{"id":"https://openalex.org/W2565820172","doi":"https://doi.org/10.1109/isocc.2016.7799719","title":"Monolithic MEMS resonator based pressure sensor and readout design","display_name":"Monolithic MEMS resonator based pressure sensor and readout design","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2565820172","doi":"https://doi.org/10.1109/isocc.2016.7799719","mag":"2565820172"},"language":"en","primary_location":{"id":"doi:10.1109/isocc.2016.7799719","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isocc.2016.7799719","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 International SoC Design Conference (ISOCC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5078431527","display_name":"Po-Chun Chuang","orcid":"https://orcid.org/0000-0001-9321-4160"},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Po-Chun Chuang","raw_affiliation_strings":["Department of Electronic Engineering, National Chiao Tung University, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, National Chiao Tung University, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111983056","display_name":"Kuei-Ann Wen","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuei-Ann Wen","raw_affiliation_strings":["Department of Electronic Engineering, National Chiao Tung University, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, National Chiao Tung University, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5078431527"],"corresponding_institution_ids":["https://openalex.org/I148366613"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.14721559,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"17","last_page":"18"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11417","display_name":"Advancements in PLL and VCO Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11417","display_name":"Advancements in PLL and VCO Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.9083044528961182},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.7022076845169067},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.6694297790527344},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6662237048149109},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.6332133412361145},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5952147841453552},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5706526637077332},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4943525791168213},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.4783339500427246},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4767155051231384},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.46026188135147095},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.35820090770721436},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23990243673324585},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21058538556098938},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.1698349118232727},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.08338132500648499}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.9083044528961182},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.7022076845169067},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.6694297790527344},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6662237048149109},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.6332133412361145},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5952147841453552},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5706526637077332},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4943525791168213},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.4783339500427246},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4767155051231384},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.46026188135147095},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.35820090770721436},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23990243673324585},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21058538556098938},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.1698349118232727},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.08338132500648499},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isocc.2016.7799719","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isocc.2016.7799719","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 International SoC Design Conference (ISOCC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.9100000262260437,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2048153402","https://openalex.org/W2060978348","https://openalex.org/W2117669248","https://openalex.org/W2123580065","https://openalex.org/W2290021559","https://openalex.org/W2326843947"],"related_works":["https://openalex.org/W2587892165","https://openalex.org/W2537716684","https://openalex.org/W2152087047","https://openalex.org/W2766999340","https://openalex.org/W2028268967","https://openalex.org/W2054124615","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4245281580"],"abstract_inverted_index":{"A":[0],"monolithic":[1],"MEMS":[2],"resonator":[3,36],"based":[4],"pressure":[5,61],"sensor":[6],"and":[7,29,38,85,104],"monolithically":[8],"integrated":[9],"with":[10,78,99],"TIA":[11],"(trans-impedance":[12],"amplifier)":[13],"readout":[14,48,87],"circuitry":[15,49],"has":[16],"been":[17],"fabricated":[18],"in":[19,81],"standard":[20],"1p6m":[21],"AISC":[22],"process.":[23],"Dependence":[24],"of":[25],"the":[26,56,59,69,86],"quality":[27,46],"factor":[28,47,71],"ambient":[30,52],"pressures":[31],"are":[32],"well":[33],"known":[34],"to":[35,43,50,66,76],"designers":[37],"it":[39],"will":[40,72],"be":[41],"feasible":[42],"integrate":[44],"a":[45],"detect":[51],"pressure.":[53],"By":[54],"measuring":[55],"sample":[57],"resonator,":[58],"air":[60],"changes":[62],"from":[63,74],"100":[64],"Pa":[65],"1600":[67],"Pa,":[68],"Q":[70],"change":[73],"2566":[75],"452":[77],"resonant":[79],"frequency":[80],"15.4":[82],"k":[83],"Hz":[84],"circuit":[88],"is":[89,96,106],"designed":[90],"accordingly.":[91],"The":[92],"system":[93],"power":[94,102],"consumption":[95],"332.82":[97],"\u03bcW":[98],"1.8":[100],"V":[101],"supply":[103],"sensitivity":[105],"0.0203":[107],"mV":[108],"per":[109],"Q.":[110]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}