{"id":"https://openalex.org/W4226519457","doi":"https://doi.org/10.1109/jssc.2022.3177360","title":"A MEMS-Based Optical Scanning System for Precise, High-Speed Neural Interfacing","display_name":"A MEMS-Based Optical Scanning System for Precise, High-Speed Neural Interfacing","publication_year":2022,"publication_date":"2022-06-01","ids":{"openalex":"https://openalex.org/W4226519457","doi":"https://doi.org/10.1109/jssc.2022.3177360"},"language":"en","primary_location":{"id":"doi:10.1109/jssc.2022.3177360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2022.3177360","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102910027","display_name":"Cem Yalcin","orcid":"https://orcid.org/0000-0003-1872-4122"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Cem Yalcin","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":"https://orcid.org/0000-0003-1872-4122","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040079272","display_name":"Nathan Tessema Ersaro","orcid":"https://orcid.org/0000-0002-4458-4728"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nathan Tessema Ersaro","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":"https://orcid.org/0000-0002-4458-4728","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076166103","display_name":"Mohammad Meraj Ghanbari","orcid":"https://orcid.org/0000-0002-0982-8934"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohammad Meraj Ghanbari","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":"https://orcid.org/0000-0002-0982-8934","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052018764","display_name":"George Bocchetti","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"George Bocchetti","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006708087","display_name":"Sina Faraji Alamouti","orcid":"https://orcid.org/0000-0002-3894-909X"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sina Faraji Alamouti","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027006335","display_name":"Nick Antipa","orcid":"https://orcid.org/0000-0002-8711-4996"},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nick Antipa","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, CA, USA","institution_ids":["https://openalex.org/I36258959"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Daniel Lopez","orcid":"https://orcid.org/0000-0001-7174-4013"},"institutions":[{"id":"https://openalex.org/I130769515","display_name":"Pennsylvania State University","ror":"https://ror.org/04p491231","country_code":"US","type":"education","lineage":["https://openalex.org/I130769515"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Daniel Lopez","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, Pennsylvania State University, State College, PA, USA"],"raw_orcid":"https://orcid.org/0000-0001-7174-4013","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, Pennsylvania State University, State College, PA, USA","institution_ids":["https://openalex.org/I130769515"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026606899","display_name":"Nicolas C. P\u00e9gard","orcid":"https://orcid.org/0000-0003-2868-7118"},"institutions":[{"id":"https://openalex.org/I114027177","display_name":"University of North Carolina at Chapel Hill","ror":"https://ror.org/0130frc33","country_code":"US","type":"education","lineage":["https://openalex.org/I114027177"]},{"id":"https://openalex.org/I4210132461","display_name":"Applied Physical Sciences (United States)","ror":"https://ror.org/03gf10a58","country_code":"US","type":"company","lineage":["https://openalex.org/I4210132461"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nicolas C. Pegard","raw_affiliation_strings":["Department of Applied Physical Sciences, University of North Carolina at Chapel Hill, Chapel Hill, NC, USA"],"raw_orcid":"https://orcid.org/0000-0003-2868-7118","affiliations":[{"raw_affiliation_string":"Department of Applied Physical Sciences, University of North Carolina at Chapel Hill, Chapel Hill, NC, USA","institution_ids":["https://openalex.org/I4210132461","https://openalex.org/I114027177"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013394127","display_name":"Laura Waller","orcid":"https://orcid.org/0000-0003-1243-2356"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Laura Waller","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":"https://orcid.org/0000-0003-1243-2356","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009955932","display_name":"Rikky Muller","orcid":"https://orcid.org/0000-0003-3791-1847"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rikky Muller","raw_affiliation_strings":["Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5102910027"],"corresponding_institution_ids":["https://openalex.org/I95457486"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0443818,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"57","issue":"11","first_page":"3442","last_page":"3452"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12611","display_name":"Neural Networks and Reservoir Computing","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12611","display_name":"Neural Networks and Reservoir Computing","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9937999844551086,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12236","display_name":"Photoreceptor and optogenetics research","score":0.9929999709129333,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interfacing","display_name":"Interfacing","score":0.625525712966919},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5867226719856262},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5098442435264587},{"id":"https://openalex.org/keywords/bottleneck","display_name":"Bottleneck","score":0.5001776218414307},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.44002532958984375},{"id":"https://openalex.org/keywords/application-specific-integrated-circuit","display_name":"Application-specific