{"id":"https://openalex.org/W2139134090","doi":"https://doi.org/10.1109/jssc.2011.2144170","title":"A 2.2 mA 4.3 mm$^{2}$ ASIC for a 1000$^{\\circ}$/s 2-Axis Capacitive Micro-Gyroscope","display_name":"A 2.2 mA 4.3 mm$^{2}$ ASIC for a 1000$^{\\circ}$/s 2-Axis Capacitive Micro-Gyroscope","publication_year":2011,"publication_date":"2011-05-27","ids":{"openalex":"https://openalex.org/W2139134090","doi":"https://doi.org/10.1109/jssc.2011.2144170","mag":"2139134090"},"language":"en","primary_location":{"id":"doi:10.1109/jssc.2011.2144170","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2011.2144170","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065746324","display_name":"Lasse Aaltonen","orcid":null},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Lasse Aaltonen","raw_affiliation_strings":["SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089869518","display_name":"Antti Kalanti","orcid":null},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Antti Kalanti","raw_affiliation_strings":["SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047416995","display_name":"Mika Pulkkinen","orcid":"https://orcid.org/0000-0003-2073-950X"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Mika Pulkkinen","raw_affiliation_strings":["SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028053652","display_name":"Matti Paavola","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Matti Paavola","raw_affiliation_strings":["Renesas Mobile Europe Limited, Helsinki, Finland","Renesas Mobile Eur., Helsinki, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Renesas Mobile Europe Limited, Helsinki, Finland","institution_ids":[]},{"raw_affiliation_string":"Renesas Mobile Eur., Helsinki, Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077321882","display_name":"Mika K\u00e4m\u00e4r\u00e4inen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210094276","display_name":"National Board of Patents and Registration of Finland","ror":"https://ror.org/00m0pp561","country_code":"FI","type":"government","lineage":["https://openalex.org/I4210094276"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Mika Kamarainen","raw_affiliation_strings":["National Board of Patents and Registration of Finland, Helsinki, Finland","Nat. Board of Patents & Registration of Finland, Helsinki, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Board of Patents and Registration of Finland, Helsinki, Finland","institution_ids":["https://openalex.org/I4210094276"]},{"raw_affiliation_string":"Nat. Board of Patents & Registration of Finland, Helsinki, Finland","institution_ids":["https://openalex.org/I4210094276"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066316803","display_name":"K. Halonen","orcid":"https://orcid.org/0000-0002-4385-9689"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Kari A. I. Halonen","raw_affiliation_strings":["SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SMARAD-2/Department of Micro and Nanosciences, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.7891,"has_fulltext":false,"cited_by_count":43,"citation_normalized_percentile":{"value":0.90835966,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"46","issue":"7","first_page":"1682","last_page":"1692"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8333470821380615},{"id":"https://openalex.org/keywords/application-specific-integrated-circuit","display_name":"Application-specific integrated circuit","score":0.7721433043479919},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.7112225294113159},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5924474000930786},{"id":"https://openalex.org/keywords/electronics","display_name":"Electronics","score":0.5361132025718689},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5259073972702026},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.49622732400894165},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3492320775985718},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24809589982032776},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.22162878513336182}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8333470821380615},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.7721433043479919},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.7112225294113159},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5924474000930786},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.5361132025718689},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5259073972702026},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.49622732400894165},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3492320775985718},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24809589982032776},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.22162878513336182},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jssc.2011.2144170","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2011.2144170","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.6700000166893005,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1982656162","https://openalex.org/W1985980977","https://openalex.org/W1997346594","https://openalex.org/W2001630762","https://openalex.org/W2007901286","https://openalex.org/W2029862853","https://openalex.org/W2063137106","https://openalex.org/W2073924955","https://openalex.org/W2102319061","https://openalex.org/W2103120683","https://openalex.org/W2131352650","https://openalex.org/W2134456655","https://openalex.org/W2142981186","https://openalex.org/W2143661472","https://openalex.org/W2148724448","https://openalex.org/W2149128480","https://openalex.org/W2157476064","https://openalex.org/W3120346404","https://openalex.org/W6788205927"],"related_works":["https://openalex.org/W1889129279","https://openalex.org/W4387451989","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W23275807","https://openalex.org/W2358715846","https://openalex.org/W2761234876","https://openalex.org/W2168042464","https://openalex.org/W2080828231","https://openalex.org/W2368609622"],"abstract_inverted_index":{"The":[0,21,50,67,89,104],"interface":[1,27,83],"for":[2,29,98,102],"a":[3,10,15,114],"capacitive":[4,63],"2-axis":[5],"micro-gyroscope":[6],"is":[7,38,71,73,110],"implemented":[8],"in":[9,39,45],"0.35-\u03bcm":[11],"HVCMOS":[12],"technology":[13],"with":[14],"total":[16],"area":[17],"of":[18,35,55,92,107],"4.3":[19],"mm2.":[20],"ASIC":[22],"comprises":[23],"the":[24,30,33,36,47,53,62,78,82,86,93,108],"complete":[25],"analog":[26],"electronics":[28,84],"gyroscope,":[31],"while":[32],"focus":[34],"design":[37,54],"maintaining":[40],"low":[41],"supply":[42,105],"current":[43,106],"and":[44,61,85,100],"reducing":[46],"chip":[48,109],"area.":[49],"paper":[51],"reports":[52],"reference":[56],"circuits,":[57],"high-voltage":[58],"generation,":[59],"drive-loop":[60],"open-loop":[64],"readout":[65],"circuits.":[66],"prototype":[68],"sensor":[69,87],"that":[70],"measured":[72],"assembled":[74],"by":[75],"directly":[76],"wire-bonding":[77],"stacked":[79],"dies":[80],"comprising":[81],"element.":[88],"noise":[90],"floors":[91],"two":[94],"sensors":[95],"are":[96],"0.028\u00b0/s/\u221a{Hz}":[97],"z-axis":[99],"0.032\u00b0/s/\u221a{Hz}":[101],"y-axis.":[103],"2.2":[111],"mA":[112],"from":[113],"3":[115],"V-supply.":[116]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":5},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":3}],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-10-10T00:00:00"}