{"id":"https://openalex.org/W2982622187","doi":"https://doi.org/10.1109/mhs.2018.8886975","title":"Evaluation of delamination strength of bonded micro-components: a nano-indenter technique combined with environmental microscopy","display_name":"Evaluation of delamination strength of bonded micro-components: a nano-indenter technique combined with environmental microscopy","publication_year":2018,"publication_date":"2018-12-01","ids":{"openalex":"https://openalex.org/W2982622187","doi":"https://doi.org/10.1109/mhs.2018.8886975","mag":"2982622187"},"language":"en","primary_location":{"id":"doi:10.1109/mhs.2018.8886975","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2018.8886975","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011893599","display_name":"Yoshimasa Takahashi","orcid":"https://orcid.org/0000-0001-6342-4087"},"institutions":[{"id":"https://openalex.org/I56624758","display_name":"Kansai University","ror":"https://ror.org/03xg1f311","country_code":"JP","type":"education","lineage":["https://openalex.org/I56624758"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshimasa Takahashi","raw_affiliation_strings":["Department of Mechanical Engineering, Kansai University, Suita, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Kansai University, Suita, Japan","institution_ids":["https://openalex.org/I56624758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079795437","display_name":"Kaname Kishimoto","orcid":null},"institutions":[{"id":"https://openalex.org/I56624758","display_name":"Kansai University","ror":"https://ror.org/03xg1f311","country_code":"JP","type":"education","lineage":["https://openalex.org/I56624758"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kaname Kishimoto","raw_affiliation_strings":["Department of Mechanical Engineering, Kansai University, Suita, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Kansai University, Suita, Japan","institution_ids":["https://openalex.org/I56624758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110346014","display_name":"Kimitaka Higuchi","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kimitaka Higuchi","raw_affiliation_strings":["Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014278695","display_name":"Yuta Yamamoto","orcid":"https://orcid.org/0000-0001-5339-6473"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuta Yamamoto","raw_affiliation_strings":["Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102272599","display_name":"Shigeo Arai","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shigeo Arai","raw_affiliation_strings":["Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5000781315","display_name":"Shunsuke Muto","orcid":"https://orcid.org/0000-0001-6275-0649"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shunsuke Muto","raw_affiliation_strings":["Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.46427495,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"62","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6905934810638428},{"id":"https://openalex.org/keywords/delamination","display_name":"Delamination (geology)","score":0.6559786796569824},{"id":"https://openalex.org/keywords/enhanced-data-rates-for-gsm-evolution","display_name":"Enhanced Data Rates for GSM Evolution","score":0.6485545635223389},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.595997154712677},{"id":"https://openalex.org/keywords/fracture","display_name":"Fracture (geology)","score":0.5819191932678223},{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"Focused ion beam","score":0.5814110040664673},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.5810720920562744},{"id":"https://openalex.org/keywords/transmission-electron-microscopy","display_name":"Transmission electron microscopy","score":0.5211750864982605},{"id":"https://openalex.org/keywords/singularity","display_name":"Singularity","score":0.49782824516296387},{"id":"https://openalex.org/keywords/ultimate-tensile-strength","display_name":"Ultimate tensile strength","score":0.48657190799713135},{"id":"https://openalex.org/keywords/flexural-strength","display_name":"Flexural strength","score":0.45946359634399414},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.2852169871330261},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.2722100615501404},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.19989028573036194},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.11263731122016907},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.10672089457511902},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.09102177619934082}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6905934810638428},{"id":"https://openalex.org/C30239060","wikidata":"https://www.wikidata.org/wiki/Q5253111","display_name":"Delamination (geology)","level":4,"score":0.6559786796569824},{"id":"https://openalex.org/C162307627","wikidata":"https://www.wikidata.org/wiki/Q204833","display_name":"Enhanced Data Rates for GSM Evolution","level":2,"score":0.6485545635223389},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.595997154712677},{"id":"https://openalex.org/C43369102","wikidata":"https://www.wikidata.org/wiki/Q2307625","display_name":"Fracture (geology)","level":2,"score":0.5819191932678223},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.5814110040664673},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5810720920562744},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.5211750864982605},{"id":"https://openalex.org/C16171025","wikidata":"https://www.wikidata.org/wiki/Q863349","display_name":"Singularity","level":2,"score":0.49782824516296387},{"id":"https://openalex.org/C112950240","wikidata":"https://www.wikidata.org/wiki/Q76005","display_name":"Ultimate tensile strength","level":2,"score":0.48657190799713135},{"id":"https://openalex.org/C178405089","wikidata":"https://www.wikidata.org/wiki/Q857201","display_name":"Flexural strength","level":2,"score":0.45946359634399414},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.2852169871330261},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.2722100615501404},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19989028573036194},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.11263731122016907},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10672089457511902},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09102177619934082},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C77928131","wikidata":"https://www.wikidata.org/wiki/Q193343","display_name":"Tectonics","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C58097730","wikidata":"https://www.wikidata.org/wiki/Q176318","display_name":"Subduction","level":3,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mhs.2018.8886975","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2018.8886975","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/15","score":0.5400000214576721,"display_name":"Life in Land"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1992206315","https://openalex.org/W2014544224","https://openalex.org/W2032981902","https://openalex.org/W2047904869","https://openalex.org/W2049259399","https://openalex.org/W2059605719","https://openalex.org/W2072254763","https://openalex.org/W2072744868","https://openalex.org/W2075439258","https://openalex.org/W2121259171","https://openalex.org/W2140009371","https://openalex.org/W2164402927","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2358880141","https://openalex.org/W1537428095","https://openalex.org/W2158582201","https://openalex.org/W2351083540","https://openalex.org/W2953854768","https://openalex.org/W2318545402","https://openalex.org/W2890353574","https://openalex.org/W4386670364","https://openalex.org/W4379743143","https://openalex.org/W2081591253"],"abstract_inverted_index":{"The":[0,43,62,107],"strength":[1,65,86,115,132,144],"against":[2],"fracture":[3,63,73],"initiation":[4,64],"from":[5],"an":[6,40,47],"interfacial":[7,48,81],"edge":[8,49,93],"in":[9,69],"bonded":[10],"micro-components":[11],"(Si/Cu":[12],"and":[13,30],"Cu/SiN)":[14],"is":[15,66,88,118,128,133,146],"quantitatively":[16],"evaluated":[17,120],"by":[18,55,91,121,136],"using":[19],"a":[20,25,31,56],"novel":[21],"technique":[22],"that":[23,130],"combines":[24],"minute":[26],"mechanical":[27],"tester":[28],"(nano-indenter)":[29],"special":[32],"high-voltage":[33],"transmission":[34],"electron":[35],"microscope":[36],"(TEM)":[37],"equipped":[38],"with":[39],"environmental":[41],"cell.":[42],"micro-component":[44],"specimens":[45],"having":[46],"of":[50,71,79,85,105,109,116,124,139],"controlled":[51],"geometry":[52],"are":[53],"prepared":[54],"focused-ion-beam":[57],"(FIB)":[58],"based":[59],"micro-sampling":[60],"technique.":[61],"particularly":[67],"analyzed":[68],"terms":[70],"the":[72,77,83,92,95,102,114,131,137,143],"mechanics":[74],"concept.":[75],"In":[76],"case":[78],"Si/Cu":[80],"edge,":[82],"scatter":[84,104],"value":[87],"significantly":[89],"affected":[90],"singularity:":[94],"higher":[96],"singularity":[97],"(wedged":[98],"specimen)":[99],"leads":[100],"to":[101],"smaller":[103],"strength.":[106],"effect":[108],"gaseous":[110],"hydrogen":[111],"(H2)":[112],"on":[113,148],"Cu/SiN":[117],"then":[119],"two":[122],"kinds":[123],"wedged":[125],"specimens.":[126],"It":[127],"found":[129],"eminently":[134],"reduced":[135],"existence":[138],"H2gas":[140],"and,":[141],"moreover,":[142],"reduction":[145],"dependent":[147],"specimen":[149],"shape.":[150]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}