{"id":"https://openalex.org/W4399618857","doi":"https://doi.org/10.1109/lra.2024.3414258","title":"Developing the Keep-Important-Samples Scheme for Training the Advanced CNN-Based Automatic Virtual Metrology Models","display_name":"Developing the Keep-Important-Samples Scheme for Training the Advanced CNN-Based Automatic Virtual Metrology Models","publication_year":2024,"publication_date":"2024-06-13","ids":{"openalex":"https://openalex.org/W4399618857","doi":"https://doi.org/10.1109/lra.2024.3414258"},"language":"en","primary_location":{"id":"doi:10.1109/lra.2024.3414258","is_oa":false,"landing_page_url":"https://doi.org/10.1109/lra.2024.3414258","pdf_url":null,"source":{"id":"https://openalex.org/S4210169774","display_name":"IEEE Robotics and Automation Letters","issn_l":"2377-3766","issn":["2377-3766","2377-3774"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Robotics and Automation Letters","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081086261","display_name":"Yu\u2010Ming Hsieh","orcid":"https://orcid.org/0000-0002-3037-0104"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu-Ming Hsieh","raw_affiliation_strings":["Academy of Innovative Semiconductor and Sustainable Manufacturing, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-3037-0104","affiliations":[{"raw_affiliation_string":"Academy of Innovative Semiconductor and Sustainable Manufacturing, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102779017","display_name":"Chun\u2010Ting Liu","orcid":"https://orcid.org/0000-0002-0294-1088"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun-Ting Liu","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101809418","display_name":"Sheng\u2010Yu Huang","orcid":"https://orcid.org/0000-0002-7626-688X"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-Yu Huang","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100703995","display_name":"Chi Kong Li","orcid":"https://orcid.org/0000-0002-2810-5758"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chi Li","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085280828","display_name":"Jan Wilch","orcid":"https://orcid.org/0000-0003-0283-2495"},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jan Wilch","raw_affiliation_strings":["Institute of Automation and Information Systems, Technical University of Munich, Garching, Germany"],"raw_orcid":"https://orcid.org/0000-0003-0283-2495","affiliations":[{"raw_affiliation_string":"Institute of Automation and Information Systems, Technical University of Munich, Garching, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071323487","display_name":"Birgit Vogel\u2010Heuser","orcid":"https://orcid.org/0000-0003-2785-8819"},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Birgit Vogel-Heuser","raw_affiliation_strings":["Institute of Automation and Information Systems, Technical University of Munich, Garching, Germany"],"raw_orcid":"https://orcid.org/0000-0003-2785-8819","affiliations":[{"raw_affiliation_string":"Institute of Automation and Information Systems, Technical University of Munich, Garching, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037509897","display_name":"Fan\u2010Tien Cheng","orcid":"https://orcid.org/0000-0001-8201-223X"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fan-Tien Cheng","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":"https://orcid.org/0000-0001-8201-223X","affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085618113","display_name":"Chao\u2010Chun Chen","orcid":"https://orcid.org/0000-0002-7028-5609"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chao-Chun Chen","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-7028-5609","affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0925,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.77310007,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":"9","issue":"9","first_page":"7931","last_page":"7938"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9753999710083008,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9753999710083008,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14339","display_name":"Image Processing and 3D Reconstruction","score":0.9320999979972839,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12859","display_name":"Cell Image Analysis Techniques","score":0.9272000193595886,"subfield":{"id":"https://openalex.org/subfields/1304","display_name":"Biophysics"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.6811183094978333},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6217553019523621},{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.6123669147491455},{"id":"https://openalex.org/keywords/training","display_name":"Training (meteorology)","score":0.575472891330719},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.48709917068481445},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.34250110387802124},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0660845935344696},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.05119514465332031}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.6811183094978333},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6217553019523621},{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.6123669147491455},{"id":"https://openalex.org/C2777211547","wikidata":"https://www.wikidata.org/wiki/Q17141490","display_name":"Training (meteorology)","level":2,"score":0.575472891330719},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.48709917068481445},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.34250110387802124},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0660845935344696},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.05119514465332031},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/lra.2024.3414258","is_oa":false,"landing_page_url":"https://doi.org/10.1109/lra.2024.3414258","pdf_url":null,"source":{"id":"https://openalex.org/S4210169774","display_name":"IEEE Robotics and Automation Letters","issn_l":"2377-3766","issn":["2377-3766","2377-3774"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Robotics and Automation Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5683321214","display_name":null,"funder_award_id":"NSTC 112-2221-E-006-187","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G5837254712","display_name":null,"funder_award_id":"112-2221-E-006-115-MY2","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G6285532723","display_name":null,"funder_award_id":"112-2218-E-006-017","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"},{"id":"https://openalex.org/F4320336031","display_name":"Intelligent Manufacturing Research Center","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W1972844536","https://openalex.org/W2005659508","https://openalex.org/W2068568515","https://openalex.org/W2091311817","https://openalex.org/W2096192820","https://openalex.org/W2808993481","https://openalex.org/W2899653275","https://openalex.org/W2902317995","https://openalex.org/W2919568442","https://openalex.org/W2962627003","https://openalex.org/W2963761396","https://openalex.org/W2969736276","https://openalex.org/W3048213795","https://openalex.org/W3087019468","https://openalex.org/W3143836161","https://openalex.org/W3176729219","https://openalex.org/W4224951917","https://openalex.org/W4285247601","https://openalex.org/W4285817996","https://openalex.org/W4287888680","https://openalex.org/W4307189178","https://openalex.org/W4317672773","https://openalex.org/W4328031089"],"related_works":["https://openalex.org/W2961085424","https://openalex.org/W4306674287","https://openalex.org/W2047028599","https://openalex.org/W3046775127","https://openalex.org/W3107602296","https://openalex.org/W4394896187","https://openalex.org/W3170094116","https://openalex.org/W4386462264","https://openalex.org/W4364306694","https://openalex.org/W4312192474"],"abstract_inverted_index":{"Virtual":[0],"Metrology":[1],"(VM)":[2],"technology":[3],"can":[4,101,144],"convert":[5],"offline":[6],"sampling":[7],"inspection":[8],"into":[9],"online":[10],"and":[11,54,83,97],"real-time":[12],"total":[13],"inspection.":[14],"As":[15],"the":[16,39,59,72,75,94,99,115,120,140,147,151,158],"processes":[17],"of":[18,74,93,133,150],"high-tech":[19],"industries":[20],"(semiconductor":[21],"or":[22],"TFT-LCD)":[23],"are":[24,109],"getting":[25],"more":[26],"sophisticated,":[27],"higher":[28],"VM":[29,44],"prediction":[30,61,91,148],"accuracy":[31,73,92],"is":[32,126],"demanded.":[33],"With":[34],"regard":[35],"to":[36,56,67,70,89],"this":[37,129],"requirement,":[38],"advanced":[40],"Convolutional-Neural-Networks":[41],"(CNN)":[42],"based":[43],"system":[45],"(denoted":[46],"as":[47],"Advanced":[48,76,121,152],"AVM<sub":[49,77,122,153],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[50,78,123,154],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">CNN</sub>)":[51],"was":[52],"proposed":[53,127,141],"verified":[55],"significantly":[57],"enhance":[58,71,146],"overall":[60],"accuracy.":[62],"Nevertheless,":[63],"two":[64],"issues":[65],"need":[66],"be":[68,103],"addressed":[69],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">CNN</sub>":[79,124,155],"System:":[80],"1)":[81],"rare":[82],"imbalanced":[84],"collected":[85],"metrology":[86,107],"values":[87,108],"lead":[88],"poor":[90],"extreme":[95,159],"values,":[96],"2)":[98],"model":[100],"only":[102],"updated":[104],"when":[105],"sufficient":[106],"collected.":[110],"To":[111],"tackle":[112],"these":[113],"problems,":[114],"Keep-Important-Samples":[116],"(KIS)":[117],"Scheme":[118,143],"for":[119],"System":[125,156],"in":[128],"letter":[130],"with":[131],"consideration":[132],"data":[134],"balance.":[135],"The":[136],"experiments":[137],"reveal":[138],"that":[139],"KIS":[142],"effectively":[145],"performance":[149],"on":[157],"values.":[160]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4}],"updated_date":"2026-07-23T08:03:31.855105","created_date":"2025-10-10T00:00:00"}