{"id":"https://openalex.org/W4241743979","doi":"https://doi.org/10.1109/isscc.2012.6176972","title":"A ΔΣ interface for MEMS accelerometers using electrostatic spring-constant modulation for cancellation of bondwire capacitance drift","display_name":"A ΔΣ interface for MEMS accelerometers using electrostatic spring-constant modulation for cancellation of bondwire capacitance drift","publication_year":2012,"publication_date":"2012-02-01","ids":{"openalex":"https://openalex.org/W4241743979","doi":"https://doi.org/10.1109/isscc.2012.6176972"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2012.6176972","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2012.6176972","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Solid-State Circuits Conference","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5083361561","display_name":"Pedram Lajevardi","orcid":"https://orcid.org/0000-0002-0866-3031"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Pedram Lajevardi","raw_affiliation_strings":["Stanford University, Stanford, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000236830","display_name":"V. Petkov","orcid":"https://orcid.org/0000-0002-6237-6148"},"institutions":[{"id":"https://openalex.org/I4210120115","display_name":"Robert Bosch (United States)","ror":"https://ror.org/02venad53","country_code":"US","type":"company","lineage":["https://openalex.org/I4210120115","https://openalex.org/I889804353"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vladimir Petkov","raw_affiliation_strings":["Robert Bosch, Palo Alto, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Robert Bosch, Palo Alto, CA, USA","institution_ids":["https://openalex.org/I4210120115"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029806914","display_name":"Boris Murmann","orcid":"https://orcid.org/0000-0003-3417-8782"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Boris Murmann","raw_affiliation_strings":["Stanford University, Stanford, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4123,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.63532221,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"196","last_page":"198"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8922390937805176},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7110023498535156},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6315916180610657},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.6124783158302307},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5689482092857361},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5271391868591309},{"id":"https://openalex.org/keywords/input-offset-voltage","display_name":"Input offset voltage","score":0.5100188851356506},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.482852041721344},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.45604777336120605},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.39341118931770325},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3437553346157074},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.23297804594039917},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.19394630193710327},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16930967569351196},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.13919124007225037},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.09933516383171082}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8922390937805176},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7110023498535156},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6315916180610657},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.6124783158302307},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5689482092857361},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5271391868591309},{"id":"https://openalex.org/C63651839","wikidata":"https://www.wikidata.org/wiki/Q478566","display_name":"Input offset voltage","level":5,"score":0.5100188851356506},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.482852041721344},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.45604777336120605},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39341118931770325},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3437553346157074},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23297804594039917},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19394630193710327},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16930967569351196},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.13919124007225037},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.09933516383171082},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2012.6176972","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2012.6176972","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Solid-State Circuits Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8199999928474426,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1595396794","https://openalex.org/W2006594940","https://openalex.org/W2048305697","https://openalex.org/W2103198996"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152","https://openalex.org/W2502505565","https://openalex.org/W756886103","https://openalex.org/W2053577253","https://openalex.org/W2951387119"],"abstract_inverted_index":{"Precision":[0],"accelerometers":[1,49],"are":[2,19],"used":[3],"in":[4,91,97],"a":[5,41,98],"variety":[6],"of":[7,46,55,94,109],"automotive":[8],"applications,":[9],"navigation":[10],"systems,":[11],"and":[12,35,38,84],"low-level":[13],"vibration-monitoring":[14],"systems.":[15],"Currently,":[16],"these":[17],"sensors":[18],"factory-calibrated":[20],"to":[21,33,65,89,116],"null":[22],"their":[23],"input":[24],"offset.":[25],"However,":[26],"the":[27,43,53,95,106,110],"residual":[28],"offset":[29,44,86,108],"drifts":[30],"mainly":[31],"due":[32,88],"thermal":[34],"mechanical":[36],"stress":[37],"humidity.":[39],"As":[40],"result,":[42],"accuracy":[45],"high-end":[47],"MEMS":[48,100],"is":[50,63],"specified":[51],"on":[52],"order":[54],"\u00b1100mg.":[56],"With":[57],"continuously":[58,82],"increasing":[59],"precision":[60],"requirements,":[61],"it":[62],"desirable":[64],"develop":[66],"new":[67],"techniques":[68],"that":[69,81],"address":[70],"post-calibration":[71],"drift.":[72],"In":[73],"this":[74],"paper,":[75],"we":[76],"describe":[77],"an":[78],"accelerometer":[79],"interface":[80],"measures":[83],"cancels":[85],"drift":[87],"change":[90],"parasitic":[92],"capacitance":[93],"bondwires":[96],"system-in-package-type":[99],"accelerometer.":[101],"The":[102],"proposed":[103],"technique":[104],"reduces":[105],"bondwire":[107],"measured":[111],"prototypes":[112],"by":[113],"41dB":[114],"down":[115],"6.24mg.":[117]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}