{"id":"https://openalex.org/W4221113826","doi":"https://doi.org/10.1109/isscc42614.2022.9731729","title":"1024 3D-Stacked Monolithic NEMS Array with 375\u03bcm<sup>2</sup>0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing","display_name":"1024 3D-Stacked Monolithic NEMS Array with 375\u03bcm<sup>2</sup>0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing","publication_year":2022,"publication_date":"2022-02-20","ids":{"openalex":"https://openalex.org/W4221113826","doi":"https://doi.org/10.1109/isscc42614.2022.9731729"},"language":"en","primary_location":{"id":"doi:10.1109/isscc42614.2022.9731729","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc42614.2022.9731729","pdf_url":null,"source":{"id":"https://openalex.org/S4363607897","display_name":"2022 IEEE International Solid- State Circuits Conference (ISSCC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Solid- State Circuits Conference (ISSCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://cea.hal.science/cea-04523517","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050101471","display_name":"G. Billiot","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Gerard Billiot","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041835270","display_name":"Paul Mattei","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Paul Mattei","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011468886","display_name":"Bogdan Vysotskyi","orcid":"https://orcid.org/0000-0003-4050-6236"},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Bogdan Vysotskyi","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061471737","display_name":"Adrien Reynaud","orcid":"https://orcid.org/0000-0003-0684-9286"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Adrien Reynaud","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065001562","display_name":"Louis Hutin","orcid":"https://orcid.org/0000-0001-6429-3867"},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Louis Hutin","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040121627","display_name":"Christophe Plantier","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Christophe Plantier","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067496974","display_name":"E. Rolland","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Emmanuel Rolland","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000795917","display_name":"M. G\u00e9ly","orcid":"https://orcid.org/0000-0003-2801-268X"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Marc Gely","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065040698","display_name":"Giulia Usai","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Giulia Usai","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012657801","display_name":"C. Tabone","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Claude Tabone","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041487440","display_name":"Ga\u00ebl Pillonnet","orcid":"https://orcid.org/0000-0003-0539-7185"},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Gael Pillonnet","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041428499","display_name":"S. Robinet","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Stephanie Robinet","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5070939792","display_name":"S\u00e9bastien Hentz","orcid":"https://orcid.org/0000-0003-0479-9027"},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"funder","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Sebastien Hentz","raw_affiliation_strings":["CEA-L&#x00E9;ti,Grenoble,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-L&#x00E9;ti,Grenoble,France","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I2738703131"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":13,"corresponding_author_ids":["https://openalex.org/A5050101471"],"corresponding_institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.03467443,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.9269497394561768},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.46681901812553406},{"id":"https://openalex.org/keywords/allan-variance","display_name":"Allan variance","score":0.432644784450531},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.37979745864868164},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.342132031917572},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.304531455039978},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2908443510532379},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2124418020248413},{"id":"https://openalex.org/keywords/standard-deviation","display_name":"Standard deviation","score":0.1872730255126953},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17124775052070618}],"concepts":[{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.9269497394561768},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.46681901812553406},{"id":"https://openalex.org/C5722023","wikidata":"https://www.wikidata.org/wiki/Q1440227","display_name":"Allan variance","level":3,"score":0.432644784450531},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.37979745864868164},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.342132031917572},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.304531455039978},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2908443510532379},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2124418020248413},{"id":"https://openalex.org/C22679943","wikidata":"https://www.wikidata.org/wiki/Q159375","display_name":"Standard deviation","level":2,"score":0.1872730255126953},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17124775052070618},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/isscc42614.2022.9731729","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc42614.2022.9731729","pdf_url":null,"source":{"id":"https://openalex.org/S4363607897","display_name":"2022 IEEE International Solid- State Circuits Conference (ISSCC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Solid- State Circuits Conference (ISSCC)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:cea-04523517v1","is_oa":true,"landing_page_url":"https://cea.hal.science/cea-04523517","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://ieeexplore.ieee.org/document/9731729","raw_type":"Conference papers"}],"best_oa_location":{"id":"pmh:oai:HAL:cea-04523517v1","is_oa":true,"landing_page_url":"https://cea.hal.science/cea-04523517","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://ieeexplore.ieee.org/document/9731729","raw_type":"Conference papers"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.46000000834465027}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2031096644","https://openalex.org/W2066101528","https://openalex.org/W2141916646","https://openalex.org/W2593328407","https://openalex.org/W2900643048","https://openalex.org/W3139018646"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W4211078032"],"abstract_inverted_index":{"NanoElectroMechanical":[0],"System":[1],"(NEMS)-based":[2],"resonator":[3],"sensors":[4,191],"are":[5,33],"a":[6,11,106,133,148,165],"promising":[7],"approach":[8],"to":[9,86],"detect":[10],"single":[12],"molecule":[13],"deposition":[14,42],"with":[15,151],"zeptogram":[16],"mass":[17,41],"resolution":[18,94],"[1].":[19],"However,":[20],"MEMS":[21],"sensing":[22,183],"areas":[23],"(on":[24],"the":[25,40,52,59,72,77,102,186],"order":[26],"of":[27,36,54,105,143],"1":[28],"<tex":[29,46,154],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[30,47,155],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\mu\\mathrm{m}^{2}$</tex>":[31],")":[32],"several":[34],"orders":[35],"magnitude":[37],"lower":[38],"than":[39,185],"focus":[43],"beam":[44],"(":[45],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\text{mm}^{2}$</tex>":[48],"-scale),":[49],"dramatically":[50],"reducing":[51],"probability":[53,79],"detecting":[55],"molecules,":[56],"thus":[57],"increasing":[58],"detection":[60,78],"time":[61],"[2].":[62],"NEMS":[63,74,87,168,178,190],"and":[64,80,118,127,130,160],"CMOS":[65],"co-integration":[66],"has":[67,95],"already":[68],"been":[69,97],"considered":[70],"but":[71],"density":[73],"arrays":[75,179],"limits":[76],"scalable":[81],"readout":[82,119,150],"circuits":[83,120],"fully":[84,107],"suitable":[85],"pixel":[88],"constraints":[89],"e.g.":[90],"size,":[91],"power":[92],"consumption,":[93],"not":[96],"proposed":[98],"yet.":[99],"We":[100,146],"propose":[101],"first":[103],"realization":[104],"3D-monolithic":[108],"1024":[109,177],"zepto-balances":[110],"(zBal)":[111],"array":[112],"including":[113],"NEMS-based":[114],"gravimetric":[115],"sensor":[116],"[2]":[117],"individually":[121],"addressed":[122],"by":[123,132],"on-chip":[124],"matrix":[125],"decoder":[126],"voltage":[128],"drivers":[129],"controlled":[131],"shared":[134],"phase-locked":[135],"loop":[136],"which":[137],"scans":[138],"sequentially":[139],"two":[140],"resonant":[141],"frequencies":[142],"each":[144],"NEMS.":[145],"report":[147],"zBal":[149],"0.5mW":[152],"power-consumption,":[153],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$375\\mu\\mathrm{m}^{2}$</tex>":[156],",":[157],"silicon":[158],"footprint":[159],"0.28ppm":[161],"frequency-resolution":[162],"variability":[163,174],"for":[164],"10ms":[166],"individual":[167],"acquisition":[169],"time.":[170],"The":[171],"0.7%":[172],"frequency":[173],"measured":[175],"on":[176],"allows":[180],"higher":[181],"effective":[182],"area":[184],"previously":[187],"published":[188],"active":[189],"[3]\u2013[5].":[192]},"counts_by_year":[],"updated_date":"2026-05-07T13:39:58.223016","created_date":"2022-04-03T00:00:00"}