{"id":"https://openalex.org/W2086481541","doi":"https://doi.org/10.1109/jssc.2010.2074070","title":"Design Issues and Considerations for Low-Cost 3-D TSV IC Technology","display_name":"Design Issues and Considerations for Low-Cost 3-D TSV IC Technology","publication_year":2010,"publication_date":"2010-10-20","ids":{"openalex":"https://openalex.org/W2086481541","doi":"https://doi.org/10.1109/jssc.2010.2074070","mag":"2086481541"},"language":"en","primary_location":{"id":"doi:10.1109/jssc.2010.2074070","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2010.2074070","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073931298","display_name":"Geert Van der Plas","orcid":"https://orcid.org/0000-0002-4975-6672"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Geert Van der Plas","raw_affiliation_strings":["SSET/DC IMEC, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SSET/DC IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015177328","display_name":"Paresh Limaye","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Paresh Limaye","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046255006","display_name":"Igor Loi","orcid":"https://orcid.org/0000-0003-3852-4662"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I9360294","display_name":"University of Bologna","ror":"https://ror.org/01111rn36","country_code":"IT","type":"education","lineage":["https://openalex.org/I9360294"]}],"countries":["BE","IT"],"is_corresponding":false,"raw_author_name":"Igor Loi","raw_affiliation_strings":["University of Bologna, Bologna, Italy","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Bologna, Bologna, Italy","institution_ids":["https://openalex.org/I9360294"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032421605","display_name":"A. Mercha","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Abdelkarim Mercha","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049476718","display_name":"Herman Oprins","orcid":"https://orcid.org/0000-0003-0680-4969"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Herman Oprins","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076713285","display_name":"C. Torregiani","orcid":null},"institutions":[{"id":"https://openalex.org/I4210087596","display_name":"Qualcomm (United States)","ror":"https://ror.org/002zrf773","country_code":"US","type":"company","lineage":["https://openalex.org/I4210087596"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE","US"],"is_corresponding":false,"raw_author_name":"Cristina Torregiani","raw_affiliation_strings":["Qualcomm (QCT), San Diego, CA, USA","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Qualcomm (QCT), San Diego, CA, USA","institution_ids":["https://openalex.org/I4210087596"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046781014","display_name":"S. Thijs","orcid":"https://orcid.org/0000-0003-2889-8345"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Steven Thijs","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103956206","display_name":"Dimitri Linten","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Dimitri Linten","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027473851","display_name":"Michele Stucchi","orcid":"https://orcid.org/0000-0002-7848-0492"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Michele Stucchi","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055308643","display_name":"Guruprasad Katti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Guruprasad Katti","raw_affiliation_strings":["department ESAT, Katholiek Universiteit Leuven, Leuven, Belgium","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"department ESAT, Katholiek Universiteit Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050757937","display_name":"Dimitrios Velenis","orcid":"https://orcid.org/0000-0001-7947-8098"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Dimitrios Velenis","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112564700","display_name":"Vladimir Cherman","orcid":"https://orcid.org/0000-0002-8068-9236"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Vladimir Cherman","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026709733","display_name":"Bart Vandevelde","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Bart Vandevelde","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060752963","display_name":"Veerle Simons","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Veerle Simons","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073310038","display_name":"Ingrid De Wolf","orcid":"https://orcid.org/0000-0003-3822-5953"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ingrid De Wolf","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057156024","display_name":"Riet Labie","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Riet Labie","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063283364","display_name":"Dan Perry","orcid":null},"institutions":[{"id":"https://openalex.org/I4210087596","display_name":"Qualcomm (United States)","ror":"https://ror.org/002zrf773","country_code":"US","type":"company","lineage":["https://openalex.org/I4210087596"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE","US"],"is_corresponding":false,"raw_author_name":"Dan Perry","raw_affiliation_strings":["Qualcomm (QCT), San Diego, CA, USA","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Qualcomm (QCT), San Diego, CA, USA","institution_ids":["https://openalex.org/I4210087596"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003896693","display_name":"Stephane Bronckers","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Stephane Bronckers","raw_affiliation_strings":["EMC Group of Laborelec, Linkebeek, Belgium","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMC Group of Laborelec, Linkebeek, Belgium","institution_ids":[]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026091296","display_name":"Nikolaos Minas","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Nikolaos Minas","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058079141","display_name":"Miro Cupac","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Miro Cupac","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032380079","display_name":"Wouter Ruythooren","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Wouter Ruythooren","raw_affiliation_strings":["Photovoltech Industrie West-Grijpen, Tienen, Belgium","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Photovoltech Industrie West-Grijpen, Tienen, Belgium","institution_ids":[]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112191863","display_name":"J. Van Olmen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Jan Van Olmen","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031627498","display_name":"Alain Phommahaxay","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Alain Phommahaxay","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042473394","display_name":"Muriel de Potter de ten Broeck","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Muriel de Potter de ten Broeck","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011706994","display_name":"A. Opdebeeck","orcid":"https://orcid.org/0000-0001-6737-2456"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ann Opdebeeck","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005108594","display_name":"Micha\u0142 Rakowski","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Michal Rakowski","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111644527","display_name":"Bart De Wachter","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Bart De Wachter","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026300673","display_name":"M. Dehan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Morin Dehan","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072928877","display_name":"Marc Nelis","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Marc Nelis","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108409372","display_name":"Rahul Agarwal","orcid":"https://orcid.org/0009-0002-9963-3889"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE","SG"],"is_corresponding":false,"raw_author_name":"Rahul Agarwal","raw_affiliation_strings":["Institute of Microelectronics, Singapore","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Singapore","institution_ids":["https://openalex.org/I4210090209"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079755983","display_name":"Antonio Pullini","orcid":"https://orcid.org/0000-0001-6709-4214"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Antonio Pullini","raw_affiliation_strings":["iNoCs, Lausanne, Switzerland","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"iNoCs, Lausanne, Switzerland","institution_ids":[]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091526399","display_name":"Federico Angiolini","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Federico Angiolini","raw_affiliation_strings":["iNoCs, Lausanne, Switzerland","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"iNoCs, Lausanne, Switzerland","institution_ids":[]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043408422","display_name":"Luca Benini","orcid":"https://orcid.org/0000-0001-8068-3806"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I9360294","display_name":"University of Bologna","ror":"https://ror.org/01111rn36","country_code":"IT","type":"education","lineage":["https://openalex.org/I9360294"]}],"countries":["BE","IT"],"is_corresponding":false,"raw_author_name":"Luca Benini","raw_affiliation_strings":["University of Bologna, Bologna, Italy","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Bologna, Bologna, Italy","institution_ids":["https://openalex.org/I9360294"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076274517","display_name":"Wim Dehaene","orcid":"https://orcid.org/0000-0002-6792-7965"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Wim Dehaene","raw_affiliation_strings":["department ESAT, Katholiek Universiteit Leuven, Leuven, Belgium","imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"department ESAT, Katholiek Universiteit Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016839480","display_name":"Youssef Travaly","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Youssef Travaly","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051712390","display_name":"Eric Beyne","orcid":"https://orcid.org/0000-0002-3096-050X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Eric Beyne","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002340330","display_name":"Paul Marchal","orcid":"https://orcid.org/0000-0003-2821-8119"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Paul