{"id":"https://openalex.org/W2507712844","doi":"https://doi.org/10.1109/med.2016.7535903","title":"Self-tuning of dEWMA controller parameters for mixed product processes with equipment aging","display_name":"Self-tuning of dEWMA controller parameters for mixed product processes with equipment aging","publication_year":2016,"publication_date":"2016-06-01","ids":{"openalex":"https://openalex.org/W2507712844","doi":"https://doi.org/10.1109/med.2016.7535903","mag":"2507712844"},"language":"en","primary_location":{"id":"doi:10.1109/med.2016.7535903","is_oa":false,"landing_page_url":"https://doi.org/10.1109/med.2016.7535903","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 24th Mediterranean Conference on Control and Automation (MED)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5060836017","display_name":"Guillaume Graton","orcid":"https://orcid.org/0000-0002-7864-9040"},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210116669","display_name":"Ch\u00e2teau Gombert","ror":"https://ror.org/02kspbq18","country_code":"FR","type":"other","lineage":["https://openalex.org/I4210116669"]},{"id":"https://openalex.org/I4210142724","display_name":"Centrale Marseille","ror":"https://ror.org/040baw385","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210142724"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Guillaume Graton","raw_affiliation_strings":["Aix-Marseille Universit\u00e9, Avenue Escadrille Normandie-Niemen, Marseille, France","Technop\u00f4le de Ch\u00e2teau-Gombert, Ecole Centrale Marseille, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universit\u00e9, Avenue Escadrille Normandie-Niemen, Marseille, France","institution_ids":["https://openalex.org/I21491767"]},{"raw_affiliation_string":"Technop\u00f4le de Ch\u00e2teau-Gombert, Ecole Centrale Marseille, Marseille, France","institution_ids":["https://openalex.org/I4210116669","https://openalex.org/I4210142724"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103405499","display_name":"El Mostafa El Adel","orcid":null},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"El Mostafa El Adel","raw_affiliation_strings":["Aix-Marseille Universite, Marseille, Provence-Alpes-C\u00c3\u00b4te d'Azu, FR","Aix-Marseille Universite, Marseille, Provence-Alpes-C\u00f4te d'Azu, FR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universite, Marseille, Provence-Alpes-C\u00c3\u00b4te d'Azu, FR","institution_ids":["https://openalex.org/I21491767"]},{"raw_affiliation_string":"Aix-Marseille Universite, Marseille, Provence-Alpes-C\u00f4te d'Azu, FR","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110160381","display_name":"Mustapha Ouladsine","orcid":null},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Mustapha Ouladsine","raw_affiliation_strings":["Aix-Marseille Universit\u00e9, Avenue Escadrille Normandie-Niemen, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universit\u00e9, Avenue Escadrille Normandie-Niemen, Marseille, France","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011705857","display_name":"Jacques Pinaton","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jacques Pinaton","raw_affiliation_strings":["ST Microelectronics Rousset, Rousset, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ST Microelectronics Rousset, Rousset, France","institution_ids":["https://openalex.org/I4210104693"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08590814,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1373","last_page":"1378"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9925000071525574,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9925000071525574,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11126","display_name":"Metallurgical Processes and Thermodynamics","score":0.9842000007629395,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/a-priori-and-a-posteriori","display_name":"A priori and a posteriori","score":0.6470479965209961},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.6233128309249878},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6076990962028503},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5582154989242554},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5479856729507446},{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical-mechanical planarization","score":0.5319783091545105},{"id":"https://openalex.org/keywords/process-control","display_name":"Process control","score":0.49604806303977966},{"id":"https://openalex.org/keywords/product","display_name":"Product (mathematics)","score":0.49176886677742004},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.4448624551296234},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.4377080202102661},{"id":"https://openalex.org/keywords/polishing","display_name":"Polishing","score":0.4235721230506897},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.4223259389400482},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.331053227186203},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.28253263235092163},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.15775775909423828},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1148199737071991},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1130107045173645}],"concepts":[{"id":"https://openalex.org/C75553542","wikidata":"https://www.wikidata.org/wiki/Q178161","display_name":"A priori and a posteriori","level":2,"score":0.6470479965209961},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.6233128309249878},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6076990962028503},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5582154989242554},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5479856729507446},{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.5319783091545105},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.49604806303977966},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.49176886677742004},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4448624551296234},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.4377080202102661},{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.4235721230506897},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4223259389400482},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.331053227186203},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.28253263235092163},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.15775775909423828},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1148199737071991},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1130107045173645},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/med.2016.7535903","is_oa":false,"landing_page_url":"https://doi.org/10.1109/med.2016.7535903","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 24th Mediterranean Conference on Control and Automation (MED)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-01893098v1","is_oa":false,"landing_page_url":"https://hal.science/hal-01893098","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2016 24th Mediterranean Conference on Control and Automation (MED), Jun 2016, Athens, France. ⟨10.1109/MED.2016.7535903⟩","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.6499999761581421,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1549818157","https://openalex.org/W1966475350","https://openalex.org/W1968224762","https://openalex.org/W1980544346","https://openalex.org/W1986758741","https://openalex.org/W2016144159","https://openalex.org/W2087197472","https://openalex.org/W2090192540","https://openalex.org/W2091560713","https://openalex.org/W2134761800","https://openalex.org/W2137897499","https://openalex.org/W2144614424","https://openalex.org/W2158272657","https://openalex.org/W2161492761","https://openalex.org/W2163418898","https://openalex.org/W2170909262","https://openalex.org/W2171057431","https://openalex.org/W2313953460","https://openalex.org/W2791654535","https://openalex.org/W4292483811","https://openalex.org/W6672992447"],"related_works":["https://openalex.org/W2378882722","https://openalex.org/W1983603153","https://openalex.org/W4299738564","https://openalex.org/W2477444322","https://openalex.org/W3216142041","https://openalex.org/W2368784978","https://openalex.org/W2154685606","https://openalex.org/W2108148093","https://openalex.org/W2147884659","https://openalex.org/W2220800134"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"an":[3,33],"iterative":[4],"approach":[5],"which":[6],"provides":[7],"a":[8,56,73,88],"sub-optimal":[9],"solution":[10],"of":[11,19,37,43,59],"the":[12,17,41,83],"best":[13,66],"achievement":[14,67],"performance":[15,68],"in":[16,40,87],"case":[18,42],"closed-loop":[20],"aged-based":[21],"processes":[22],"applied":[23,81],"on":[24,82],"semiconductor":[25],"manufacturing":[26],"industry.":[27],"The":[28,49,65,78],"aim":[29],"is":[30,52,70,80],"to":[31],"provide":[32],"online":[34,50],"parameter":[35],"estimation":[36,51],"dEWMA":[38],"Controller":[39],"mixed":[44],"product":[45],"Run-to-Run":[46],"(RtR)":[47],"control.":[48],"done":[53],"without":[54],"any":[55],"priori":[57],"knowledge":[58],"process":[60],"parameters":[61],"and":[62],"noise":[63],"structure.":[64],"improvements":[69],"illustrated":[71],"using":[72],"simulation":[74],"problem":[75],"from":[76],"literature.":[77],"example":[79],"removal":[84],"rate":[85],"control":[86],"Chemical":[89],"Mechanical":[90],"Polishing":[91],"(CMP)":[92],"process.":[93]},"counts_by_year":[],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}