{"id":"https://openalex.org/W2014366716","doi":"https://doi.org/10.1109/mse.2007.75","title":"Simulation and 3D Characterization of Microsystems","display_name":"Simulation and 3D Characterization of Microsystems","publication_year":2007,"publication_date":"2007-06-01","ids":{"openalex":"https://openalex.org/W2014366716","doi":"https://doi.org/10.1109/mse.2007.75","mag":"2014366716"},"language":"en","primary_location":{"id":"doi:10.1109/mse.2007.75","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mse.2007.75","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Microelectronic Systems Education (MSE'07)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058234157","display_name":"B. Bercu","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210113225","display_name":"\u00c9cole Nationale Sup\u00e9rieure d'Architecture de Grenoble","ror":"https://ror.org/01yxtfe92","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210113225"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Bogdan Bercu","raw_affiliation_strings":["IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","ENSERG, Grenoble"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","institution_ids":["https://openalex.org/I106785703"]},{"raw_affiliation_string":"ENSERG, Grenoble","institution_ids":["https://openalex.org/I4210113225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041534832","display_name":"L. Mont\u00e8s","orcid":"https://orcid.org/0000-0002-3678-0163"},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210113225","display_name":"\u00c9cole Nationale Sup\u00e9rieure d'Architecture de Grenoble","ror":"https://ror.org/01yxtfe92","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210113225"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Montes","raw_affiliation_strings":["IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","ENSERG, Grenoble"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","institution_ids":["https://openalex.org/I106785703"]},{"raw_affiliation_string":"ENSERG, Grenoble","institution_ids":["https://openalex.org/I4210113225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049934026","display_name":"P. Morfouli","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210113225","display_name":"\u00c9cole Nationale Sup\u00e9rieure d'Architecture de Grenoble","ror":"https://ror.org/01yxtfe92","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210113225"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Panagiota Morfouli","raw_affiliation_strings":["IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","ENSERG, Grenoble"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","institution_ids":["https://openalex.org/I106785703"]},{"raw_affiliation_string":"ENSERG, Grenoble","institution_ids":["https://openalex.org/I4210113225"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5056067385","display_name":"Nathalie Mathieu","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210113225","display_name":"\u00c9cole Nationale Sup\u00e9rieure d'Architecture de Grenoble","ror":"https://ror.org/01yxtfe92","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210113225"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Nathalie Mathieu","raw_affiliation_strings":["IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","ENSERG, Grenoble"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEP, ENSERG, Minatec-Grenoble INP, Grenoble, France","institution_ids":["https://openalex.org/I106785703"]},{"raw_affiliation_string":"ENSERG, Grenoble","institution_ids":["https://openalex.org/I4210113225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3592,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.64019086,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"107","last_page":"108"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9905999898910522,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9905999898910522,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10022","display_name":"Semiconductor Quantum Structures and Devices","score":0.9681000113487244,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9649999737739563,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microsystem","display_name":"Microsystem","score":0.9145060777664185},{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.7865712642669678},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.7631634473800659},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5899004936218262},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.3230106830596924},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2806473672389984},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20819321274757385},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.15011578798294067},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.14251115918159485}],"concepts":[{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.9145060777664185},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7865712642669678},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.7631634473800659},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5899004936218262},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.3230106830596924},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2806473672389984},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20819321274757385},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.15011578798294067},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.14251115918159485}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mse.2007.75","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mse.2007.75","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Microelectronic Systems Education (MSE'07)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.41999998688697815}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W4241008861"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W1988460209","https://openalex.org/W1495423923","https://openalex.org/W2005078723","https://openalex.org/W2289396372","https://openalex.org/W2884343688","https://openalex.org/W1981400123","https://openalex.org/W2012853879","https://openalex.org/W109903018"],"abstract_inverted_index":{"To":[0],"add":[1],"more":[2],"functionalities":[3],"to":[4],"microelectronic":[5],"circuits,":[6],"microsystems":[7,24],"offer":[8],"growing":[9],"number":[10],"of":[11,23,40,42],"applications.":[12],"An":[13],"advanced":[14],"practical":[15],"work":[16],"that":[17],"combines":[18],"simulation":[19,33],"and":[20,34],"optical":[21],"characterization":[22,35],"is":[25],"presented":[26],"in":[27],"this":[28],"paper.":[29],"It":[30],"emphases":[31],"through":[32],"results":[36],"the":[37,43],"different":[38],"characteristics":[39],"some":[41],"most":[44],"utilized":[45],"microsystems.":[46]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}