Marchal","raw_affiliation_strings":["imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":4,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":35.0137,"has_fulltext":false,"cited_by_count":310,"citation_normalized_percentile":{"value":0.99823151,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":100},"biblio":{"volume":"46","issue":"1","first_page":"293","last_page":"307"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10783","display_name":"Additive Manufacturing and 3D Printing Technologies","score":0.9894000291824341,"subfield":{"id":"https://openalex.org/subfields/2203","display_name":"Automotive Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13251","display_name":"Electrical and Thermal Properties of Materials","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6017279624938965},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5938926935195923},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.5232892632484436},{"id":"https://openalex.org/keywords/overhead","display_name":"Overhead (engineering)","score":0.5230202078819275},{"id":"https://openalex.org/keywords/power-integrity","display_name":"Power integrity","score":0.4707682132720947},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4579630494117737},{"id":"https://openalex.org/keywords/through-silicon-via","display_name":"Through-silicon via","score":0.455446720123291},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.451797217130661},{"id":"https://openalex.org/keywords/three-dimensional-integrated-circuit","display_name":"Three-dimensional integrated circuit","score":0.4515650272369385},{"id":"https://openalex.org/keywords/notation","display_name":"Notation","score":0.4465230107307434},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.4374871850013733},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.43468204140663147},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.43012166023254395},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.42662250995635986},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.41202986240386963},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.41067734360694885},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.3377227783203125},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3306404650211334},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.280678927898407},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18038949370384216},{"id":"https://openalex.org/keywords/signal-integrity","display_name":"Signal integrity","score":0.17745769023895264},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.16693717241287231},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.13567379117012024},{"id":"https://openalex.org/keywords/arithmetic","display_name":"Arithmetic","score":0.08943164348602295}],"concepts":[{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6017279624938965},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5938926935195923},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.5232892632484436},{"id":"https://openalex.org/C2779960059","wikidata":"https://www.wikidata.org/wiki/Q7113681","display_name":"Overhead (engineering)","level":2,"score":0.5230202078819275},{"id":"https://openalex.org/C2777561913","wikidata":"https://www.wikidata.org/wiki/Q19599527","display_name":"Power integrity","level":4,"score":0.4707682132720947},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4579630494117737},{"id":"https://openalex.org/C45632049","wikidata":"https://www.wikidata.org/wiki/Q1578120","display_name":"Through-silicon via","level":3,"score":0.455446720123291},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.451797217130661},{"id":"https://openalex.org/C59088047","wikidata":"https://www.wikidata.org/wiki/Q229370","display_name":"Three-dimensional integrated circuit","level":3,"score":0.4515650272369385},{"id":"https://openalex.org/C45357846","wikidata":"https://www.wikidata.org/wiki/Q2001982","display_name":"Notation","level":2,"score":0.4465230107307434},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.4374871850013733},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.43468204140663147},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.43012166023254395},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42662250995635986},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.41202986240386963},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.41067734360694885},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3377227783203125},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3306404650211334},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.280678927898407},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18038949370384216},{"id":"https://openalex.org/C44938667","wikidata":"https://www.wikidata.org/wiki/Q4503810","display_name":"Signal integrity","level":3,"score":0.17745769023895264},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.16693717241287231},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.13567379117012024},{"id":"https://openalex.org/C94375191","wikidata":"https://www.wikidata.org/wiki/Q11205","display_name":"Arithmetic","level":1,"score":0.08943164348602295},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/jssc.2010.2074070","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jssc.2010.2074070","pdf_url":null,"source":{"id":"https://openalex.org/S83637746","display_name":"IEEE