{"id":"https://openalex.org/W4392746270","doi":"https://doi.org/10.1109/isscc49657.2024.10454423","title":"3.8 A 0.65V 900\u00b5m\u00b2 BEoL RC-Based Temperature Sensor with \u00b11\u00b0C Inaccuracy from \u221225\u00b0C to 125\u00b0C","display_name":"3.8 A 0.65V 900\u00b5m\u00b2 BEoL RC-Based Temperature Sensor with \u00b11\u00b0C Inaccuracy from \u221225\u00b0C to 125\u00b0C","publication_year":2024,"publication_date":"2024-02-18","ids":{"openalex":"https://openalex.org/W4392746270","doi":"https://doi.org/10.1109/isscc49657.2024.10454423"},"language":"en","primary_location":{"id":"doi:10.1109/isscc49657.2024.10454423","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc49657.2024.10454423","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Solid-State Circuits Conference (ISSCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113140634","display_name":"Bei-Shing Lien","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Bei-Shing Lien","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113140635","display_name":"Szu Lin Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Szu Lin Liu","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067741154","display_name":"Wei-Lin Lai","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Lin Lai","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037554772","display_name":"Yichen Lu","orcid":"https://orcid.org/0000-0002-9436-0079"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yi-Chen Lu","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111936586","display_name":"Yung-Chow Peng","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yung-Chow Peng","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5008079439","display_name":"Kenny Hsieh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kenny Cheng-Hsiang Hsieh","raw_affiliation_strings":["TSMC,Hsinchu,Taiwan","TSMC, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TSMC,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"TSMC, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5113140634"],"corresponding_institution_ids":["https://openalex.org/I4210120917"],"apc_list":null,"apc_paid":null,"fwci":1.5537,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.80694748,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"68","last_page":"70"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5634788274765015},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3663291335105896},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34592217206954956},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3284511864185333},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1956401765346527}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5634788274765015},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3663291335105896},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34592217206954956},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3284511864185333},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1956401765346527}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc49657.2024.10454423","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc49657.2024.10454423","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Solid-State Circuits Conference (ISSCC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1968417187","https://openalex.org/W1969794630","https://openalex.org/W2146222929","https://openalex.org/W2151555021","https://openalex.org/W2294849710","https://openalex.org/W3015637263","https://openalex.org/W4220777582","https://openalex.org/W4249044543"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2016187641","https://openalex.org/W2805339068","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159"],"abstract_inverted_index":{"To":[0],"maintain":[1],"high-performance":[2],"computing":[3],"capacity":[4],"and":[5,20,37,67,84,126],"prevent":[6],"chip":[7],"overheating,":[8],"it":[9],"is":[10,47,57],"essential":[11],"to":[12,40,134,146],"minimize":[13],"the":[14,21,30,34,38,41,50,54,61,64,76,79,85,119,124],"gap":[15],"between":[16,123],"on-die":[17],"thermal":[18],"measurements":[19],"actual":[22],"temperature":[23,35],"at":[24],"hotspots.":[25],"This":[26],"relies":[27],"primarily":[28],"on":[29],"inherent":[31],"accuracy":[32,145],"of":[33,53,63,78,87,148],"sensors":[36,102,139],"distance":[39],"heat":[42],"sources.":[43],"The":[44],"latter":[45],"factor":[46],"constrained":[48],"by":[49,60],"physical":[51],"footprint":[52],"sensor,":[55],"which":[56],"generally":[58],"determined":[59],"complexity":[62],"sensor\u2019s":[65],"biasing":[66],"analog-to-digital":[68],"conversion":[69],"(ADC)":[70],"schemes.":[71],"In":[72],"advanced":[73,159],"FinFET":[74,160],"nodes,":[75],"scaling":[77],"supply":[80],"voltage":[81],"$(":[82],"\\mathrm{V}_{DD})$":[83],"decreasing":[86],"passive":[88],"device":[89],"types":[90],"are":[91],"other":[92],"critical":[93],"challenges":[94],"for":[95],"digital":[96],"hot-spot":[97],"sensors.":[98],"Typical":[99],"current-bias":[100],"BJT":[101,149],"still":[103],"need":[104],"$\\mathrm{V}_{DD}\\ge":[105],"1\\mathrm{V}$":[106],"[4\u20136].":[107],"A":[108],"sub-1V":[109],"capacitive-bias":[110],"bulk-diode":[111,125],"sensor":[112],"has":[113],"been":[114],"reported":[115],"in":[116,158],"[9],":[117],"but":[118,151],"extra":[120],"keep-out":[121],"zone":[122],"nearby":[127],"PMOS":[128],"logics":[129],"may":[130],"be":[131,156],"required":[132],"due":[133],"different":[135],"N-well":[136],"biases.":[137],"Poly-resistor-based":[138],"[2,":[140],"3]":[141],"can":[142],"reach":[143],"comparable":[144],"that":[147],"sensors,":[150],"these":[152],"resistors":[153],"will":[154],"not":[155],"available":[157],"nodes.":[161]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":1}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2025-10-10T00:00:00"}