{"id":"https://openalex.org/W2982543786","doi":"https://doi.org/10.1109/mhs.2018.8886962","title":"Basic research on micro processing characteristics of reverse lift-off process","display_name":"Basic research on micro processing characteristics of reverse lift-off process","publication_year":2018,"publication_date":"2018-12-01","ids":{"openalex":"https://openalex.org/W2982543786","doi":"https://doi.org/10.1109/mhs.2018.8886962","mag":"2982543786"},"language":"en","primary_location":{"id":"doi:10.1109/mhs.2018.8886962","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2018.8886962","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5089519013","display_name":"Yuki Nakagawa","orcid":"https://orcid.org/0000-0003-4975-9002"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuki Nakagawa","raw_affiliation_strings":["Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113884815","display_name":"Kyohei YAMADA","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kyohei Yamada","raw_affiliation_strings":["Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062751114","display_name":"Mizue Mizoshiri","orcid":"https://orcid.org/0000-0003-3254-5817"},"institutions":[{"id":"https://openalex.org/I119806805","display_name":"Nagaoka University","ror":"https://ror.org/02rcadd38","country_code":"JP","type":"education","lineage":["https://openalex.org/I119806805"]},{"id":"https://openalex.org/I85922643","display_name":"Nagaoka University of Technology","ror":"https://ror.org/00ys1hz88","country_code":"JP","type":"education","lineage":["https://openalex.org/I85922643"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Mizue Mizoshiri","raw_affiliation_strings":["Nagaoka Univ. of Technology, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagaoka Univ. of Technology, Nagoya, Japan","institution_ids":["https://openalex.org/I119806805","https://openalex.org/I85922643"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016241683","display_name":"Chiemi Oka","orcid":"https://orcid.org/0000-0001-6738-8466"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chiemi Oka","raw_affiliation_strings":["Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054635895","display_name":"Junpei Sakurai","orcid":"https://orcid.org/0000-0001-7713-5761"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Junpei Sakurai","raw_affiliation_strings":["Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030628838","display_name":"Seiichi Hata","orcid":"https://orcid.org/0000-0001-6772-1919"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Seiichi Hata","raw_affiliation_strings":["Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.4086642,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10633","display_name":"Metallic Glasses and Amorphous Alloys","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10633","display_name":"Metallic Glasses and Amorphous Alloys","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9570000171661377,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lift","display_name":"Lift (data mining)","score":0.8424248695373535},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6508585214614868},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6098990440368652},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.47316914796829224},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4009575843811035},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.36248841881752014},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3449016213417053},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3248510956764221},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1325882077217102}],"concepts":[{"id":"https://openalex.org/C139002025","wikidata":"https://www.wikidata.org/wiki/Q3001212","display_name":"Lift (data mining)","level":2,"score":0.8424248695373535},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6508585214614868},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6098990440368652},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.47316914796829224},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4009575843811035},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.36248841881752014},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3449016213417053},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3248510956764221},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1325882077217102},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mhs.2018.8886962","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2018.8886962","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.44999998807907104,"display_name":"Sustainable cities and communities","id":"https://metadata.un.org/sdg/11"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1964018940","https://openalex.org/W1968512146","https://openalex.org/W2011643213","https://openalex.org/W2022729702","https://openalex.org/W2033040893","https://openalex.org/W2039971369","https://openalex.org/W2061962899","https://openalex.org/W2093084593","https://openalex.org/W2162044192","https://openalex.org/W2575745108","https://openalex.org/W2994158560","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2974943474","https://openalex.org/W2393343784","https://openalex.org/W2382708890"],"abstract_inverted_index":{"In":[0,49,66,87,115],"micro":[1,155,180],"electromechanical":[2],"systems(MEMS)":[3],"technology,":[4],"lift-off":[5,47,57,69,91,125,161,185],"processes":[6,126],"are":[7,28,34,40,109,151],"general":[8],"patterning":[9,64],"methods":[10],"for":[11],"the":[12,43,46,67,71,77,80,85,90,93,96,101,113,128,131,135,140,144,148,154,159,173,177,183],"formation":[13],"of":[14,22,45,79,95,130,137,147,158,175],"amorphous":[15],"alloy":[16],"thick":[17,118,178],"film":[18,119,141,179],"structures.":[19],"However,":[20],"thicknesses":[21],"structures":[23,120,181],"fabricated":[24,122,149],"in":[25,123,182],"this":[26,53,116],"method":[27],"not":[29,35,110,165],"uniform":[30,99],"and":[31,100,143,153],"cross-sectional":[32,102,145],"shapes":[33],"flat":[36],"because":[37,106],"sputtered":[38,107],"particles":[39,108],"blocked":[41,111],"by":[42,112],"sidewalls":[44],"layer.":[48],"order":[50,136],"to":[51,89],"solve":[52],"problem,":[54],"a":[55,62],"reverse":[56,68,124,160,184],"process":[58],"is":[59,74,98,104],"proposed":[60],"as":[61,84],"new":[63],"method[1].":[65],"process,":[70,92,162],"desired":[72],"structure":[73,97,150],"formed":[75],"on":[76,134],"top":[78],"convex":[81,132],"pattern":[82,133],"such":[83],"substrate.":[86],"contrast":[88],"thickness":[94,142],"shape":[103,146],"rectangular":[105],"sidewalls.":[114],"research,":[117],"were":[121,169],"from":[127],"width":[129],"micrometers.":[138],"And":[139],"measured,":[152],"processing":[156],"characteristics":[157],"which":[163],"had":[164],"yet":[166],"been":[167],"elucidated,":[168],"investigated.":[170],"This":[171],"demonstrates":[172],"usefulness":[174],"fabricating":[176],"process.":[186]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}