{"id":"https://openalex.org/W2105539907","doi":"https://doi.org/10.1109/isscc.2006.1696157","title":"A Self-Resonant MEMS-based Electrostatic Field Sensor with 4V/m/Hz Sensitivity","display_name":"A Self-Resonant MEMS-based Electrostatic Field Sensor with 4V/m/Hz Sensitivity","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W2105539907","doi":"https://doi.org/10.1109/isscc.2006.1696157","mag":"2105539907"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2006.1696157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2006.1696157","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031652451","display_name":"Timothy Denison","orcid":"https://orcid.org/0000-0002-5404-4004"},"institutions":[{"id":"https://openalex.org/I117023288","display_name":"Analog Devices (United States)","ror":"https://ror.org/01545pm61","country_code":"US","type":"company","lineage":["https://openalex.org/I117023288"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Denison","raw_affiliation_strings":["Analog Devices, Cambridge, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Analog Devices, Cambridge, MA","institution_ids":["https://openalex.org/I117023288"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113553768","display_name":"Jinbo Kuang","orcid":null},"institutions":[{"id":"https://openalex.org/I117023288","display_name":"Analog Devices (United States)","ror":"https://ror.org/01545pm61","country_code":"US","type":"company","lineage":["https://openalex.org/I117023288"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jinbo Kuang","raw_affiliation_strings":["Analog Devices, Cambridge, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Analog Devices, Cambridge, MA","institution_ids":["https://openalex.org/I117023288"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040155113","display_name":"J.S. Shafran","orcid":null},"institutions":[{"id":"https://openalex.org/I117023288","display_name":"Analog Devices (United States)","ror":"https://ror.org/01545pm61","country_code":"US","type":"company","lineage":["https://openalex.org/I117023288"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Shafran","raw_affiliation_strings":["Analog Devices, Cambridge, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Analog Devices, Cambridge, MA","institution_ids":["https://openalex.org/I117023288"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084755143","display_name":"Michael W. Judy","orcid":null},"institutions":[{"id":"https://openalex.org/I117023288","display_name":"Analog Devices (United States)","ror":"https://ror.org/01545pm61","country_code":"US","type":"company","lineage":["https://openalex.org/I117023288"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Judy","raw_affiliation_strings":["Analog Devices, Cambridge, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Analog Devices, Cambridge, MA","institution_ids":["https://openalex.org/I117023288"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108361790","display_name":"K.H. Lundberg","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Lundberg","raw_affiliation_strings":["Keeling Flight Hardware, Weston, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Keeling Flight Hardware, Weston, MA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5679,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.80932683,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1121","last_page":"1130"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12452","display_name":"Electrowetting and Microfluidic Technologies","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12452","display_name":"Electrowetting and Microfluidic Technologies","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":0.995199978351593,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9905999898910522,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8714555501937866},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5983039140701294},{"id":"https://openalex.org/keywords/electric-field","display_name":"Electric field","score":0.5307295918464661},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.49191737174987793},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4416365623474121},{"id":"https://openalex.org/keywords/electronics","display_name":"Electronics","score":0.4353521764278412},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.43171826004981995},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4267823100090027},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35481196641921997},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33410555124282837},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30221933126449585},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2615889310836792},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1699250042438507},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.07511159777641296}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8714555501937866},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5983039140701294},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.5307295918464661},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.49191737174987793},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4416365623474121},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.4353521764278412},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.43171826004981995},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4267823100090027},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35481196641921997},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33410555124282837},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30221933126449585},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2615889310836792},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1699250042438507},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.07511159777641296},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2006.1696157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2006.1696157","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6899999976158142}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2138041246","https://openalex.org/W2147506254","https://openalex.org/W2171726171","https://openalex.org/W6681872421"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W2391127530","https://openalex.org/W2393343784","https://openalex.org/W2045074154","https://openalex.org/W1974353171","https://openalex.org/W2382708890","https://openalex.org/W3041936564","https://openalex.org/W2362645459","https://openalex.org/W4235327049"],"abstract_inverted_index":{"An":[0],"electric-field":[1],"sensor":[2,11],"is":[3,30,35],"presented":[4],"for":[5],"applications":[6],"such":[7],"as":[8],"xerography.":[9],"The":[10],"architecture":[12],"combines":[13],"a":[14,24,38],"vibrating":[15],"MEMS":[16,25,47],"structure":[17],"with":[18],"synchronous":[19],"detection-based":[20],"electronics.":[21],"Prototyped":[22],"in":[23],"process,":[26],"the":[27,33],"noise":[28],"floor":[29],"4.0V/m/radicHz":[31],"and":[32],"INL":[34],"20V/m":[36],"over":[37,45],"range":[39],"of":[40],"+/-700kV/m,":[41],"an":[42],"order-of-magnitude":[43],"improvement":[44],"existing":[46],"devices":[48]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}