{"id":"https://openalex.org/W4400114053","doi":"https://doi.org/10.1109/mipro60963.2024.10569653","title":"Performance Evaluation of a MEMS Compact Electrostatic Microgripper Equipped with Rotary Comb Drives and Curved Flexure Hinges","display_name":"Performance Evaluation of a MEMS Compact Electrostatic Microgripper Equipped with Rotary Comb Drives and Curved Flexure Hinges","publication_year":2024,"publication_date":"2024-05-20","ids":{"openalex":"https://openalex.org/W4400114053","doi":"https://doi.org/10.1109/mipro60963.2024.10569653"},"language":"en","primary_location":{"id":"doi:10.1109/mipro60963.2024.10569653","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mipro60963.2024.10569653","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 47th MIPRO ICT and Electronics Convention (MIPRO)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102836921","display_name":"Lorenzo Giannini","orcid":"https://orcid.org/0009-0001-4567-7192"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Lorenzo Giannini","raw_affiliation_strings":["Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy"],"affiliations":[{"raw_affiliation_string":"Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075556722","display_name":"Alessio Buzzin","orcid":"https://orcid.org/0000-0002-8071-5406"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alessio Buzzin","raw_affiliation_strings":["Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy"],"affiliations":[{"raw_affiliation_string":"Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064195905","display_name":"Gabriele Bocchetta","orcid":"https://orcid.org/0000-0002-4802-6213"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Gabriele Bocchetta","raw_affiliation_strings":["Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial"],"affiliations":[{"raw_affiliation_string":"Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial","institution_ids":["https://openalex.org/I119003972"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022242326","display_name":"Rita Asquini","orcid":"https://orcid.org/0000-0002-2898-9047"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Rita Asquini","raw_affiliation_strings":["Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy"],"affiliations":[{"raw_affiliation_string":"Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058641720","display_name":"Andrea Scorza","orcid":"https://orcid.org/0000-0002-3542-8854"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Andrea Scorza","raw_affiliation_strings":["Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial"],"affiliations":[{"raw_affiliation_string":"Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial","institution_ids":["https://openalex.org/I119003972"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041969796","display_name":"G. de Cesare","orcid":"https://orcid.org/0000-0002-9935-2975"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giampiero de Cesare","raw_affiliation_strings":["Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy"],"affiliations":[{"raw_affiliation_string":"Sapienza University of Rome,Electronics and Telecommunications,Department of Information Engineering,Rome,Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006655569","display_name":"Nicola Pio Belfiore","orcid":"https://orcid.org/0000-0001-5390-2831"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Nicola Pio Belfiore","raw_affiliation_strings":["Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial"],"affiliations":[{"raw_affiliation_string":"Roma Tre University,Electronic and Mechanical Engineering,Department of Industrial","institution_ids":["https://openalex.org/I119003972"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5102836921"],"corresponding_institution_ids":["https://openalex.org/I861853513"],"apc_list":null,"apc_paid":null,"fwci":0.2225,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.5002688,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1820","last_page":"1824"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hinge","display_name":"Hinge","score":0.8220723867416382},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.7578708529472351},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.751766562461853},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4189378619194031},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4101066589355469},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.40217816829681396},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.39453989267349243},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.342002809047699},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.17742469906806946},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.13169848918914795}],"concepts":[{"id":"https://openalex.org/C44000306","wikidata":"https://www.wikidata.org/wiki/Q244330","display_name":"Hinge","level":2,"score":0.8220723867416382},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.7578708529472351},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.751766562461853},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4189378619194031},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4101066589355469},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.40217816829681396},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39453989267349243},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.342002809047699},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.17742469906806946},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.13169848918914795},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/mipro60963.2024.10569653","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mipro60963.2024.10569653","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 