{"id":"https://openalex.org/W4386470334","doi":"https://doi.org/10.1109/jssc.2023.3307427","title":"A 0.39-mm<sup>2</sup> Stacked Standard-CMOS Humidity Sensor Using a Charge-Redistribution Correlated Level Shifting Floating Inverter Amplifier and a VCO-Based Zoom CDC","display_name":"A 0.39-mm<sup>2</sup> Stacked Standard-CMOS Humidity Sensor Using a Charge-Redistribution Correlated Level Shifting Floating Inverter Amplifier and a VCO-Based Zoom CDC","publication_year":2023,"publication_date":"2023-09-06","ids":{"openalex":"https://openalex.org/W4386470334","doi":"https://doi.org/10.1109/jssc.2023.3307427"},"language":"en","primary_location":{"id":"doi:10.1109/jssc.2023.3307427","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2023.3307427","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101853555","display_name":"Heyi Li","orcid":"https://orcid.org/0000-0001-5930-6731"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Heyi Li","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0001-5930-6731","affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068138396","display_name":"Kaixuan Du","orcid":"https://orcid.org/0009-0005-5084-9007"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kaixuan Du","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":"https://orcid.org/0009-0005-5084-9007","affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022389051","display_name":"Yuanxin Bao","orcid":"https://orcid.org/0000-0003-2748-2284"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuanxin Bao","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","Advanced Institute of Information Technology, Peking University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Advanced Institute of Information Technology, Peking University, Hangzhou, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085097472","display_name":"Yanchi Dong","orcid":"https://orcid.org/0009-0004-5321-8297"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yanchi Dong","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067949103","display_name":"Jiayoon Ru","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiayoon Ru","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100611805","display_name":"Han Xiao","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Han Xiao","raw_affiliation_strings":["Advanced Institute of Information Technology, Peking University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Institute of Information Technology, Peking University, Hangzhou, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100396808","display_name":"Hao Zhang","orcid":"https://orcid.org/0000-0001-7794-0816"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Zhang","raw_affiliation_strings":["Advanced Institute of Information Technology, Peking University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0001-7794-0816","affiliations":[{"raw_affiliation_string":"Advanced Institute of Information Technology, Peking University, Hangzhou, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046729236","display_name":"Zhixuan Wang","orcid":"https://orcid.org/0000-0002-1044-214X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhixuan Wang","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","Advanced Institute of Information Technology, Peking University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-1044-214X","affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Advanced Institute of Information Technology, Peking University, Hangzhou, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100667723","display_name":"Yi Zhong","orcid":"https://orcid.org/0000-0002-9228-5466"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Zhong","raw_affiliation_strings":["Department of Electronic Engineering, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085075194","display_name":"Linxiao Shen","orcid":"https://orcid.org/0000-0001-7933-3673"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Linxiao Shen","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0001-7933-3673","affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003039083","display_name":"Le Ye","orcid":"https://orcid.org/0000-0003-0599-7762"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Le Ye","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","Advanced Institute of Information Technology, Peking University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-0599-7762","affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Advanced Institute of Information Technology, Peking University, Hangzhou, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062886480","display_name":"Ru Huang","orcid":"https://orcid.org/0000-0002-8146-4821"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ru Huang","raw_affiliation_strings":["Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Laboratory of Future IC Technology and Science, School of Integrated