalex.org/I185103710","display_name":"University of California, Santa Cruz","ror":"https://ror.org/03s65by71","country_code":"US","type":"education","lineage":["https://openalex.org/I185103710"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gopikrishnan G. Meena","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Santa Cruz, California","Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, California","institution_ids":["https://openalex.org/I185103710"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States","institution_ids":["https://openalex.org/I185103710"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5086596287","display_name":"Holger Schmidt","orcid":"https://orcid.org/0000-0003-2340-8108"},"institutions":[{"id":"https://openalex.org/I185103710","display_name":"University of California, Santa Cruz","ror":"https://ror.org/03s65by71","country_code":"US","type":"education","lineage":["https://openalex.org/I185103710"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Holger Schmidt","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Santa Cruz, California","Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, California","institution_ids":["https://openalex.org/I185103710"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Santa Cruz, 95064, United States","institution_ids":["https://openalex.org/I185103710"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4064,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.49670278,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"24","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.7564167976379395},{"id":"https://openalex.org/keywords/silicate","display_name":"Silicate","score":0.6164535880088806},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5805808305740356},{"id":"https://openalex.org/keywords/absorption","display_name":"Absorption (acoustics)","score":0.5604196786880493},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.5456420183181763},{"id":"https://openalex.org/keywords/moisture","display_name":"Moisture","score":0.4255756139755249},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35043397545814514},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.31690147519111633},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.23937973380088806},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.19114640355110168},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.07788446545600891}],"concepts":[{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.7564167976379395},{"id":"https://openalex.org/C2777335606","wikidata":"https://www.wikidata.org/wiki/Q7130787","display_name":"Silicate","level":2,"score":0.6164535880088806},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5805808305740356},{"id":"https://openalex.org/C125287762","wikidata":"https://www.wikidata.org/wiki/Q1758948","display_name":"Absorption (acoustics)","level":2,"score":0.5604196786880493},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.5456420183181763},{"id":"https://openalex.org/C176864760","wikidata":"https://www.wikidata.org/wiki/Q217651","display_name":"Moisture","level":2,"score":0.4255756139755249},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35043397545814514},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.31690147519111633},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.23937973380088806},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.19114640355110168},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07788446545600891}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mwscas.2015.7282085","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mwscas.2015.7282085","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1975039686","https://openalex.org/W2000753709","https://openalex.org/W2040578005","https://openalex.org/W2049565783","https://openalex.org/W2083514075","https://openalex.org/W2099558096","https://openalex.org/W2128140620","https://openalex.org/W6662733365"],"related_works":["https://openalex.org/W2010837745","https://openalex.org/W2315275742","https://openalex.org/W2083400821","https://openalex.org/W2124081025","https://openalex.org/W142624727","https://openalex.org/W1963703370","https://openalex.org/W2026758251","https://openalex.org/W2061056071","https://openalex.org/W2387021660","https://openalex.org/W1942803881"],"abstract_inverted_index":{"Silicate":[0],"spin-on-glass":[1],"can":[2],"be":[3],"used":[4],"as":[5],"a":[6],"protective":[7],"barrier":[8],"to":[9,16,40],"coat":[10],"PECVD":[11],"SiO2optofluidic":[12],"waveguides":[13],"in":[14],"order":[15],"smooth":[17],"out":[18],"surface":[19],"topology,":[20],"and":[21,34],"lessen":[22],"moisture":[23],"absorption":[24],"on":[25],"top":[26],"of":[27],"the":[28],"waveguide.":[29],"The":[30],"measured":[31],"optical":[32],"throughput":[33],"mode":[35],"confinement":[36],"improved":[37],"when":[38],"compared":[39],"uncoated":[41],"waveguides.":[42]},"counts_by_year":[{"year":2016,"cited_by_count":1}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2025-10-10T00:00:00"}