{"id":"https://openalex.org/W2064397267","doi":"https://doi.org/10.1109/isocc.2012.6407119","title":"CMOS-MEMS capacitive sensors for intra-cranial pressure monitoring: Sensor fabrication & system design","display_name":"CMOS-MEMS capacitive sensors for intra-cranial pressure monitoring: Sensor fabrication & system design","publication_year":2012,"publication_date":"2012-11-01","ids":{"openalex":"https://openalex.org/W2064397267","doi":"https://doi.org/10.1109/isocc.2012.6407119","mag":"2064397267"},"language":"en","primary_location":{"id":"doi:10.1109/isocc.2012.6407119","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isocc.2012.6407119","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 International SoC Design Conference (ISOCC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032470719","display_name":"Arup K. George","orcid":"https://orcid.org/0000-0002-5851-7999"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Arup K George","raw_affiliation_strings":["Nanyang Technological University, School of Electrical & Electronic Engineering, Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanyang Technological University, School of Electrical & Electronic Engineering, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110083199","display_name":"Wai Pan Chan","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wai Pan Chan","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030824927","display_name":"Margarita Narducci","orcid":"https://orcid.org/0000-0002-2639-8745"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Margarita Sofia Narducci","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102243210","display_name":"Zhi Hui Kong","orcid":"https://orcid.org/0009-0004-4522-796X"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Zhi Hui Kong","raw_affiliation_strings":["Nanyang Technological University, School of Electrical & Electronic Engineering, Singapore","Nanyang Technological University, School of Electrical and Electronic Engineering, SINGAPORE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanyang Technological University, School of Electrical & Electronic Engineering, Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"Nanyang Technological University, School of Electrical and Electronic Engineering, SINGAPORE","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023245534","display_name":"Minkyu Je","orcid":"https://orcid.org/0000-0003-4580-2771"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Minkyu Je","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), 11 Science Park Road, Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"39","issue":null,"first_page":"375","last_page":"378"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7679455280303955},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7564796805381775},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.7301628589630127},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6290164589881897},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.5095093846321106},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.47889938950538635},{"id":"https://openalex.org/keywords/interface","display_name":"Interface (matter)","score":0.4696739614009857},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.41457685828208923},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.39491039514541626},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33034801483154297},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31521761417388916},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30142050981521606},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.21071618795394897},{"id":"https://openalex.org/keywords/medicine","display_name":"Medicine","score":0.13044670224189758},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.09343281388282776}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7679455280303955},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7564796805381775},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7301628589630127},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6290164589881897},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.5095093846321106},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.47889938950538635},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.4696739614009857},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.41457685828208923},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.39491039514541626},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33034801483154297},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31521761417388916},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30142050981521606},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21071618795394897},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.13044670224189758},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.09343281388282776},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C196806460","wikidata":"https://www.wikidata.org/wiki/Q188603","display_name":"Capillary action","level":2,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C28413391","wikidata":"https://www.wikidata.org/wiki/Q785542","display_name":"Capillary number","level":3,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/isocc.2012.6407119","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isocc.2012.6407119","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 International SoC Design Conference (ISOCC)","raw_type":"proceedings-article"},{"id":"pmh:oai:dr.ntu.edu.sg:10356/100181","is_oa":false,"landing_page_url":"https://hdl.handle.net/10356/100181","pdf_url":null,"source":{"id":"https://openalex.org/S4306402609","display_name":"DR-NTU (Nanyang Technological University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I172675005","host_organization_name":"Nanyang Technological University","host_organization_lineage":["https://openalex.org/I172675005"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5699999928474426,"id":"https://metadata.un.org/sdg/3","display_name":"Good health and well-being"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2029099889","https://openalex.org/W2031424373","https://openalex.org/W2034907932","https://openalex.org/W2045663952","https://openalex.org/W2059158233","https://openalex.org/W2091584499","https://openalex.org/W2096987478","https://openalex.org/W2112611349","https://openalex.org/W2145688721","https://openalex.org/W2153484902","https://openalex.org/W2169258629","https://openalex.org/W3145084707"],"related_works":["https://openalex.org/W2053577253","https://openalex.org/W1965493748","https://openalex.org/W3015749751","https://openalex.org/W4387713458","https://openalex.org/W2372430764","https://openalex.org/W4311325650","https://openalex.org/W2980663142","https://openalex.org/W4226072595","https://openalex.org/W1979670679","https://openalex.org/W769946470"],"abstract_inverted_index":{"Low-frequency":[0],"variation":[1],"of":[2,14,54,72,106,123],"intracranial":[3],"pressure":[4],"(ICP)":[5],"is":[6],"a":[7,15,44],"key":[8],"indicator":[9],"determining":[10],"the":[11,50,73,86,96,107,120,124],"successful":[12],"outcome":[13],"patient,":[16],"subjected":[17,65],"to":[18,28,66,95],"traumatic":[19],"brain":[20],"injury":[21],"(TBI).":[22],"Post-trauma":[23],"ICP":[24,35,62],"increase":[25],"can":[26],"lead":[27],"fatal":[29],"secondary":[30],"injuries":[31],"and":[32,69,91,104,111],"hence":[33],"continuous":[34],"monitoring":[36,61],"would":[37],"be":[38],"an":[39,55],"essential":[40],"modality":[41],"required":[42],"in":[43,63],"neuro-monitoring":[45],"system.":[46],"This":[47],"paper":[48,117],"discusses":[49],"system":[51,59,125],"design":[52,82],"considerations":[53],"integrated":[56],"CMOS-MEMS":[57,75],"sensor":[58,76],"for":[60,126],"patients":[64],"TBI.":[67],"Design":[68],"fabrication":[70,97],"steps":[71],"on-chip":[74],"are":[77,99],"presented":[78],"first.":[79],"Interface":[80],"circuit":[81],"challenges":[83],"introduced":[84],"by":[85],"low,":[87],"not-well-controlled":[88],"MEMS":[89],"sensitivity":[90],"large":[92],"offset":[93],"due":[94],"tolerance":[98],"discussed":[100],"next.":[101],"A":[102],"review":[103],"comparison":[105],"reported":[108],"capacitive":[109],"sensors":[110],"their":[112],"interface":[113],"circuits":[114],"follows.":[115],"The":[116],"concludes":[118],"discussing":[119],"biocompatible":[121],"packaging":[122],"in-vivo":[127],"testing.":[128]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2016-06-24T00:00:00"}