Journal of Solid-State Circuits","issn_l":"0018-9200","issn":["0018-9200","1558-173X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Journal of Solid-State Circuits","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.453.274","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.453.274","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://cseweb.ucsd.edu/classes/fa11/cse291-a/docs/JSSC_TSV.pdf","raw_type":"text"},{"id":"pmh:oai:cris.unibo.it:11585/106158","is_oa":false,"landing_page_url":"http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5604678","pdf_url":null,"source":{"id":"https://openalex.org/S4306402579","display_name":"Archivio istituzionale della ricerca (Alma Mater Studiorum Universit\u00e0 di Bologna)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210117483","host_organization_name":"Istituto di Ematologia di Bologna","host_organization_lineage":["https://openalex.org/I4210117483"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.5099999904632568,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W1494602065","https://openalex.org/W1964634575","https://openalex.org/W1999752397","https://openalex.org/W2012182877","https://openalex.org/W2034975188","https://openalex.org/W2064712157","https://openalex.org/W2068954384","https://openalex.org/W2081082387","https://openalex.org/W2082499523","https://openalex.org/W2089642960","https://openalex.org/W2090773267","https://openalex.org/W2107304970","https://openalex.org/W2109143217","https://openalex.org/W2114194045","https://openalex.org/W2115505753","https://openalex.org/W2118017426","https://openalex.org/W2124583578","https://openalex.org/W2125356053","https://openalex.org/W2125357468","https://openalex.org/W2145135695","https://openalex.org/W2151351903","https://openalex.org/W2151613126","https://openalex.org/W2154133941","https://openalex.org/W2155707315","https://openalex.org/W2174613990","https://openalex.org/W6629777394","https://openalex.org/W6641421767","https://openalex.org/W6666594421","https://openalex.org/W6670369141","https://openalex.org/W6670747929","https://openalex.org/W6673069597","https://openalex.org/W6676450090","https://openalex.org/W6676822425","https://openalex.org/W6677037318","https://openalex.org/W6678672993"],"related_works":["https://openalex.org/W1990828594","https://openalex.org/W2016970881","https://openalex.org/W2027159884","https://openalex.org/W2333804548","https://openalex.org/W2534942874","https://openalex.org/W3093450488","https://openalex.org/W2016589506","https://openalex.org/W2376702355","https://openalex.org/W1998607656","https://openalex.org/W2146176401"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2],"key":[3],"design":[4],"issues":[5],"and":[6,83,139,151,180],"considerations":[7],"of":[8,18,33,129,156],"a":[9,67,103,112,157],"low-cost":[10],"3-D":[11,53,81,104,158,173],"Cu-TSV":[12],"technology":[13],"are":[14],"investigated.":[15],"The":[16,31,96,123],"impact":[17,32,124],"TSV":[19,34],"on":[20,36,125],"BEOL":[21],"interconnect":[22],"reliability":[23],"is":[24,43,94,106,131],"limited,":[25],"no":[26,86],"failures":[27],"have":[28,76,84],"been":[29],"observed.":[30],"stress":[35],"MOS":[37],"devices":[38],"causes${\\rm":[39],"Vth}$shifts,":[40],"further":[41,92],"analysis":[42],"required":[44],"to":[45,71,172],"understand":[46],"their":[47],"importance.":[48],"Thermal":[49],"hot":[50],"spots":[51],"in":[52,63,102,111],"chip":[54],"stacks":[55],"cause":[56],"temperature":[57],"increases":[58],"three":[59],"times":[60],"higher":[61],"than":[62,110],"2-D":[64,113,170],"chips,":[65],"necessitating":[66],"careful":[68,91],"thermal":[69,73],"floorplanning":[70],"avoid":[72],"failures.":[74],"We":[75],"monitored":[77],"for":[78,117],"ESD":[79],"during":[80],"processing":[82],"found":[85],"events":[87],"take":[88],"place,":[89],"however":[90],"monitoring":[93],"required.":[95],"noise":[97],"coupling":[98],"between":[99],"two":[100],"tiers":[101],"chip-stack":[105],"20":[107],"dB":[108],"lower":[109],"SoC,":[114],"opening":[115],"opportunities":[116],"increased":[118],"mixed":[119],"signal":[120],"system":[121],"performance.":[122],"digital":[126,140],"circuit":[127],"performance":[128],"TSVs":[130,147],"accurately":[132],"modeled":[133],"with":[134],"the":[135,163],"presented":[136],"RC":[137],"model":[138],"gates":[141],"can":[142,166],"directly":[143],"drive":[144],"signals":[145],"through":[146],"at":[148,175],"high":[149],"speed":[150],"low":[152,176],"power.":[153],"Experimental":[154],"results":[155],"Network-on-Chip":[159],"implementation":[160],"demonstrate":[161],"that":[162],"NoC":[164],"concept":[165],"be":[167],"extended":[168],"from":[169],"SoC":[171],"SoCs":[174],"area":[177],"(0.018${\\hbox":[178],"{mm}}^{2}$)":[179],"power":[181],"(3%)":[182],"overhead.":[183]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":7},{"year":2020,"cited_by_count":13},{"year":2019,"cited_by_count":14},{"year":2018,"cited_by_count":10},{"year":2017,"cited_by_count":19},{"year":2016,"cited_by_count":17},{"year":2015,"cited_by_count":25},{"year":2014,"cited_by_count":51},{"year":2013,"cited_by_count":46},{"year":2012,"cited_by_count":47}],"updated_date":"2026-08-26T07:47:46.906454","created_date":"2025-10-10T00:00:00"}