{"id":"https://openalex.org/W2555980335","doi":"https://doi.org/10.1109/jssc.2016.2621035","title":"A MEMS-Assisted Temperature Sensor With 20- $\\mu \\text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2","display_name":"A MEMS-Assisted Temperature Sensor With 20- $\\mu \\text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2","publication_year":2016,"publication_date":"2016-11-16","ids":{"openalex":"https://openalex.org/W2555980335","doi":"https://doi.org/10.1109/jssc.2016.2621035","mag":"2555980335"},"language":"en","primary_location":{"id":"doi:10.1109/jssc.2016.2621035","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2016.2621035","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031414164","display_name":"Meisam Heidarpour Roshan","orcid":"https://orcid.org/0000-0001-9153-3301"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Meisam Heidarpour Roshan","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA","University of Texas, Dallas, TX, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]},{"raw_affiliation_string":"University of Texas, Dallas, TX, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051145373","display_name":"Samira Zaliasl","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Samira Zaliasl","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064862212","display_name":"Kimo Joo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kimo Joo","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109959006","display_name":"Kamran Souri","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kamran Souri","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080847617","display_name":"Rajkumar Palwai","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Rajkumar Palwai","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028038650","display_name":"Lijun Will Chen","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lijun Will Chen","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074247078","display_name":"Amanpreet Singh","orcid":"https://orcid.org/0000-0002-1461-4607"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Amanpreet Singh","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025807083","display_name":"Sudhakar Pamarti","orcid":"https://orcid.org/0000-0003-1457-7508"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sudhakar Pamarti","raw_affiliation_strings":["University of California at Los Angeles, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"University of California at Los Angeles, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030945674","display_name":"Nicholas J. Miller","orcid":"https://orcid.org/0000-0001-9827-8286"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nicholas J. Miller","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113610367","display_name":"Joseph C. Doll","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Joseph C. Doll","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082937800","display_name":"Carl Arft","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Carl Arft","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109341425","display_name":"S. Tabatabaei","orcid":"https://orcid.org/0009-0007-2632-9364"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sassan Tabatabaei","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035758161","display_name":"Carl Sechen","orcid":null},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Carl Sechen","raw_affiliation_strings":["University of Texas at Dallas, Richardson, TX, USA"],"affiliations":[{"raw_affiliation_string":"University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052759258","display_name":"Aaron Partridge","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Aaron Partridge","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006992734","display_name":"Vinod M. Menon","orcid":"https://orcid.org/0000-0002-9725-6445"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Vinod Menon","raw_affiliation_strings":["SiTime, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"SiTime, Santa Clara, CA, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":15,"corresponding_author_ids":["https://openalex.org/A5031414164"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.3861,"has_fulltext":false,"cited_by_count":66,"citation_normalized_percentile":{"value":0.89383304,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":"52","issue":"1","first_page":"185","last_page":"197"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/allan-variance","display_name":"Allan variance","score":0.7266069650650024},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6396778225898743},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6352911591529846},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5044282674789429},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4975478947162628},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.47728386521339417},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.46963071823120117},{"id":"https://openalex.org/keywords/atmospheric-temperature-range","display_name":"Atmospheric temperature range","score":0.42568591237068176},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.39598673582077026},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.37921178340911865},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3590667247772217},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.34291917085647583},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22858422994613647},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.2149362564086914},{"id":"https://openalex.org/keywords/standard-deviation","display_name":"Standard deviation","score":0.19887292385101318},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.12604275345802307},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1238161027431488}],"concepts":[{"id":"https://openalex.org/C5722023","wikidata":"https://www.wikidata.org/wiki/Q1440227","display_name":"Allan variance","level":3,"score":0.7266069650650024},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6396778225898743},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6352911591529846},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5044282674789429},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4975478947162628},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.47728386521339417},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.46963071823120117},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.42568591237068176},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.39598673582077026},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37921178340911865},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3590667247772217},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34291917085647583},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22858422994613647},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.2149362564086914},{"id":"https://openalex.org/C22679943","wikidata":"https://www.wikidata.org/wiki/Q159375","display_name":"Standard deviation","level":2,"score":0.19887292385101318},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.12604275345802307},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1238161027431488},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jssc.2016.2621035","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2016.2621035","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8600000143051147,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1500373038","https://openalex.org/W1504527380","https://openalex.org/W1938254715","https://openalex.org/W1977865810","https://openalex.org/W1995905299","https://openalex.org/W2058790756","https://openalex.org/W2073593223","https://openalex.org/W2108458508","https://openalex.org/W2116875943","https://openalex.org/W2123054928","https://openalex.org/W2130512184","https://openalex.org/W2130795074","https://openalex.org/W2131904808","https://openalex.org/W2134762439","https://openalex.org/W2146765621","https://openalex.org/W2147798483","https://openalex.org/W2256823935","https://openalex.org/W2290925013","https://openalex.org/W2564182546","https://openalex.org/W2930902969","https://openalex.org/W3145887276","https://openalex.org/W6761458180"],"related_works":["https://openalex.org/W2755914447","https://openalex.org/W2063903315","https://openalex.org/W2010494064","https://openalex.org/W2961042468","https://openalex.org/W4366978720","https://openalex.org/W2383411365","https://openalex.org/W2167190283","https://openalex.org/W2587892165","https://openalex.org/W2537716684","https://openalex.org/W2152087047"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,41,47,53,66,81,100],"dual-microelectromechanical":[4],"system":[5],"(MEMS)":[6],"resonator-based":[7],"temperature":[8,18,34,110],"sensor.":[9],"In":[10],"this":[11],"sensor,":[12],"the":[13,17,21,25,109],"readout":[14],"circuit":[15,37],"estimates":[16],"by":[19,29],"measuring":[20],"frequency":[22,101],"ratio":[23],"of":[24,49,55,62,69,89,103],"two":[26],"clocks":[27],"generated":[28],"separate":[30],"resonators":[31],"with":[32,85],"different":[33],"coefficients.":[35],"The":[36],"is":[38],"realized":[39],"in":[40,108,124],"0.18-\u03bcm":[42],"CMOS":[43],"process":[44],"and":[45,99,127],"achieves":[46],"resolution":[48,67],"20":[50],"\u03bcK":[51],"over":[52,94],"bandwidth":[54],"100":[56],"Hz":[57],"while":[58],"consuming":[59],"19":[60],"mW":[61],"power,":[63],"leading":[64],"to":[65,79,115],"FOM":[68],"0.04":[70],"pJK":[71],"<sup":[72,91],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[73,92],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[74],".":[75],"It":[76],"enables":[77],"us":[78],"implement":[80],"MEMS-based":[82],"programmable":[83],"oscillator":[84],"an":[86],"Allan":[87],"deviation":[88],"<;1e":[90],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-10</sup>":[93],"1":[95],"s":[96],"averaging":[97],"time,":[98],"stability":[102],"<;\u00b10.1":[104],"parts":[105],"per":[106],"million":[107],"range":[111],"from":[112],"-45":[113],"\u00b0C":[114],"105":[116],"\u00b0C.":[117],"Such":[118],"oscillators":[119],"are":[120],"key":[121],"building":[122],"blocks":[123],"telecom,":[125],"datacom,":[126],"precision":[128],"timekeeping":[129],"applications.":[130]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":12},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":9},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":10},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":4}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}