{"id":"https://openalex.org/W1994665525","doi":"https://doi.org/10.1109/mhs.2011.6102145","title":"12 years of resonator: From telephone to atomic force microscopy","display_name":"12 years of resonator: From telephone to atomic force microscopy","publication_year":2011,"publication_date":"2011-11-01","ids":{"openalex":"https://openalex.org/W1994665525","doi":"https://doi.org/10.1109/mhs.2011.6102145","mag":"1994665525"},"language":"en","primary_location":{"id":"doi:10.1109/mhs.2011.6102145","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2011.6102145","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","raw_type":"proceedings-article"},"type":"conference-abstract","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019066653","display_name":"L. Buchaillot","orcid":"https://orcid.org/0000-0002-9844-0498"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L. Buchaillot","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047686660","display_name":"Bernard Legrand","orcid":"https://orcid.org/0000-0001-5158-3654"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Legrand","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061175460","display_name":"M. Faucher","orcid":"https://orcid.org/0000-0003-0206-9813"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Faucher","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102903307","display_name":"Benjamin Walter","orcid":"https://orcid.org/0000-0001-7001-4609"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Walter","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081173290","display_name":"Emmanuelle Algr\u00e9","orcid":"https://orcid.org/0000-0002-4891-9126"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"E. Algre","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101570837","display_name":"Z. Xiong","orcid":"https://orcid.org/0009-0005-2737-1762"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Z. Xiong","raw_affiliation_strings":["Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut dElectronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR 8520, CNRS, Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institut d'Electronique, de Micro\u00e9lectronique et de Nanotechnologie, IEMN UMR CNRS 8520, Cit\u00e9 Scientifique, AvenueH. Poincar\u00e9, BP 60062, 59652 VILLENEUVE D'ASCQ Cedex, FRANCE","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"2","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.995199978351593,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8386001586914062},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.733482837677002},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5721768140792847},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4663236737251282},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.4452096223831177},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.44107598066329956},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4302731156349182},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.4274800419807434},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4246256351470947},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4125308394432068},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.40168070793151855},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.36546313762664795},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2973119020462036},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.10465991497039795}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8386001586914062},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.733482837677002},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5721768140792847},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4663236737251282},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.4452096223831177},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.44107598066329956},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4302731156349182},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.4274800419807434},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4246256351470947},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4125308394432068},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.40168070793151855},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.36546313762664795},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2973119020462036},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.10465991497039795},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mhs.2011.6102145","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mhs.2011.6102145","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1889129279","https://openalex.org/W4387451989","https://openalex.org/W2272290532","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W2358715846","https://openalex.org/W2761234876","https://openalex.org/W4229455305","https://openalex.org/W2537716684","https://openalex.org/W2152087047"],"abstract_inverted_index":{"The":[0,121,313],"history":[1],"of":[2,61,68,99,183,316,321,360,412,429,444],"MEMS":[3,44,72],"resonators":[4,35,45,73],"other":[5],"than