Circuit, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":12,"corresponding_author_ids":["https://openalex.org/A5101853555"],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":null,"apc_paid":null,"fwci":0.8584,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.69952002,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":98},"biblio":{"volume":"59","issue":"2","first_page":"435","last_page":"448"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.44260168075561523},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.361266165971756}],"concepts":[{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.44260168075561523},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.361266165971756}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jssc.2023.3307427","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2023.3307427","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8100000023841858}],"awards":[{"id":"https://openalex.org/G6847781164","display_name":null,"funder_award_id":"B18001","funder_id":"https://openalex.org/F4320327912","funder_display_name":"Higher Education Discipline Innovation Project"},{"id":"https://openalex.org/G8624349614","display_name":null,"funder_award_id":"2019YFB2204900","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320327912","display_name":"Higher Education Discipline Innovation Project","ror":null},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W1987012971","https://openalex.org/W2004188813","https://openalex.org/W2055770207","https://openalex.org/W2069584422","https://openalex.org/W2081229391","https://openalex.org/W2084822044","https://openalex.org/W2121873099","https://openalex.org/W2122296355","https://openalex.org/W2132495195","https://openalex.org/W2180407616","https://openalex.org/W2220266102","https://openalex.org/W2344148467","https://openalex.org/W2465372572","https://openalex.org/W2521512926","https://openalex.org/W2527474840","https://openalex.org/W2568576920","https://openalex.org/W2594167987","https://openalex.org/W2608117326","https://openalex.org/W2611346865","https://openalex.org/W2751174515","https://openalex.org/W2967473233","https://openalex.org/W2975995219","https://openalex.org/W2996809643","https://openalex.org/W2997030307","https://openalex.org/W3015354097","https://openalex.org/W3020828971","https://openalex.org/W3041781673","https://openalex.org/W3048430670","https://openalex.org/W3133492719","https://openalex.org/W3163011288","https://openalex.org/W3200694816","https://openalex.org/W3206257793","https://openalex.org/W4285290407","https://openalex.org/W4312038386","https://openalex.org/W4312781122"],"related_works":["https://openalex.org/W1979597421","https://openalex.org/W2007980826","https://openalex.org/W2061531152","https://openalex.org/W3002753104","https://openalex.org/W2077600819","https://openalex.org/W2142036596","https://openalex.org/W2072657027","https://openalex.org/W2600246793","https://openalex.org/W4238204885","https://openalex.org/W2963966623"],"abstract_inverted_index":{"This":[0],"article":[1],"reports":[2],"an":[3],"energy/area-efficient":[4],"zoom":[5],"capacitance-to-digital":[6],"converter":[7],"(CDC)-based":[8],"CMOS":[9,114,131,139],"humidity":[10,30,93,101,132,150,193],"sensor.":[11],"It":[12],"achieves":[13],"the":[14,28,34,37,42,58,77,82,89,104,112,125,146,167,205],"best-in-class":[15],"error":[16,86,94,226],"of":[17,22,36,99,107,163,170,179,189,208,227],"\u00b10.8%RH":[18,215],"and":[19,76,87,92,95,123,149,155,166,182],"better":[20],"figure":[21],"merit":[23],"(FoMw;":[24],"87":[25],"fJ/c.step)":[26],"than":[27],"state-of-the-art":[29],"sensors":[31,102],"due":[32],"to":[33,56,73,118,234],"use":[35],"two":[38],"techniques":[39],"described":[40],"in":[41,111,136],"following:":[43],"1)":[44],"a":[45,97,120,137,159,176,183,214],"charge-redistribution":[46],"correlated":[47],"level-shifting":[48],"(CR-CLS)":[49],"floating":[50],"inverter":[51],"amplifier":[52],"(FIA)":[53],"is":[54,116,134,173],"proposed":[55,117,130,192],"increase":[57],"conventional":[59],"CLS-FIA":[60],"open-loop":[61],"gain":[62,85],"by":[63,127],"at":[64,158,175,204],"least":[65],"13.5":[66],"dB":[67],"across":[68],"temperature":[69],"variations":[70],"(\u221240":[71],"\u00b0C":[72],"85":[74],"\u00b0C)":[75],"extreme":[78],"process":[79],"corners,":[80],"minimizing":[81],"closed-loop":[83],"FIA":[84],"thus":[88],"CDC":[90],"nonlinearity":[91],"2)":[96],"pair":[98],"stacked":[100],"over":[103],"circuits,":[105],"all":[106],"which":[108],"are":[109,152],"included":[110],"standard":[113],"process,":[115],"achieve":[119],"lower":[121],"cost":[122],"decrease":[124],"area":[126],"half.":[128],"The":[129,141,191,211],"sensor":[133,194,212],"implemented":[135],"55-nm":[138],"process.":[140],"measurement":[142],"results":[143],"show":[144],"that":[145],"capacitance":[147,162],"resolution":[148,151],"197":[153],"aF":[154],"0.094%RH,":[156],"respectively,":[157],"total":[160],"input":[161],"3":[164],"pF,":[165],"effective":[168],"number":[169,185],"bits":[171],"(ENOB)":[172],"12.1":[174],"clock":[177],"frequency":[178],"2.5":[180],"MHz":[181],"cycle":[184],"per":[186],"conversion":[187,206],"(N)":[188],"16.":[190],"consumes":[195],"<inline-formula":[196,219],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[197,220],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[198,221],"<tex-math":[199,222],"notation=\"LaTeX\">$9.57":[200],"\\mu":[201],"\\text{W}$":[202],"</tex-math></inline-formula>":[203,225],"time":[207],"0.04":[209],"ms.":[210],"exhibits":[213],"peak-to-peak":[216],"accuracy":[217],"(":[218],"notation=\"LaTeX\">$3\\sigma":[223],"$":[224],"2.5%RH)":[228],"among":[229],"40":[230],"chips":[231],"from":[232],"20%RH":[233],"85%RH.":[235]},"counts_by_year":[{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}