{"id":"https://openalex.org/W2006594940","doi":"https://doi.org/10.1109/isscc.2010.5434066","title":"MEMS for automotive and consumer electronics","display_name":"MEMS for automotive and consumer electronics","publication_year":2010,"publication_date":"2010-02-01","ids":{"openalex":"https://openalex.org/W2006594940","doi":"https://doi.org/10.1109/isscc.2010.5434066","mag":"2006594940"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2010.5434066","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2010.5434066","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Solid-State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049467714","display_name":"J. Marek","orcid":"https://orcid.org/0000-0001-8239-9438"},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Jiri Marek","raw_affiliation_strings":["Robert Bosch, Reutlingen, Germany",", Robert Bosch, Reutlingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Robert Bosch, Reutlingen, Germany","institution_ids":["https://openalex.org/I889804353"]},{"raw_affiliation_string":", Robert Bosch, Reutlingen, Germany","institution_ids":["https://openalex.org/I889804353"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5049467714"],"corresponding_institution_ids":["https://openalex.org/I889804353"],"apc_list":null,"apc_paid":null,"fwci":4.4137,"has_fulltext":false,"cited_by_count":88,"citation_normalized_percentile":{"value":0.94494074,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":96,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"9","last_page":"17"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.9155337810516357},{"id":"https://openalex.org/keywords/automotive-industry","display_name":"Automotive industry","score":0.6287876963615417},{"id":"https://openalex.org/keywords/presentation","display_name":"Presentation (obstetrics)","score":0.6108550429344177},{"id":"https://openalex.org/keywords/electronics","display_name":"Electronics","score":0.6096151471138},{"id":"https://openalex.org/keywords/automotive-electronics","display_name":"Automotive electronics","score":0.5302711725234985},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4600697457790375},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.4525127708911896},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.45066678524017334},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.4123704731464386},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3759516477584839},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.37274664640426636},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3309573531150818},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3279261589050293},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.19379070401191711},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.15085485577583313},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.14301905035972595}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.9155337810516357},{"id":"https://openalex.org/C526921623","wikidata":"https://www.wikidata.org/wiki/Q190117","display_name":"Automotive industry","level":2,"score":0.6287876963615417},{"id":"https://openalex.org/C2777601897","wikidata":"https://www.wikidata.org/wiki/Q3409113","display_name":"Presentation (obstetrics)","level":2,"score":0.6108550429344177},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.6096151471138},{"id":"https://openalex.org/C2778520156","wikidata":"https://www.wikidata.org/wiki/Q449343","display_name":"Automotive electronics","level":3,"score":0.5302711725234985},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4600697457790375},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.4525127708911896},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.45066678524017334},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.4123704731464386},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3759516477584839},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.37274664640426636},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3309573531150818},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3279261589050293},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.19379070401191711},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.15085485577583313},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14301905035972595},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C126838900","wikidata":"https://www.wikidata.org/wiki/Q77604","display_name":"Radiology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2010.5434066","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2010.5434066","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Solid-State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8199999928474426}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1533630782","https://openalex.org/W1824802372","https://openalex.org/W1956160826","https://openalex.org/W1988650939","https://openalex.org/W2012660368","https://openalex.org/W2016676896","https://openalex.org/W2116537088","https://openalex.org/W2137178805","https://openalex.org/W2148935287","https://openalex.org/W2161136605","https://openalex.org/W6638705072","https://openalex.org/W6653564200"],"related_works":["https://openalex.org/W2758348730","https://openalex.org/W2132658806","https://openalex.org/W3210666397","https://openalex.org/W2350662357","https://openalex.org/W2972765784","https://openalex.org/W2160915513","https://openalex.org/W2378051443","https://openalex.org/W3036272329","https://openalex.org/W1995990341","https://openalex.org/W2990981562"],"abstract_inverted_index":{"This":[0,80],"presentation":[1,39,81],"provides":[2,40],"an":[3,60,84],"overview":[4],"of":[5,21,33,36,44,50],"current":[6],"MEMS":[7,22,45,89],"technology,":[8],"its":[9],"applications,":[10,90],"and":[11,18,71,95],"market":[12],"share.":[13],"MEMS-fabrication":[14],"processes":[15],"are":[16,28,57],"described,":[17,58],"the":[19,34,38,48,51,63,68,73],"challenges":[20],"compared":[23],"to":[24,67,72],"standard":[25],"IC":[26],"techniques":[27],"discussed.":[29],"After":[30],"a":[31,41],"description":[32],"evolution":[35],"MEMS,":[37],"short":[42],"survey":[43],"applications.":[46],"Then,":[47],"principles":[49],"newest":[52],"inertial":[53],"sensors":[54],"for":[55,76],"ESP-systems":[56],"with":[59,83],"emphasis":[61],"on":[62,86],"design":[64],"concepts":[65],"pertaining":[66],"sensing":[69],"element,":[70],"evaluation":[74],"circuits,":[75],"achieving":[77],"excellent":[78],"performance.":[79],"concludes":[82],"outlook":[85],"arising":[87],"new":[88],"such":[91],"as":[92],"energy":[93],"harvesters":[94],"micro-fuel":[96],"cells.":[97]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":9},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":8},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":10},{"year":2014,"cited_by_count":5},{"year":2013,"cited_by_count":6},{"year":2012,"cited_by_count":6}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2025-10-10T00:00:00"}