{"id":"https://openalex.org/W1965112009","doi":"https://doi.org/10.1109/isscc.2012.6176973","title":"A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time","display_name":"A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time","publication_year":2012,"publication_date":"2012-02-01","ids":{"openalex":"https://openalex.org/W1965112009","doi":"https://doi.org/10.1109/isscc.2012.6176973","mag":"1965112009"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2012.6176973","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2012.6176973","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Solid-State Circuits Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102122092","display_name":"Sha Xia","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"Sha Xia","raw_affiliation_strings":["Delft University of Technology, Delft, Netherlands","Delft Univ. of Tech., Delft, The Netherlands#TAB#"],"affiliations":[{"raw_affiliation_string":"Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"Delft Univ. of Tech., Delft, The Netherlands#TAB#","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029302924","display_name":"Kofi A. A. Makinwa","orcid":"https://orcid.org/0000-0002-2992-5467"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Kofi Makinwa","raw_affiliation_strings":["Delft University of Technology, Delft, Netherlands","Delft Univ. of Tech., Delft, The Netherlands#TAB#"],"affiliations":[{"raw_affiliation_string":"Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"Delft Univ. of Tech., Delft, The Netherlands#TAB#","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085724634","display_name":"Stoyan Nihtianov","orcid":"https://orcid.org/0000-0001-9937-8510"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Stoyan Nihtianov","raw_affiliation_strings":["Delft University of Technology, Delft, Netherlands","Delft Univ. of Tech., Delft, The Netherlands#TAB#"],"affiliations":[{"raw_affiliation_string":"Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"Delft Univ. of Tech., Delft, The Netherlands#TAB#","institution_ids":["https://openalex.org/I98358874"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5102122092"],"corresponding_institution_ids":["https://openalex.org/I98358874"],"apc_list":null,"apc_paid":null,"fwci":5.1556,"has_fulltext":false,"cited_by_count":62,"citation_normalized_percentile":{"value":0.95638256,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"198","last_page":"200"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7559593915939331},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7436131834983826},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6351336240768433},{"id":"https://openalex.org/keywords/astronomical-interferometer","display_name":"Astronomical interferometer","score":0.5001578330993652},{"id":"https://openalex.org/keywords/mechatronics","display_name":"Mechatronics","score":0.4911472499370575},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.4849812984466553},{"id":"https://openalex.org/keywords/digital-control","display_name":"Digital control","score":0.4761466979980469},{"id":"https://openalex.org/keywords/position-sensor","display_name":"Position sensor","score":0.4598688781261444},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.4483986794948578},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4351177513599396},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4296020567417145},{"id":"https://openalex.org/keywords/strain-gauge","display_name":"Strain gauge","score":0.42266708612442017},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.4206300377845764},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.41361895203590393},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3978634774684906},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3682299852371216},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3348676562309265},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.2853778004646301},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.24142947793006897},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.22966411709785461},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22191104292869568},{"id":"https://openalex.org/keywords/angular-displacement","display_name":"Angular displacement","score":0.14033257961273193},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09674254059791565}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7559593915939331},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7436131834983826},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6351336240768433},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.5001578330993652},{"id":"https://openalex.org/C28704281","wikidata":"https://www.wikidata.org/wiki/Q180165","display_name":"Mechatronics","level":2,"score":0.4911472499370575},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.4849812984466553},{"id":"https://openalex.org/C158411068","wikidata":"https://www.wikidata.org/wiki/Q2720568","display_name":"Digital control","level":2,"score":0.4761466979980469},{"id":"https://openalex.org/C29258643","wikidata":"https://www.wikidata.org/wiki/Q2937669","display_name":"Position sensor","level":3,"score":0.4598688781261444},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.4483986794948578},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4351177513599396},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4296020567417145},{"id":"https://openalex.org/C60584519","wikidata":"https://www.wikidata.org/wiki/Q610723","display_name":"Strain gauge","level":2,"score":0.42266708612442017},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.4206300377845764},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.41361895203590393},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3978634774684906},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3682299852371216},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3348676562309265},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2853778004646301},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.24142947793006897},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.22966411709785461},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22191104292869568},{"id":"https://openalex.org/C108439606","wikidata":"https://www.wikidata.org/wiki/Q3305038","display_name":"Angular displacement","level":2,"score":0.14033257961273193},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09674254059791565},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2012.6176973","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2012.6176973","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Solid-State Circuits Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8899999856948853,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W6823614","https://openalex.org/W2086576364","https://openalex.org/W2134489758","https://openalex.org/W2147823186"],"related_works":["https://openalex.org/W2913189039","https://openalex.org/W1889691171","https://openalex.org/W613097443","https://openalex.org/W2888778368","https://openalex.org/W4236890452","https://openalex.org/W2484273923","https://openalex.org/W1991400806","https://openalex.org/W1717190054","https://openalex.org/W2065270905","https://openalex.org/W2170301447"],"abstract_inverted_index":{"In":[0],"precision":[1],"mechatronic":[2],"systems,":[3],"such":[4],"as":[5],"wafer":[6],"steppers,":[7],"the":[8,62,107],"position":[9],"of":[10,30],"critical":[11],"mechanical":[12,51],"components":[13],"must":[14,86],"be":[15,23,87,99],"dynamically":[16],"stabilized":[17],"with":[18,78],"sub-nanometer":[19],"precision.":[20],"This":[21,72],"can":[22],"achieved":[24],"by":[25],"a":[26,31,74],"servo":[27],"loop":[28],"consisting":[29],"displacement":[32,42],"sensor":[33],"and":[34,47],"an":[35],"actuator.":[36],"Compared":[37],"to":[38,57,91,102],"optical":[39],"interferometers,":[40],"capacitive":[41],"sensors":[43],"offer":[44],"smaller":[45],"size":[46],"lower":[48],"cost.":[49],"However,":[50],"tolerances":[52],"limit":[53],"their":[54],"electrode":[55],"spacing":[56],"about":[58],"10\u03bcm":[59],"[1],":[60],"while":[61],"targeted":[63],"resolution":[64],"is":[65],"below":[66],"100pm":[67],"rms":[70],".":[71],"requires":[73],"capacitance-to-digital":[75],"converter":[76],"(CDC)":[77],"more":[79],"than":[80],"17b":[81],"resolution.":[82],"Furthermore,":[83],"its":[84],"latency":[85],"low":[88],"enough":[89,101],"(20\u03bcs)":[90],"avoid":[92],"compromising":[93],"servo-loop":[94],"stability.":[95],"Lastly,":[96],"it":[97],"should":[98],"stable":[100],"maintain":[103],"measurement":[104],"accuracy":[105],"during":[106],"intervals":[108],"between":[109],"system":[110],"calibrations.":[111]},"counts_by_year":[{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":10},{"year":2016,"cited_by_count":6},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":13},{"year":2012,"cited_by_count":4}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}