{"id":"https://openalex.org/W2332056987","doi":"https://doi.org/10.1109/mwscas.2014.6908431","title":"A very low power 7.9 bit MEMS pressure sensor suitable for batteryless RFID applications","display_name":"A very low power 7.9 bit MEMS pressure sensor suitable for batteryless RFID applications","publication_year":2014,"publication_date":"2014-08-01","ids":{"openalex":"https://openalex.org/W2332056987","doi":"https://doi.org/10.1109/mwscas.2014.6908431","mag":"2332056987"},"language":"en","primary_location":{"id":"doi:10.1109/mwscas.2014.6908431","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mwscas.2014.6908431","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054903349","display_name":"Andoni Beriain","orcid":"https://orcid.org/0000-0001-7949-969X"},"institutions":[{"id":"https://openalex.org/I88155538","display_name":"Universidad de Navarra","ror":"https://ror.org/02rxc7m23","country_code":"ES","type":"education","lineage":["https://openalex.org/I88155538"]},{"id":"https://openalex.org/I170828890","display_name":"Centro de Estudios e Investigaciones T\u00e9cnicas de Gipuzkoa","ror":"https://ror.org/022wqqf69","country_code":"ES","type":"nonprofit","lineage":["https://openalex.org/I170828890"]}],"countries":["ES"],"is_corresponding":true,"raw_author_name":"A. Beriain","raw_affiliation_strings":["Paseo Manuel de Lardiz\u00e1bal, CEIT & Tecnun (University of Navarra), San Sebastian, SPAIN"],"affiliations":[{"raw_affiliation_string":"Paseo Manuel de Lardiz\u00e1bal, CEIT & Tecnun (University of Navarra), San Sebastian, SPAIN","institution_ids":["https://openalex.org/I170828890","https://openalex.org/I88155538"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038297767","display_name":"H\u00e9ctor Solar","orcid":"https://orcid.org/0000-0002-8783-6446"},"institutions":[{"id":"https://openalex.org/I88155538","display_name":"Universidad de Navarra","ror":"https://ror.org/02rxc7m23","country_code":"ES","type":"education","lineage":["https://openalex.org/I88155538"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"H. Solar","raw_affiliation_strings":["Universidad de Navarra, Pamplona, Navarra, ES"],"affiliations":[{"raw_affiliation_string":"Universidad de Navarra, Pamplona, Navarra, ES","institution_ids":["https://openalex.org/I88155538"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079283578","display_name":"Roc Berenguer","orcid":"https://orcid.org/0000-0003-0313-7152"},"institutions":[{"id":"https://openalex.org/I88155538","display_name":"Universidad de Navarra","ror":"https://ror.org/02rxc7m23","country_code":"ES","type":"education","lineage":["https://openalex.org/I88155538"]},{"id":"https://openalex.org/I170828890","display_name":"Centro de Estudios e Investigaciones T\u00e9cnicas de Gipuzkoa","ror":"https://ror.org/022wqqf69","country_code":"ES","type":"nonprofit","lineage":["https://openalex.org/I170828890"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"R. Berenguer","raw_affiliation_strings":["Paseo Manuel de Lardiz\u00e1bal, CEIT & Tecnun (University of Navarra), San Sebastian, SPAIN"],"affiliations":[{"raw_affiliation_string":"Paseo Manuel de Lardiz\u00e1bal, CEIT & Tecnun (University of Navarra), San Sebastian, SPAIN","institution_ids":["https://openalex.org/I170828890","https://openalex.org/I88155538"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002557940","display_name":"Juan A. Montiel\u2013Nelson","orcid":"https://orcid.org/0000-0003-4323-8097"},"institutions":[{"id":"https://openalex.org/I119635470","display_name":"Universidad de Las Palmas de Gran Canaria","ror":"https://ror.org/01teme464","country_code":"ES","type":"education","lineage":["https://openalex.org/I119635470"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"J.A. Montiel-Nelson","raw_affiliation_strings":["IUMA (University of Las Palmas de G.C.), 35017 GC, SPAIN"],"affiliations":[{"raw_affiliation_string":"IUMA (University of Las Palmas de G.C.), 35017 GC, SPAIN","institution_ids":["https://openalex.org/I119635470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024317470","display_name":"J. Sosa","orcid":"https://orcid.org/0000-0003-1838-3073"},"institutions":[{"id":"https://openalex.org/I119635470","display_name":"Universidad de Las Palmas de Gran Canaria","ror":"https://ror.org/01teme464","country_code":"ES","type":"education","lineage":["https://openalex.org/I119635470"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"J. Sosa","raw_affiliation_strings":["IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN"],"affiliations":[{"raw_affiliation_string":"IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN","institution_ids":["https://openalex.org/I119635470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010155352","display_name":"R. Pulido","orcid":null},"institutions":[{"id":"https://openalex.org/I119635470","display_name":"Universidad de Las Palmas de Gran Canaria","ror":"https://ror.org/01teme464","country_code":"ES","type":"education","lineage":["https://openalex.org/I119635470"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"R. Pulido","raw_affiliation_strings":["IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN"],"affiliations":[{"raw_affiliation_string":"IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN","institution_ids":["https://openalex.org/I119635470"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037981040","display_name":"Santiago Garc\u00eda\u2013Alonso","orcid":"https://orcid.org/0000-0003-4389-0632"},"institutions":[{"id":"https://openalex.org/I119635470","display_name":"Universidad de Las Palmas de Gran Canaria","ror":"https://ror.org/01teme464","country_code":"ES","type":"education","lineage":["https://openalex.org/I119635470"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"S. Garcia-Alonso","raw_affiliation_strings":["IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN"],"affiliations":[{"raw_affiliation_string":"IUMA (University of Las Palmas de G.C.), Las