{"id":"https://openalex.org/W2077538444","doi":"https://doi.org/10.1109/mm.2010.39","title":"Silicon MEMS Oscillators for High-Speed Digital Systems","display_name":"Silicon MEMS Oscillators for High-Speed Digital Systems","publication_year":2010,"publication_date":"2010-03-01","ids":{"openalex":"https://openalex.org/W2077538444","doi":"https://doi.org/10.1109/mm.2010.39","mag":"2077538444"},"language":"en","primary_location":{"id":"doi:10.1109/mm.2010.39","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mm.2010.39","pdf_url":null,"source":{"id":"https://openalex.org/S59697426","display_name":"IEEE Micro","issn_l":"0272-1732","issn":["0272-1732","1937-4143"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Micro","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109341425","display_name":"S. Tabatabaei","orcid":"https://orcid.org/0009-0007-2632-9364"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Sassan Tabatabaei","raw_affiliation_strings":["SiTime Corporation, USA","SiTime Corp., Sunnyvale, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime Corporation, USA","institution_ids":[]},{"raw_affiliation_string":"SiTime Corp., Sunnyvale, CA, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052759258","display_name":"Aaron Partridge","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Aaron Partridge","raw_affiliation_strings":["SiTime Corporation, USA","SiTime Corp., Sunnyvale, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime Corporation, USA","institution_ids":[]},{"raw_affiliation_string":"SiTime Corp., Sunnyvale, CA, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5109341425"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.54775665,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.85726562,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"30","issue":"2","first_page":"80","last_page":"89"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8875073790550232},{"id":"https://openalex.org/keywords/design-for-manufacturability","display_name":"Design for manufacturability","score":0.8225524425506592},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7160619497299194},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.5080275535583496},{"id":"https://openalex.org/keywords/application-specific-integrated-circuit","display_name":"Application-specific integrated circuit","score":0.4454626441001892},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4420502781867981},{"id":"https://openalex.org/keywords/digital-electronics","display_name":"Digital electronics","score":0.41316312551498413},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.3622629642486572},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3167598843574524},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.3131346106529236},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.15618303418159485},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12824851274490356},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.12562835216522217}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8875073790550232},{"id":"https://openalex.org/C62064638","wikidata":"https://www.wikidata.org/wiki/Q553878","display_name":"Design for manufacturability","level":2,"score":0.8225524425506592},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7160619497299194},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5080275535583496},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.4454626441001892},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4420502781867981},{"id":"https://openalex.org/C81843906","wikidata":"https://www.wikidata.org/wiki/Q173156","display_name":"Digital electronics","level":3,"score":0.41316312551498413},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.3622629642486572},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3167598843574524},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.3131346106529236},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.15618303418159485},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12824851274490356},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12562835216522217},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mm.2010.39","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mm.2010.39","pdf_url":null,"source":{"id":"https://openalex.org/S59697426","display_name":"IEEE Micro","issn_l":"0272-1732","issn":["0272-1732","1937-4143"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Micro","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4099999964237213}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1588525015","https://openalex.org/W1658809881","https://openalex.org/W2040063094","https://openalex.org/W2105093937","https://openalex.org/W2130512184","https://openalex.org/W2148935287","https://openalex.org/W6635587098"],"related_works":["https://openalex.org/W2094969048","https://openalex.org/W994558755","https://openalex.org/W3035935536","https://openalex.org/W2010746423","https://openalex.org/W2372119205","https://openalex.org/W2079437682","https://openalex.org/W2169357373","https://openalex.org/W2796521923","https://openalex.org/W95651076","https://openalex.org/W2770163697"],"abstract_inverted_index":{"Recent":[0],"advances":[1],"in":[2,39],"microelectromechanical":[3],"system":[4],"(MEMS)":[5],"manufacturing":[6],"and":[7,36,46,48],"circuit":[8],"design":[9],"techniques":[10],"have":[11],"propelled":[12],"MEMS-based":[13],"silicon":[14],"oscillators":[15],"into":[16],"the":[17,25],"mainstream":[18],"of":[19],"electronic":[20],"components.":[21],"This":[22],"article":[23],"discusses":[24],"reasons":[26],"for":[27],"this":[28],"trend,":[29],"which":[30],"include":[31],"size,":[32],"reliability,":[33],"mass":[34],"manufacturability,":[35],"performance":[37],"advantages":[38],"various":[40],"digital":[41],"applications,":[42],"such":[43],"as":[44],"processors":[45],"parallel":[47],"serial":[49],"interfaces.":[50]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
