{"id":"https://openalex.org/W1516981090","doi":"https://doi.org/10.1109/iwasi.2015.7184978","title":"Three dimensional ALD of TiO<inf>2</inf> for in-vivo biomedical sensor applications","display_name":"Three dimensional ALD of TiO<inf>2</inf> for in-vivo biomedical sensor applications","publication_year":2015,"publication_date":"2015-06-01","ids":{"openalex":"https://openalex.org/W1516981090","doi":"https://doi.org/10.1109/iwasi.2015.7184978","mag":"1516981090"},"language":"en","primary_location":{"id":"doi:10.1109/iwasi.2015.7184978","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iwasi.2015.7184978","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 6th International Workshop on Advances in Sensors and Interfaces (IWASI)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113600416","display_name":"Sven Schr\u00f6der","orcid":null},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Sven Schroder","raw_affiliation_strings":["Technische Universitat Berlin, Berlin, Berlin, DE","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"Technische Universitat Berlin, Berlin, Berlin, DE","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110461713","display_name":"\u00d6zg\u00fc Dogan","orcid":null},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ozgu Dogan","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055217697","display_name":"Jessica Schneidewind","orcid":null},"institutions":[{"id":"https://openalex.org/I4210161230","display_name":"SENTECH Instruments (Germany)","ror":"https://ror.org/05nqms590","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210161230"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jessica Schneidewind","raw_affiliation_strings":["SENTECH Instruents Gmb H, Berlin, Germany","SENTECH Instruments GmbH, Berlin, Germany"],"affiliations":[{"raw_affiliation_string":"SENTECH Instruents Gmb H, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]},{"raw_affiliation_string":"SENTECH Instruments GmbH, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066342381","display_name":"Gabriel Bertotti","orcid":"https://orcid.org/0000-0001-5643-2310"},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Gabriel Bertotti","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014075524","display_name":"Stefan Keil","orcid":null},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Keil","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030118300","display_name":"Hassan Gargouri","orcid":null},"institutions":[{"id":"https://openalex.org/I4210161230","display_name":"SENTECH Instruments (Germany)","ror":"https://ror.org/05nqms590","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210161230"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Hassan Gargouri","raw_affiliation_strings":["SENTECH Instruents Gmb H, Berlin, Germany","SENTECH Instruments GmbH, Berlin, Germany"],"affiliations":[{"raw_affiliation_string":"SENTECH Instruents Gmb H, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]},{"raw_affiliation_string":"SENTECH Instruments GmbH, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000041406","display_name":"Michael Arens","orcid":"https://orcid.org/0000-0002-7857-0332"},"institutions":[{"id":"https://openalex.org/I4210161230","display_name":"SENTECH Instruments (Germany)","ror":"https://ror.org/05nqms590","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210161230"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Arens","raw_affiliation_strings":["SENTECH Instruents Gmb H, Berlin, Germany","SENTECH Instruments GmbH, Berlin, Germany"],"affiliations":[{"raw_affiliation_string":"SENTECH Instruents Gmb H, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]},{"raw_affiliation_string":"SENTECH Instruments GmbH, Berlin, Germany","institution_ids":["https://openalex.org/I4210161230"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054965796","display_name":"Evelin Brose","orcid":null},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Evelin Brose","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089987820","display_name":"J. Bruns","orcid":"https://orcid.org/0000-0001-5203-4884"},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jurgen Bruns","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048578439","display_name":"D. Wolansky","orcid":"https://orcid.org/0000-0002-4058-4886"},"institutions":[{"id":"https://openalex.org/I92894754","display_name":"Innovations for High Performance Microelectronics","ror":"https://ror.org/0489gab80","country_code":"DE","type":"facility","lineage":["https://openalex.org/I315704651","https://openalex.org/I92894754"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Dirk Wolansky","raw_affiliation_strings":["IHP Gmb H, Technology/Process Research, Frankfu, Germany","IHP GmbH, Technology/Process Research, Frankfurt/Oder, Germany"],"affiliations":[{"raw_affiliation_string":"IHP Gmb H, Technology/Process Research, Frankfu, Germany","institution_ids":[]},{"raw_affiliation_string":"IHP GmbH, Technology/Process Research, Frankfurt/Oder, Germany","institution_ids":["https://openalex.org/I92894754"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078543943","display_name":"Bernd Tillack","orcid":null},"institutions":[{"id":"https://openalex.org/I92894754","display_name":"Innovations for High Performance Microelectronics","ror":"https://ror.org/0489gab80","country_code":"DE","type":"facility","lineage":["https://openalex.org/I315704651","https://openalex.org/I92894754"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bernd Tillack","raw_affiliation_strings":["IHP Gmb H, Technology/Process Research, Frankfu, Germany","IHP GmbH, Technology/Process Research, Frankfurt/Oder, Germany"],"affiliations":[{"raw_affiliation_string":"IHP Gmb H, Technology/Process Research, Frankfu, Germany","institution_ids":[]},{"raw_affiliation_string":"IHP GmbH, Technology/Process Research, Frankfurt/Oder, Germany","institution_ids":["https://openalex.org/I92894754"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073663890","display_name":"Stefano Vassanelli","orcid":"https://orcid.org/0000-0003-0389-8023"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Stefano Vassanelli","raw_affiliation_strings":["Department of Anatomy and Human Physiology, University of Padova, Padova, Italy","University of Padova, Department of Anatomy and Human Physiology, Padova, Italy"],"affiliations":[{"raw_affiliation_string":"Department of Anatomy and Human Physiology, University of Padova, Padova, Italy","institution_ids":["https://openalex.org/I138689650"]},{"raw_affiliation_string":"University of Padova, Department of Anatomy and Human Physiology, Padova, Italy","institution_ids":["https://openalex.org/I138689650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020298875","display_name":"Bernd Szyszka","orcid":"https://orcid.org/0000-0001-8070-4304"},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bernd