Palmas GC, SPAIN","institution_ids":["https://openalex.org/I119635470"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5054903349"],"corresponding_institution_ids":["https://openalex.org/I170828890","https://openalex.org/I88155538"],"apc_list":null,"apc_paid":null,"fwci":0.628,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.7527423,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"378","last_page":"381"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9945999979972839,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9927999973297119,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7632163763046265},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.7572357654571533},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.644772469997406},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.6233251094818115},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5755812525749207},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5226166844367981},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5192275643348694},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5105701684951782},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.4429640471935272},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4321027100086212},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.424361914396286},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3848627209663391},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22712111473083496},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2244926393032074},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08327892422676086},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.07687303423881531},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.05926141142845154}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7632163763046265},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.7572357654571533},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.644772469997406},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.6233251094818115},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5755812525749207},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5226166844367981},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5192275643348694},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5105701684951782},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4429640471935272},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4321027100086212},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.424361914396286},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3848627209663391},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22712111473083496},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2244926393032074},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08327892422676086},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.07687303423881531},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.05926141142845154},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/mwscas.2014.6908431","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mwscas.2014.6908431","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)","raw_type":"proceedings-article"},{"id":"pmh:oai:accedacris.ulpgc.es:10553/49641","is_oa":false,"landing_page_url":"http://hdl.handle.net/10553/49641","pdf_url":null,"source":{"id":"https://openalex.org/S4306400136","display_name":"Acceda (Universidad de Las Palmas de Gran Canaria)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Midwest Symposium on Circuits and Systems[ISSN 1548-3746] (6908431), p. 378-381","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8799999952316284,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W2056184138","https://openalex.org/W2057325391","https://openalex.org/W2065860284","https://openalex.org/W2107660510","https://openalex.org/W2126977668","https://openalex.org/W2138935288","https://openalex.org/W4231501498"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W2051563071","https://openalex.org/W1966596465","https://openalex.org/W2337947459","https://openalex.org/W4386858602","https://openalex.org/W2118205267","https://openalex.org/W2126912594","https://openalex.org/W1988444705","https://openalex.org/W4292622326","https://openalex.org/W2053577253"],"abstract_inverted_index":{"There":[0],"is":[1],"a":[2,23,26,32,39,55,72,82,99,111,129,134],"strong":[3],"motivation":[4],"for":[5,13,140],"the":[6,87,90],"development":[7],"of":[8,25,84,113,121],"new":[9],"low":[10,100],"power":[11,119],"sensors":[12],"wireless":[14],"passive":[15,137],"applications":[16],"such":[17],"as":[18],"RFID.":[19],"In":[20],"this":[21],"work,":[22],"combination":[24],"MEMS":[27,47],"capacitive":[28,33],"pressure":[29,73,141],"transducer":[30,48],"and":[31,52,67,78,116],"to":[34,71,92,144],"digital":[35,93],"converter":[36,94],"compatible":[37],"with":[38,81,128],"sensor":[40,130,139],"enabled":[41,131],"RFID":[42,132,138],"tag":[43],"are":[44],"presented.":[45],"The":[46,107],"has":[49,95],"been":[50,96],"designed":[51],"fabricated":[53],"using":[54],"MetalMUMPs":[56],"process.":[57,106],"Its":[58],"characterization":[59],"showed":[60,110],"an":[61,117],"output":[62],"variation":[63,74],"between":[64,75],"9.3":[65],"pF":[66,69],"13.4":[68],"corresponding":[70],"0":[76],"kPa":[77,146],"30":[79,145],"kPa,":[80],"INL":[83],"0,2%.":[85],"On":[86],"other":[88],"hand,":[89],"capacitance":[91],"implemented":[97],"in":[98],"cost":[101],"2P4M":[102],"0.35\u00b5m":[103],"CMOS":[104],"standard":[105],"interface":[108],"measurements":[109,142],"resolution":[112],"7.8":[114],"bit":[115],"average":[118],"consumption":[120],"16.56":[122],"\u00b5W.":[123],"Combining":[124],"both":[125],"devices":[126],"together":[127],"tag,":[133],"long":[135],"range":[136],"up":[143],"could":[147],"be":[148],"implemented.":[149]},"counts_by_year":[{"year":2024,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}