{"id":"https://openalex.org/W2086094305","doi":"https://doi.org/10.1109/isscc.2010.5434010","title":"Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications","display_name":"Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications","publication_year":2010,"publication_date":"2010-02-01","ids":{"openalex":"https://openalex.org/W2086094305","doi":"https://doi.org/10.1109/isscc.2010.5434010","mag":"2086094305"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2010.5434010","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2010.5434010","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Solid-State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/1721.1/60377","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045316705","display_name":"Fred K. Chen","orcid":"https://orcid.org/0000-0003-2809-9930"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Fred Chen","raw_affiliation_strings":["Massachusetts Institute of Technology, Cambridge, MA","Massachusetts Institute of Technology, Cambridge , USA#TAB#"],"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge, MA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge , USA#TAB#","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042269366","display_name":"Matthew Spencer","orcid":"https://orcid.org/0000-0002-5947-5276"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Matthew Spencer","raw_affiliation_strings":["University of California Berkeley, Berkeley, CA, US","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California Berkeley, Berkeley, CA, US","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006014877","display_name":"Rhesa Nathanael","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rhesa Nathanael","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100389595","display_name":"Chengcheng Wang","orcid":"https://orcid.org/0000-0002-2516-7259"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chengcheng Wang","raw_affiliation_strings":["University of California, Los Angeles, CA","University of California\u2013Los Angeles USA"],"affiliations":[{"raw_affiliation_string":"University of California, Los Angeles, CA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"University of California\u2013Los Angeles USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004091989","display_name":"Hossein Fariborzi","orcid":"https://orcid.org/0000-0002-7828-0239"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hossein Fariborzi","raw_affiliation_strings":["Massachusetts Institute of Technology, Cambridge, MA","Massachusetts Institute of Technology, Cambridge , USA#TAB#"],"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge, MA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge , USA#TAB#","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101420501","display_name":"Abhinav Gupta","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Abhinav Gupta","raw_affiliation_strings":["University of California Berkeley, Berkeley, CA, US","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California Berkeley, Berkeley, CA, US","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111633220","display_name":"Hei Kam","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hei Kam","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004001506","display_name":"V. Pott","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vincent Pott","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101467115","display_name":"Jaeseok Jeon","orcid":"https://orcid.org/0000-0001-8266-1408"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jaeseok Jeon","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039334041","display_name":"Tsu\u2010Jae King Liu","orcid":"https://orcid.org/0000-0002-1221-2540"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tsu-Jae King Liu","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003700236","display_name":"Dejan Markovi\u0107","orcid":"https://orcid.org/0000-0002-6744-7531"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dejan Markovic","raw_affiliation_strings":["University of California, Los Angeles, CA","University of California\u2013Los Angeles USA"],"affiliations":[{"raw_affiliation_string":"University of California, Los Angeles, CA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"University of California\u2013Los Angeles USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025438151","display_name":"Vladimir Stojanovi\u0107","orcid":"https://orcid.org/0000-0001-7233-6863"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vladimir Stojanovic","raw_affiliation_strings":["Massachusetts Institute of Technology, Cambridge, MA","Massachusetts Institute of Technology, Cambridge , USA#TAB#"],"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge, MA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge , USA#TAB#","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110516457","display_name":"Elad Alon","orcid":null},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Elad Alon","raw_affiliation_strings":["University of California, Berkeley, CA","University of California\u2010Berkeley USA"],"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, CA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"University of California\u2010Berkeley USA","institution_ids":["https://openalex.org/I95457486"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":13,"corresponding_author_ids":["https://openalex.org/A5045316705"],"corresponding_institution_ids":["https://openalex.org/I63966007"],"apc_list":null,"apc_paid":null,"fwci":12.0582,"has_fulltext":false,"cited_by_count":70,"citation_normalized_percentile":{"value":0.98854125,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"150","last_page":"151"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.6384587287902832},{"id":"https://openalex.org/keywords/dram","display_name":"Dram","score":0.6246996521949768},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5584238767623901},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.5411372184753418},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.493477463722229},{"id":"https://openalex.org/keywords/inverter","display_name":"Inverter","score":0.48809659481048584},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4793477952480316},{"id":"https://openalex.org/keywords/block","display_name":"Block (permutation group