{"id":"https://openalex.org/W4392902563","doi":"https://doi.org/10.1109/mim.2024.10473014","title":"Development of an Energy-Efficient and Highly Sensitive Thermal Microsensor for Measuring Flow Rates of Fluids","display_name":"Development of an Energy-Efficient and Highly Sensitive Thermal Microsensor for Measuring Flow Rates of Fluids","publication_year":2024,"publication_date":"2024-03-18","ids":{"openalex":"https://openalex.org/W4392902563","doi":"https://doi.org/10.1109/mim.2024.10473014"},"language":"en","primary_location":{"id":"doi:10.1109/mim.2024.10473014","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mim.2024.10473014","pdf_url":null,"source":{"id":"https://openalex.org/S121167460","display_name":"IEEE Instrumentation & Measurement Magazine","issn_l":"1094-6969","issn":["1094-6969","1941-0123"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Instrumentation &amp; Measurement Magazine","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016611147","display_name":"D. F. Valencia-Grisales","orcid":"https://orcid.org/0000-0002-5555-9210"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":true,"raw_author_name":"Diego Fernando Valencia-Grisales","raw_affiliation_strings":["National Institute of Astrophysics, Optics and Electronics (INAOE),Puebla,Mexico","National Institute of Astrophysics, Optics and Electronics (INAOE), Puebla, Mexico"],"affiliations":[{"raw_affiliation_string":"National Institute of Astrophysics, Optics and Electronics (INAOE),Puebla,Mexico","institution_ids":["https://openalex.org/I39824353"]},{"raw_affiliation_string":"National Institute of Astrophysics, Optics and Electronics (INAOE), Puebla, Mexico","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031090013","display_name":"C. Reyes\u2010Betanzo","orcid":"https://orcid.org/0000-0002-7801-9903"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Claudia Reyes-Betanzo","raw_affiliation_strings":["National Institute for Astrophysics, Optics and Electronics (INAOE),Electronics Department,Puebla,Mexico","Electronics Department, National Institute for Astrophysics, Optics and Electronics (INAOE), Puebla, Mexico"],"affiliations":[{"raw_affiliation_string":"National Institute for Astrophysics, Optics and Electronics (INAOE),Electronics Department,Puebla,Mexico","institution_ids":["https://openalex.org/I39824353"]},{"raw_affiliation_string":"Electronics Department, National Institute for Astrophysics, Optics and Electronics (INAOE), Puebla, Mexico","institution_ids":["https://openalex.org/I39824353"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5016611147"],"corresponding_institution_ids":["https://openalex.org/I39824353"],"apc_list":null,"apc_paid":null,"fwci":0.4449,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59477867,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"27","issue":"2","first_page":"15","last_page":"22"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9937999844551086,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9937999844551086,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9921000003814697,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.5478522181510925},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.5062271952629089},{"id":"https://openalex.org/keywords/volumetric-flow-rate","display_name":"Volumetric flow rate","score":0.4470081031322479},{"id":"https://openalex.org/keywords/thermal-energy","display_name":"Thermal energy","score":0.4305576682090759},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3979085087776184},{"id":"https://openalex.org/keywords/process-engineering","display_name":"Process engineering","score":0.39038756489753723},{"id":"https://openalex.org/keywords/environmental-science","display_name":"Environmental science","score":0.352447509765625},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.32504796981811523},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3209044337272644},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31448501348495483},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.2908474802970886},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.24015122652053833},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16962498426437378}],"concepts":[{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.5478522181510925},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.5062271952629089},{"id":"https://openalex.org/C172120300","wikidata":"https://www.wikidata.org/wiki/Q1134348","display_name":"Volumetric flow