{"id":"https://openalex.org/W2889271393","doi":"https://doi.org/10.1109/mesa.2018.8449208","title":"Nonlinear Model Based Control of MEMS Micro-Mirror","display_name":"Nonlinear Model Based Control of MEMS Micro-Mirror","publication_year":2018,"publication_date":"2018-07-01","ids":{"openalex":"https://openalex.org/W2889271393","doi":"https://doi.org/10.1109/mesa.2018.8449208","mag":"2889271393"},"language":"en","primary_location":{"id":"doi:10.1109/mesa.2018.8449208","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mesa.2018.8449208","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031452386","display_name":"Yonghong Tan","orcid":"https://orcid.org/0000-0003-0930-6623"},"institutions":[{"id":"https://openalex.org/I21945476","display_name":"Shanghai Normal University","ror":"https://ror.org/01cxqmw89","country_code":"CN","type":"education","lineage":["https://openalex.org/I21945476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yonghong Tan","raw_affiliation_strings":["College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai, China","institution_ids":["https://openalex.org/I21945476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083568109","display_name":"Ruili Dong","orcid":"https://orcid.org/0000-0003-3096-4436"},"institutions":[{"id":"https://openalex.org/I181326427","display_name":"Donghua University","ror":"https://ror.org/035psfh38","country_code":"CN","type":"education","lineage":["https://openalex.org/I181326427"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ruili Dong","raw_affiliation_strings":["School of Electronic Science and Technology, Donghua University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic Science and Technology, Donghua University, Shanghai, China","institution_ids":["https://openalex.org/I181326427"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6547,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.71560775,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.778968334197998},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7193765044212341},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.6557117700576782},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5839484333992004},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4568922519683838},{"id":"https://openalex.org/keywords/angular-velocity","display_name":"Angular velocity","score":0.42163950204849243},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4158191680908203},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3429221510887146},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.17850905656814575},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1619490683078766},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.0788959264755249},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.06678333878517151}],"concepts":[{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.778968334197998},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7193765044212341},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.6557117700576782},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5839484333992004},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4568922519683838},{"id":"https://openalex.org/C5594486","wikidata":"https://www.wikidata.org/wiki/Q161635","display_name":"Angular velocity","level":2,"score":0.42163950204849243},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4158191680908203},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3429221510887146},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.17850905656814575},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1619490683078766},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0788959264755249},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.06678333878517151},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mesa.2018.8449208","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mesa.2018.8449208","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4099999964237213,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W104730041","https://openalex.org/W1538328146","https://openalex.org/W2091139059","https://openalex.org/W2095217345","https://openalex.org/W2167684128","https://openalex.org/W2266731463","https://openalex.org/W2605061119","https://openalex.org/W2610210579","https://openalex.org/W2619146642","https://openalex.org/W2744046470","https://openalex.org/W6736061972"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2974943474","https://openalex.org/W2393343784"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,42,47,68],"nonlinear":[4,48,65,69],"model":[5,50,70],"based":[6,62,71],"control":[7,31,72,79],"scheme":[8],"for":[9,76],"angular":[10,33],"deflection":[11,34],"of":[12,32,57,80],"electromagnetically":[13],"actuated":[14],"MEMS":[15],"micro-mirror.":[16,60,82],"As":[17],"the":[18,30,55,58,64,77,81],"electromagnetic":[19,59],"micro-mirror":[20],"is":[21,41,51,74],"involved":[22],"with":[23],"both":[24],"underdamped":[25],"characteristic":[26,56],"and":[27,38],"hysteresis":[28],"phenomenon,":[29],"to":[35,53],"derive":[36],"fast":[37],"accurate":[39],"positioning":[40],"challenge.":[43],"In":[44],"this":[45],"paper,":[46],"dynamic":[49,66],"proposed":[52],"depict":[54],"Then,":[61],"on":[63],"model,":[67],"strategy":[73],"developed":[75],"angle":[78]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2019,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}