":[6,438],"comb-drive":[7],"is":[8,151,178,329,452],"fairly":[9],"short,":[10],"15":[11],"years":[12,62],"at":[13,93,192,209],"most.":[14],"At":[15,353],"the":[16,23,66,84,90,102,175,181,289,317,325,330,339,358,361,366,373,380,391,396,400,439,442,456,462,468],"beginning,":[17],"researchers":[18],"together":[19],"with":[20,129,188,206,216,234,285,305,310,434],"engineers":[21],"had":[22],"dream":[24],"to":[25,55,115,153,164,241,297,337,342,371,378,384,403,454,460,467],"replace":[26],"quartz":[27],"by":[28,48,79],"silicon":[29],"and":[30,53,259,293,383,431,441],"they":[31,300],"started":[32],"working":[33,128],"on":[34,71,180,275],"designed":[36,281],"for":[37,101,408,425],"filter":[38],"application":[39],"in":[40,104,119,147,170,186,214,288,350,426,447,458],"cell":[41],"phones.":[42],"Today,":[43],"are":[46,108,160,248],"surpassed":[47],"bulk":[49],"acoustic":[50],"wave":[51],"technology":[52],"confined":[54],"time":[56],"reference":[57],"application.":[58],"A":[59,250],"couple":[60],"ago,":[63],"we":[64,376],"decided":[65],"reorientation":[67],"our":[69],"work":[70,100],"towards":[74],"atomic":[75],"force":[76,303,322],"microscopy":[77],"(AFM)":[78],"fabricating":[80],"integrated":[81],"probes.":[82],"In":[83,239,369,449],"World,":[85],"besides":[86],"US":[87],"groups,":[88],"like":[89],"Veeco":[91],"group":[92,177],"Santa-Barbara,":[94],"which":[95,364],"does":[96],"a":[97,110,130,137,203,220,253,276,409,423,435],"lot":[98],"AFM":[103,118,167,185,272,318,420],"liquid":[105,171,351,362,392],"environment,":[106],"there":[107],"still":[109],"few":[111],"teams":[112,157],"that":[113,140,155,389],"aim":[114],"use":[116,338],"dynamic":[117,314],"liquid.":[120],"NanoScience":[122],"Center":[123],"from":[124,158,256],"Munster":[125],"(Resp.":[126],"Fuchs)":[127],"private":[131],"company":[132],"(Atomic":[133],"Force)":[134],"has":[135,197],"developed":[136],"signal":[138],"processing":[139],"produces":[141],"an":[142,166,184,189,271,386],"artificial":[143],"low":[144],"damping":[145],"coefficient":[146],"fluid.":[148],"Also,":[149],"it":[150,451],"worth":[152],"note":[154],"numerous":[156],"Japan":[159],"doing":[161],"much":[162],"effort":[163],"achieve":[165],"oscillating":[168,340,367],"system":[169],"environment.":[172,352],"For":[173],"example,":[174],"Kawakatsu's":[176],"focused":[179],"development":[182],"water":[187],"oscillator":[190,382],"vibrating":[191,208,277],"20":[193],"MHz.":[194],"Ando's":[195],"Group":[196],"successfully":[198],"imaged":[199],"myosin":[200],"motion":[201],"onto":[202],"mica":[204],"substrate":[205],"levers":[207],"450":[210],"kHz":[211,307],"(1":[212],"MHz":[213],"air)":[215],"12":[217],"images/second":[218],"within":[219],"250":[221],"nm":[222],"scanning":[223],"window.":[224],"High":[225],"aspect":[226],"ratio":[227],"tip":[228,273],"fabrication":[229],"can":[230],"be":[231,422],"hardly":[232],"achieved":[233,301],"such":[235],"small":[236],"lever":[237],"dimensions.":[238],"order":[240,370,459],"clear":[242],"this":[243,311],"technological":[244],"lock,":[245],"deep":[246],"changes":[247],"required.":[249],"paper":[251],"reporting":[252],"joint":[254],"study":[255],"Georgia":[257],"Tech":[258],"Stanford":[260],"[Onaran":[261],"et":[262],"al.,":[263],"Rev.":[264],"Scientific":[265],"Instruments":[266],"77":[267],"023501":[268],"2006]has":[269],"shown":[270],"mounted":[274],"membrane.":[278],"Using":[279],"carefully":[280],"micromachined":[282],"mechanical":[283],"structures":[284],"spring":[286],"constants":[287],"1":[290],"N/m":[291],"range":[292],"noise":[294],"levels":[295],"down":[296],"10":[298,306],"fm/\u221aHz,":[299],"piconewton":[302],"resolution":[304,436],"measurement":[308,320],"bandwidth":[309],"device.":[312],"modes":[315,341],"allow":[319],"variations":[323],"under":[324],"picoNewton":[326],"range.":[327],"That":[328],"reason":[331],"why":[332],"so":[333],"many":[334],"labs":[335],"try":[336],"probe":[343],"soft":[344],"matter":[345],"or":[346],"biological":[347,430],"nanosystems":[348],"dynamics":[349],"present,":[354],"these":[355],"attempts":[356],"face":[357],"difficulty":[359],"viscosity":[363],"dampens":[365],"cantilever.":[368],"minimize":[372],"hydrodynamic":[374],"drag,":[375],"propose":[377],"change":[379],"overall":[381],"choose":[385],"oscillation":[387],"mode":[388],"reduces":[390],"velocity":[393],"gradient":[394],"around":[395],"resonator.":[397],"More":[398],"precisely,":[399],"project":[401],"aims":[402],"develop":[404],"GHz":[405],"MEMS/NEMS":[406],"sensors":[407],"new":[410],"generation":[411],"high":[413],"sensitivity":[414],"Atomic":[415],"Force":[416],"Microscopes":[417],"(AFM).":[418],"This":[419],"will":[421],"tool":[424],"situ":[427],"imaging":[428],"chemical":[432],"systems":[433],"better":[437],"nanometer":[440],"possibility":[443],"kinetic":[445],"spectroscopy":[446],"liquids.":[448],"addition,":[450],"intended":[453],"batch-fabricate":[455],"device":[457],"ease":[461],"possible":[463],"industrial":[464],"transfer":[465],"thanks":[466],"cost-effective":[469],"approach.":[470]},"counts_by_year":[],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}