rate","level":2,"score":0.4470081031322479},{"id":"https://openalex.org/C107861326","wikidata":"https://www.wikidata.org/wiki/Q209233","display_name":"Thermal energy","level":2,"score":0.4305576682090759},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3979085087776184},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.39038756489753723},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.352447509765625},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.32504796981811523},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3209044337272644},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31448501348495483},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.2908474802970886},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.24015122652053833},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16962498426437378}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mim.2024.10473014","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mim.2024.10473014","pdf_url":null,"source":{"id":"https://openalex.org/S121167460","display_name":"IEEE Instrumentation & Measurement Magazine","issn_l":"1094-6969","issn":["1094-6969","1941-0123"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Instrumentation &amp; Measurement Magazine","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8899999856948853,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1970337270","https://openalex.org/W1982126649","https://openalex.org/W1994031941","https://openalex.org/W2035101019","https://openalex.org/W2054801131","https://openalex.org/W2055947598","https://openalex.org/W2060341419","https://openalex.org/W2210344488","https://openalex.org/W2291947857","https://openalex.org/W2295428826","https://openalex.org/W2514858717","https://openalex.org/W2600798299","https://openalex.org/W2909263602","https://openalex.org/W3183437837"],"related_works":["https://openalex.org/W1968712477","https://openalex.org/W2383733608","https://openalex.org/W3047863236","https://openalex.org/W2053316356","https://openalex.org/W4200270495","https://openalex.org/W2468096485","https://openalex.org/W3189745605","https://openalex.org/W2278882583","https://openalex.org/W2360771507","https://openalex.org/W3042370163"],"abstract_inverted_index":{"A":[0],"calorimetric-based":[1],"thermal":[2],"sensor":[3,135],"is":[4,40,113],"precisely":[5],"designed":[6],"to":[7,31,92,110],"measure":[8],"volumetric":[9],"flow":[10,85,146],"rates":[11,86],"in":[12],"water,":[13,98],"air,":[14],"and":[15,51,70,76,102,147],"nitrogen.":[16],"Extensive":[17],"simulations":[18],"of":[19,87,107,117,124],"the":[20,33,44,84,129,134],"sensor's":[21,54,130],"performance":[22,155],"are":[23],"conducted":[24],"using":[25],"COMSOL":[26],"Multi-physics\u00ae":[27],"software.":[28],"In":[29],"order":[30],"validate":[32],"simulation":[34],"results,":[35],"a":[36,104,120],"comprehensive":[37],"comparative":[38],"analysis":[39],"carried":[41],"out,":[42],"utilizing":[43],"well-established":[45],"one-dimensional":[46],"model":[47],"proposed":[48],"by":[49],"Nguyen":[50],"D\u00f6tzel,":[52],"The":[53,78,115],"construction":[55],"incorporates":[56],"high-quality":[57],"materials":[58],"such":[59],"as":[60],"titanium,":[61],"phosphorus-doped":[62],"amorphous":[63],"hydrogenated":[64],"silicon":[65],"carbide":[66],"(P-doped":[67],"a-SiC:H),":[68],"aluminum,":[69],"borosilicate":[71],"glass":[72],"substrates,":[73],"ensuring":[74],"robustness":[75],"reliability.":[77],"measurement":[79],"range":[80,106],"investigated":[81],"spans":[82],"from":[83],"<tex":[88,93],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[89,94],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$0\\":[90],"\\mu\\mathrm{l}/\\text{min}$</tex>":[91,96],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$45\\":[95],"for":[97,100,144,150],"while":[99],"air":[101],"nitrogen,":[103],"broader":[105],"0":[108],"ml/min":[109,112],"187":[111],"considered.":[114],"evaluation":[116],"results":[118],"showcases":[119],"low":[121],"power":[122],"consumption":[123],"approximately":[125],"7.6":[126],"mW,":[127],"underlining":[128],"energy":[131],"efficiency.":[132],"Furthermore,":[133],"exhibits":[136],"remarkable":[137],"sensitivities,":[138],"with":[139],"values":[140],"reaching":[141],"54.89":[142],"mV/(mm/s)/mW":[143],"water":[145],"8.9":[148],"mV/(m/s)/mW":[149],"gases,":[151],"underscoring":[152],"its":[153],"exceptional":[154],"across":[156],"various":[157],"applications.":[158]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}