theory)","score":0.46331787109375},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.42075368762016296},{"id":"https://openalex.org/keywords/logic-family","display_name":"Logic family","score":0.4174359142780304},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.36238351464271545},{"id":"https://openalex.org/keywords/logic-synthesis","display_name":"Logic synthesis","score":0.3500990867614746},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.2882884442806244},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.26269441843032837},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2533422112464905},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.19422778487205505}],"concepts":[{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.6384587287902832},{"id":"https://openalex.org/C7366592","wikidata":"https://www.wikidata.org/wiki/Q1255620","display_name":"Dram","level":2,"score":0.6246996521949768},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5584238767623901},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5411372184753418},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.493477463722229},{"id":"https://openalex.org/C11190779","wikidata":"https://www.wikidata.org/wiki/Q664575","display_name":"Inverter","level":3,"score":0.48809659481048584},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4793477952480316},{"id":"https://openalex.org/C2777210771","wikidata":"https://www.wikidata.org/wiki/Q4927124","display_name":"Block (permutation group theory)","level":2,"score":0.46331787109375},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.42075368762016296},{"id":"https://openalex.org/C162454741","wikidata":"https://www.wikidata.org/wiki/Q173359","display_name":"Logic family","level":4,"score":0.4174359142780304},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36238351464271545},{"id":"https://openalex.org/C157922185","wikidata":"https://www.wikidata.org/wiki/Q173198","display_name":"Logic synthesis","level":3,"score":0.3500990867614746},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.2882884442806244},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.26269441843032837},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2533422112464905},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.19422778487205505},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1109/isscc.2010.5434010","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2010.5434010","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Solid-State Circuits Conference - (ISSCC)","raw_type":"proceedings-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.460.2411","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.460.2411","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://cseweb.ucsd.edu/classes/fa11/cse291-a/docs/NEMS_JSSC2011.pdf","raw_type":"text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.590.6239","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.590.6239","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.rle.mit.edu/isg/documents/Chen_ISSCC10.pdf","raw_type":"text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.727.7107","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.727.7107","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://eecs.berkeley.edu/%7Emespence/pubs_pdf/05434010.pdf","raw_type":"text"},{"id":"pmh:oai:dspace.mit.edu:1721.1/60377","is_oa":true,"landing_page_url":"http://hdl.handle.net/1721.1/60377","pdf_url":null,"source":{"id":"https://openalex.org/S4306400425","display_name":"DSpace@MIT (Massachusetts Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I63966007","host_organization_name":"Massachusetts Institute of Technology","host_organization_lineage":["https://openalex.org/I63966007"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"MIT web domain","raw_type":"http://purl.org/eprint/type/ConferencePaper"}],"best_oa_location":{"id":"pmh:oai:dspace.mit.edu:1721.1/60377","is_oa":true,"landing_page_url":"http://hdl.handle.net/1721.1/60377","pdf_url":null,"source":{"id":"https://openalex.org/S4306400425","display_name":"DSpace@MIT (Massachusetts Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I63966007","host_organization_name":"Massachusetts Institute of Technology","host_organization_lineage":["https://openalex.org/I63966007"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc","license_id":"https://openalex.org/licenses/cc-by-nc","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"MIT web domain","raw_type":"http://purl.org/eprint/type/ConferencePaper"},"sustainable_development_goals":[{"score":0.6700000166893005,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G3873807955","display_name":null,"funder_award_id":"403427","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G6074669310","display_name":"UC Berkeley Wireless Research Infrastructure Program","funder_award_id":"0403427","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320332180","display_name":"Defense Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1967171495","https://openalex.org/W1991137688","https://openalex.org/W1992924449","https://openalex.org/W2009608485","https://openalex.org/W2120241750","https://openalex.org/W2137370202","https://openalex.org/W4239175426","https://openalex.org/W6648599645"],"related_works":["https://openalex.org/W1966764473","https://openalex.org/W2082788688","https://openalex.org/W1488117239","https://openalex.org/W1553855433","https://openalex.org/W2051956260","https://openalex.org/W2016936938","https://openalex.org/W2304188393","https://openalex.org/W3129977055","https://openalex.org/W2066280488","https://openalex.org/W2098419840"],"abstract_inverted_index":{"A":[0],"testchip":[1],"demonstrates":[2],"monolithic":[3],"integration":[4],"of":[5],"micro-electro-mechanical":[6],"(MEM)":[7],"switch":[8],"circuit":[9],"building":[10],"blocks":[11],"for":[12,23],"logic,":[13],"timing,":[14],"I/O":[15],"and":[16,32],"memory":[17],"functions.":[18],"Experimental":[19],"results":[20],"show":[21],"functionality":[22],"an":[24],"inverter,":[25],"XOR,":[26],"carry-generation":[27],"block,":[28],"oscillator,":[29],"DAC,":[30],"latch,":[31],"10-cell":[33],"DRAM.":[34]},"counts_by_year":[{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":5},{"year":2014,"cited_by_count":13},{"year":2013,"cited_by_count":6},{"year":2012,"cited_by_count":11}],"updated_date":"2026-04-10T15:06:20.359241","created_date":"2025-10-10T00:00:00"}