47th MIPRO ICT and Electronics Convention (MIPRO)","raw_type":"proceedings-article"},{"id":"pmh:oai:iris.uniroma1.it:11573/1715997","is_oa":false,"landing_page_url":"https://hdl.handle.net/11573/1715997","pdf_url":null,"source":{"id":"https://openalex.org/S4377196107","display_name":"IRIS Research product catalog (Sapienza University of Rome)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:iris.uniroma3.it:11590/498896","is_oa":false,"landing_page_url":"https://hdl.handle.net/11590/498896","pdf_url":null,"source":{"id":"https://openalex.org/S4377196120","display_name":"Iris (Roma Tre University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I119003972","host_organization_name":"Roma Tre University","host_organization_lineage":["https://openalex.org/I119003972"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8500000238418579,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":39,"referenced_works":["https://openalex.org/W1978201146","https://openalex.org/W1985015740","https://openalex.org/W1986766821","https://openalex.org/W2030851382","https://openalex.org/W2032811538","https://openalex.org/W2140045924","https://openalex.org/W2157763436","https://openalex.org/W2430013500","https://openalex.org/W2544252587","https://openalex.org/W2608280010","https://openalex.org/W2611444924","https://openalex.org/W2620234809","https://openalex.org/W2624280759","https://openalex.org/W2792493303","https://openalex.org/W2898025055","https://openalex.org/W2902272186","https://openalex.org/W2946136233","https://openalex.org/W2955425188","https://openalex.org/W2967588315","https://openalex.org/W3111563690","https://openalex.org/W3120892583","https://openalex.org/W3125484442","https://openalex.org/W3128609100","https://openalex.org/W3186028292","https://openalex.org/W3196265607","https://openalex.org/W3207465525","https://openalex.org/W4206074274","https://openalex.org/W4213250719","https://openalex.org/W4214551492","https://openalex.org/W4231327487","https://openalex.org/W4241151675","https://openalex.org/W4283008470","https://openalex.org/W4289941370","https://openalex.org/W4311955863","https://openalex.org/W4361800798","https://openalex.org/W4386106295","https://openalex.org/W4386141448","https://openalex.org/W4389624761","https://openalex.org/W4390494399"],"related_works":["https://openalex.org/W4205892980","https://openalex.org/W2741863900","https://openalex.org/W2076313080","https://openalex.org/W2148180101","https://openalex.org/W3022929460","https://openalex.org/W2795753116","https://openalex.org/W1981834272","https://openalex.org/W2094617823","https://openalex.org/W1548706452","https://openalex.org/W2358333697"],"abstract_inverted_index":{"Microgrippers":[0],"can":[1],"be":[2],"conveniently":[3],"designed":[4],"and":[5,13,60,104,114,130,185],"built":[6],"as":[7],"MEMS-Technology":[8],"based":[9],"devices":[10],"for":[11],"handling":[12],"manipulating":[14],"objects":[15,159],"at":[16,139],"a":[17,25,51,61,131,164],"microscopic":[18],"scale.":[19],"In":[20],"this":[21],"work":[22],"is":[23,34,70,94],"presented":[24,150],"microgripper":[26,69,154],"equipped":[27],"with":[28,42,160],"curved":[29],"flexure":[30,112],"hinges.":[31],"The":[32,68],"design":[33],"specifically":[35],"studied":[36],"to":[37,44,87,126,167],"improve":[38],"its":[39,177],"grasping":[40],"capabilities":[41],"respect":[43],"those":[45],"found":[46],"in":[47,151,179],"literature,":[48],"while":[49],"maintaining":[50],"small":[52],"overall":[53],"footprint":[54],"of":[55,78,99,134,142,158,169,182],"20":[56],"mm<sup":[57],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[58],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>,":[59],"well":[62],"established":[63],"fabrication":[64],"procedure":[65],"(Silicon-On-Insulator":[66],"technology).":[67],"electrostatically":[71,147],"actuated":[72],"through":[73],"five":[74],"rotary":[75],"comb-drives":[76],"made":[77],"interdigitated":[79],"fingers.":[80],"Finite":[81],"Element":[82],"Analysis":[83],"has":[84],"been":[85],"adopted":[86],"analyze":[88],"the":[89,101,106,111,115,156,180],"system":[90],"performance":[91],"when":[92],"voltage":[93,118],"applied.":[95],"As":[96],"main":[97],"figures":[98],"merit,":[100],"tip":[102,123,132],"displacement":[103,124],"rotation,":[105],"maximum":[107,116],"stress":[108],"sustained":[109],"by":[110],"hinges":[113],"operating":[117],"(MOV)":[119],"are":[120],"investigated.":[121],"A":[122],"up":[125],"$39":[127],"\\mu":[128],"\\mathrm{m}$":[129],"rotation":[133],"about":[135],"1\u00b0":[136],"were":[137],"achieved":[138],"15":[140],"V":[141],"MOV,":[143],"better":[144],"than":[145],"other":[146],"driven":[148],"microgrippers":[149],"literature.":[152],"Such":[153],"enables":[155],"manipulation":[157],"size":[161],"ranging":[162],"from":[163],"few":[165],"microns":[166,170],"tens":[168],"requiring":[171],"relatively":[172],"low":[173],"voltage,":[174],"thus":[175],"suggesting":[176],"use":[178],"field":[181],"integrated":[183],"micromanipulation":[184],"micro-surgery.":[186]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-12-26T23:08:49.675405","created_date":"2025-10-10T00:00:00"}