{"id":"https://openalex.org/W2921905110","doi":"https://doi.org/10.1109/isscc.2019.8662331","title":"10.2 A 22ng/\u221aHz 17mW MEMS Accelerometer with Digital Noise-Reduction Techniques","display_name":"10.2 A 22ng/\u221aHz 17mW MEMS Accelerometer with Digital Noise-Reduction Techniques","publication_year":2019,"publication_date":"2019-02-01","ids":{"openalex":"https://openalex.org/W2921905110","doi":"https://doi.org/10.1109/isscc.2019.8662331","mag":"2921905110"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2019.8662331","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2019.8662331","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Solid- State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074222539","display_name":"Yuki Furubayashi","orcid":"https://orcid.org/0000-0001-5525-6167"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuki Furubayashi","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036668422","display_name":"T. Oshima","orcid":"https://orcid.org/0000-0002-1069-3221"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takashi Oshima","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064295075","display_name":"Taizo Yamawaki","orcid":null},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Taizo Yamawaki","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112528457","display_name":"Keiki Watanabe","orcid":null},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Keiki Watanabe","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112528458","display_name":"Keijiro Mori","orcid":null},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Keijiro Mori","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022645695","display_name":"Naoki Mori","orcid":"https://orcid.org/0000-0002-0707-3443"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoki Mori","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000998032","display_name":"Akira Matsumoto","orcid":"https://orcid.org/0000-0002-7568-8677"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akira Matsumoto","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040059064","display_name":"Hideto Kazama","orcid":null},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hideto Kazama","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101842544","display_name":"Y. Kamada","orcid":"https://orcid.org/0000-0002-2075-0496"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yudai Kamada","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021506055","display_name":"Atsushi Isobe","orcid":"https://orcid.org/0000-0001-7527-3298"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Atsushi Isobe","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085756372","display_name":"Tomonori Sekiguchi","orcid":"https://orcid.org/0000-0002-7094-845X"},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tomonori Sekiguchi","raw_affiliation_strings":["Hitachi, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi, Tokyo, Japan","institution_ids":["https://openalex.org/I65143321"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I65143321"],"apc_list":null,"apc_paid":null,"fwci":0.2422,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.53593229,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"182","last_page":"184"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9047998189926147},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6688418388366699},{"id":"https://openalex.org/keywords/brownian-noise","display_name":"Brownian noise","score":0.6469182372093201},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5739144086837769},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5607267618179321},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5552331805229187},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.508141040802002},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5073050856590271},{"id":"https://openalex.org/keywords/noise-reduction","display_name":"Noise reduction","score":0.5004470348358154},{"id":"https://openalex.org/keywords/noise-floor","display_name":"Noise floor","score":0.4759368896484375},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3520423173904419},{"id":"https://openalex.org/keywords/noise-measurement","display_name":"Noise measurement","score":0.30922311544418335},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.18452370166778564},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.15403082966804504},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.0977189838886261},{"id":"https://openalex.org/keywords/white-noise","display_name":"White noise","score":0.06161549687385559}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9047998189926147},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6688418388366699},{"id":"https://openalex.org/C50755983","wikidata":"https://www.wikidata.org/wiki/Q1437483","display_name":"Brownian noise","level":3,"score":0.6469182372093201},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5739144086837769},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5607267618179321},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5552331805229187},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.508141040802002},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5073050856590271},{"id":"https://openalex.org/C163294075","wikidata":"https://www.wikidata.org/wiki/Q581861","display_name":"Noise reduction","level":2,"score":0.5004470348358154},{"id":"https://openalex.org/C187612029","wikidata":"https://www.wikidata.org/wiki/Q17083130","display_name":"Noise floor","level":4,"score":0.4759368896484375},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3520423173904419},{"id":"https://openalex.org/C29265498","wikidata":"https://www.wikidata.org/wiki/Q7047719","display_name":"Noise measurement","level":3,"score":0.30922311544418335},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.18452370166778564},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.15403082966804504},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0977189838886261},{"id":"https://openalex.org/C112633086","wikidata":"https://www.wikidata.org/wiki/Q381287","display_name":"White noise","level":2,"score":0.06161549687385559},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2019.8662331","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2019.8662331","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Solid- State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.6499999761581421,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1581627921","https://openalex.org/W1974526631","https://openalex.org/W1993328035","https://openalex.org/W2060423583","https://openalex.org/W2784133938"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2006014592","https://openalex.org/W2028284589","https://openalex.org/W3045176038","https://openalex.org/W2900480837","https://openalex.org/W2978594305","https://openalex.org/W4232743211","https://openalex.org/W3119045404"],"abstract_inverted_index":{"In":[0],"emerging":[1],"applications":[2,45],"such":[3],"as":[4],"next-generation":[5],"oil":[6],"and":[7,10,46,60,104,120],"gas":[8],"exploration":[9],"infrastructure":[11],"monitoring,":[12],"a":[13],"large":[14],"number":[15],"of":[16,71,82,93,116],"highly":[17],"sensitive":[18],"accelerometers":[19],"need":[20],"to":[21],"be":[22],"deployed.":[23],"The":[24,91],"fully":[25],"integrated":[26],"MEMS":[27,83,95,99],"accelerometer":[28,96],"in":[29,109],"this":[30,94],"work":[31],"achieves":[32],"both":[33],"the":[34,56,69,80,110],"extremely":[35],"low":[36,48],"noise":[37,63,107,118],"level":[38],"(22ng$/":[39],"\\surd":[40],"$Hz)":[41],"required":[42,57],"by":[43,68,79],"these":[44],"sufficiently":[47],"power":[49,89],"(17mW)":[50],"enabling":[51],"battery-based":[52],"operations":[53],"while":[54],"meeting":[55],"input":[58,76],"range":[59],"bandwidth.":[61],"Low":[62],"is":[64],"conventionally":[65],"achieved":[66],"either":[67],"use":[70,81],"geophones,":[72],"which":[73,85],"have":[74],"limited":[75],"bandwidth,":[77],"or":[78],"accelerometers,":[84],"dissipate":[86],"much":[87],"more":[88],"[1].":[90],"highlights":[92],"are":[97],"its":[98,121],"structure":[100],"with":[101],"isolated":[102],"detection":[103],"servo":[105],"capacitors,":[106],"reduction":[108],"digital":[111],"domain":[112],"based":[113],"on":[114],"awareness":[115],"unfamiliar":[117],"mechanisms":[119],"low-noise":[122],"high-voltage":[123],"(HV)":[124],"DACs.":[125]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}