Szyszka","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090592661","display_name":"R. Thewes","orcid":null},"institutions":[{"id":"https://openalex.org/I4577782","display_name":"Technische Universit\u00e4t Berlin","ror":"https://ror.org/03v4gjf40","country_code":"DE","type":"education","lineage":["https://openalex.org/I4577782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Roland Thewes","raw_affiliation_strings":["TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]"],"affiliations":[{"raw_affiliation_string":"TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany","institution_ids":["https://openalex.org/I4577782"]},{"raw_affiliation_string":"[TU Berlin, Faculty of Electrical Engineering & Computer Science, Berlin, Germany]","institution_ids":["https://openalex.org/I4577782"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":14,"corresponding_author_ids":["https://openalex.org/A5113600416"],"corresponding_institution_ids":["https://openalex.org/I4577782"],"apc_list":null,"apc_paid":null,"fwci":1.0908,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.72377015,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"21","last_page":"24"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.7230392694473267},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6976923942565918},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6409043073654175},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.626495361328125},{"id":"https://openalex.org/keywords/biocompatible-material","display_name":"Biocompatible material","score":0.5472913384437561},{"id":"https://openalex.org/keywords/leakage","display_name":"Leakage (economics)","score":0.5373536348342896},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5369704961776733},{"id":"https://openalex.org/keywords/titanium-dioxide","display_name":"Titanium dioxide","score":0.453060507774353},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"Atomic layer deposition","score":0.4350898563861847},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3988097310066223},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3843327462673187},{"id":"https://openalex.org/keywords/biomedical-engineering","display_name":"Biomedical engineering","score":0.3302684724330902},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.28488269448280334},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.18122544884681702},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.16181057691574097},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1307404637336731},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.08258509635925293},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.07613471150398254}],"concepts":[{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7230392694473267},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6976923942565918},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6409043073654175},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.626495361328125},{"id":"https://openalex.org/C1318750","wikidata":"https://www.wikidata.org/wiki/Q865663","display_name":"Biocompatible material","level":2,"score":0.5472913384437561},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.5373536348342896},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5369704961776733},{"id":"https://openalex.org/C2777593239","wikidata":"https://www.wikidata.org/wiki/Q193521","display_name":"Titanium dioxide","level":2,"score":0.453060507774353},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.4350898563861847},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3988097310066223},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3843327462673187},{"id":"https://openalex.org/C136229726","wikidata":"https://www.wikidata.org/wiki/Q327092","display_name":"Biomedical engineering","level":1,"score":0.3302684724330902},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.28488269448280334},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.18122544884681702},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16181057691574097},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1307404637336731},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.08258509635925293},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.07613471150398254},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iwasi.2015.7184978","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iwasi.2015.7184978","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 6th International Workshop on Advances in Sensors and Interfaces (IWASI)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6499999761581421}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W614853423","https://openalex.org/W1973783562","https://openalex.org/W1983204609","https://openalex.org/W1983236414","https://openalex.org/W2004403982","https://openalex.org/W2008213932","https://openalex.org/W2040793024","https://openalex.org/W2043128810","https://openalex.org/W2053012273","https://openalex.org/W2081259991","https://openalex.org/W2104734762","https://openalex.org/W2105348529","https://openalex.org/W2111937020","https://openalex.org/W2133863162","https://openalex.org/W2139426119","https://openalex.org/W2141257795","https://openalex.org/W2159421177","https://openalex.org/W2180930892","https://openalex.org/W2479151136","https://openalex.org/W2536247099","https://openalex.org/W4229689031","https://openalex.org/W4302815708","https://openalex.org/W6675835931"],"related_works":["https://openalex.org/W2017189043","https://openalex.org/W3206390060","https://openalex.org/W2045648267","https://openalex.org/W1998534931","https://openalex.org/W4248115860","https://openalex.org/W4304136734","https://openalex.org/W1969537910","https://openalex.org/W1994690009","https://openalex.org/W4382765865","https://openalex.org/W2327190127"],"abstract_inverted_index":{"Titanium":[0],"dioxide,":[1],"known":[2],"as":[3],"a":[4,19,46],"high-k":[5],"biocompatible":[6],"dielectric":[7,62],"transducer":[8],"material,":[9],"is":[10],"processed":[11],"by":[12],"means":[13],"of":[14,57],"ALD":[15],"and":[16,36],"applied":[17],"to":[18,60],"3D":[20,65],"structure":[21],"with":[22],"dimensions":[23],"typical":[24],"for":[25,64],"multi-site":[26],"multi-channel":[27],"in-vivo":[28],"neural":[29],"interfaces.":[30],"High":[31],"uniformity,":[32],"high":[33],"areal":[34],"capacitance,":[35],"in":[37],"particular":[38],"low":[39],"leakage":[40],"current":[41],"densities":[42],"are":[43],"achieved":[44],"within":[45],"sufficiently":[47],"wide":[48],"operation":[49],"voltage":[50],"window.":[51],"The":[52],"results":[53],"demonstrate":[54],"the":[55],"suitability":[56],"this":[58],"process":[59],"provide":[61],"interfaces":[63],"biomedical":[66],"applications.":[67]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}