integrated circuit","score":0.42255303263664246},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.4167148172855377},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.41276246309280396},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.3372214436531067},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.33343833684921265},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2935972809791565},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.23877859115600586},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.16117292642593384},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.16058829426765442},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1306273639202118}],"concepts":[{"id":"https://openalex.org/C2776303644","wikidata":"https://www.wikidata.org/wiki/Q1020499","display_name":"Interfacing","level":2,"score":0.625525712966919},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5867226719856262},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5098442435264587},{"id":"https://openalex.org/C2780513914","wikidata":"https://www.wikidata.org/wiki/Q18210350","display_name":"Bottleneck","level":2,"score":0.5001776218414307},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.44002532958984375},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.42255303263664246},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.4167148172855377},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.41276246309280396},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.3372214436531067},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.33343833684921265},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2935972809791565},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23877859115600586},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16117292642593384},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.16058829426765442},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1306273639202118},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jssc.2022.3177360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2022.3177360","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8100000023841858,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320308324","display_name":"McKnight Foundation","ror":"https://ror.org/003ghvj67"},{"id":"https://openalex.org/F4320315474","display_name":"Chan Zuckerberg Initiative","ror":"https://ror.org/02qenvm24"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1171695451","https://openalex.org/W1999450948","https://openalex.org/W2074445356","https://openalex.org/W2101457183","https://openalex.org/W2131466672","https://openalex.org/W2145909957","https://openalex.org/W2167095271","https://openalex.org/W2293817841","https://openalex.org/W2386621445","https://openalex.org/W2617612456","https://openalex.org/W2751862769","https://openalex.org/W2765756210","https://openalex.org/W2787108820","https://openalex.org/W2791860618","https://openalex.org/W2900317266","https://openalex.org/W2936914112","https://openalex.org/W2952064155","https://openalex.org/W2968928953","https://openalex.org/W2970023972","https://openalex.org/W3007190260","https://openalex.org/W3035098429","https://openalex.org/W3135439633"],"related_works":["https://openalex.org/W2796608","https://openalex.org/W1354731","https://openalex.org/W7934547","https://openalex.org/W10158626","https://openalex.org/W1078925","https://openalex.org/W12148803","https://openalex.org/W1885738","https://openalex.org/W17516015","https://openalex.org/W4170278","https://openalex.org/W4935134"],"abstract_inverted_index":{"Optical":[0],"scanning":[1],"is":[2,19,36],"a":[3,37,94,108,130,157],"prevalent":[4],"technique":[5],"for":[6,40,139],"optical":[7,34,89],"neural":[8],"interfaces":[9],"where":[10],"light":[11],"delivery":[12],"with":[13,86,119,169],"high":[14,124],"spatial":[15],"and":[16,42,83,88,107,146],"temporal":[17],"precisions":[18],"desired.":[20],"However,":[21],"due":[22],"to":[23,59,70,136],"the":[24,30,64,67,140,147],"sequential":[25],"nature":[26],"of":[27,33,66,72,98,101,143],"point-scanning":[28],"techniques,":[29],"settling":[31,61],"time":[32],"modulators":[35],"major":[38],"bottleneck":[39],"throughput":[41],"limits":[43],"random":[44],"access":[45],"targeting":[46],"capabilities.":[47],"While":[48],"fast":[49,81,117],"lateral":[50],"scanners":[51],"exist,":[52],"commercially":[53],"available":[54],"varifocal":[55,95],"elements":[56],"are":[57],"constrained":[58],"3-ms":[60],"times,":[62],"limiting":[63],"speed":[65],"overall":[68],"system":[69],"hundreds":[71],"hertz.":[73],"Faster":[74],"focusing":[75],"methods":[76],"exist":[77],"but":[78],"cannot":[79],"combine":[80],"operation":[82,118],"dwelling":[84,120],"capability":[85,121],"electrical":[87],"efficiency.":[90,126],"Here,":[91],"we":[92],"present":[93],"mirror":[96],"comprised":[97],"an":[99],"array":[100],"piston-motion":[102],"micro-electromechanical":[103],"systems":[104],"(MEMS)":[105],"micromirrors":[106],"custom":[109],"driver":[110],"application":[111],"specific":[112],"integrated":[113],"circuit":[114],"(ASIC),":[115],"offering":[116],"while":[122],"maintaining":[123],"diffraction":[125],"The":[127],"ASIC":[128],"features":[129],"reconfigurable":[131],"nonlinear":[132],"digital-to-analog":[133],"converter":[134],"(DAC)":[135],"simultaneously":[137],"compensate":[138],"built-in":[141],"nonlinearity":[142],"electrostatic":[144],"actuators":[145],"global":[148],"process":[149],"variations":[150],"in":[151],"MEMS":[152],"mirrors.":[153],"Experimental":[154],"results":[155],"demonstrate":[156],"wide":[158],"continuous":[159],"sweeping":[160],"range":[161],"that":[162],"spans":[163],"22":[164],"distinctly":[165],"resolvable":[166],"depth":[167],"planes":[168],"refresh":[170],"rates":[171],"greater":[172],"than":[173],"12":[174],"kHz.":[175]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2022-05-05T00:00:00"}