{"id":"https://openalex.org/W4386859296","doi":"https://doi.org/10.1109/islped58423.2023.10244504","title":"A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node","display_name":"A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node","publication_year":2023,"publication_date":"2023-08-07","ids":{"openalex":"https://openalex.org/W4386859296","doi":"https://doi.org/10.1109/islped58423.2023.10244504"},"language":"en","primary_location":{"id":"doi:10.1109/islped58423.2023.10244504","is_oa":false,"landing_page_url":"https://doi.org/10.1109/islped58423.2023.10244504","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ACM International Symposium on Low Power Electronics and Design (ISLPED)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088074078","display_name":"Sandra Maria Shaji","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Sandra Maria Shaji","raw_affiliation_strings":["School of ECE, Georgia Institute of Technology,Atlanta,GA","School of ECE, Georgia Institute of Technology, Atlanta, GA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology,Atlanta,GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007481878","display_name":"Lingjun Zhu","orcid":"https://orcid.org/0000-0003-1520-0796"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lingjun Zhu","raw_affiliation_strings":["School of ECE, Georgia Institute of Technology,Atlanta,GA","School of ECE, Georgia Institute of Technology, Atlanta, GA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology,Atlanta,GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051115409","display_name":"Jun-Sik Yoon","orcid":"https://orcid.org/0000-0002-3132-4556"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Junsik Yoon","raw_affiliation_strings":["School of ECE, Georgia Institute of Technology,Atlanta,GA","School of ECE, Georgia Institute of Technology, Atlanta, GA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology,Atlanta,GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052950521","display_name":"Sung Kyu Lim","orcid":"https://orcid.org/0000-0002-2267-5282"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sung Kyu Lim","raw_affiliation_strings":["School of ECE, Georgia Institute of Technology,Atlanta,GA","School of ECE, Georgia Institute of Technology, Atlanta, GA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology,Atlanta,GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of ECE, Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5088074078"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":1.389,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.81398742,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/floorplan","display_name":"Floorplan","score":0.5711245536804199},{"id":"https://openalex.org/keywords/power-network-design","display_name":"Power network design","score":0.533292293548584},{"id":"https://openalex.org/keywords/network-topology","display_name":"Network topology","score":0.5184563994407654},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.491489052772522},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4705624580383301},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4652230441570282},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.443278431892395},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.4336188733577728},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3367130756378174},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3016529083251953},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.1843789517879486},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1585586965084076}],"concepts":[{"id":"https://openalex.org/C130145326","wikidata":"https://www.wikidata.org/wiki/Q1553985","display_name":"Floorplan","level":2,"score":0.5711245536804199},{"id":"https://openalex.org/C164565468","wikidata":"https://www.wikidata.org/wiki/Q7236535","display_name":"Power network design","level":3,"score":0.533292293548584},{"id":"https://openalex.org/C199845137","wikidata":"https://www.wikidata.org/wiki/Q145490","display_name":"Network topology","level":2,"score":0.5184563994407654},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.491489052772522},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4705624580383301},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4652230441570282},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.443278431892395},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.4336188733577728},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3367130756378174},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3016529083251953},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.1843789517879486},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1585586965084076},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/islped58423.2023.10244504","is_oa":false,"landing_page_url":"https://doi.org/10.1109/islped58423.2023.10244504","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ACM International Symposium on Low Power Electronics and Design (ISLPED)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6000000238418579}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W2346205343","https://openalex.org/W2346894659","https://openalex.org/W2913404074","https://openalex.org/W2925222426","https://openalex.org/W2975115906","https://openalex.org/W2980575933","https://openalex.org/W3006619829","https://openalex.org/W3087971227","https://openalex.org/W3102668149","https://openalex.org/W3157048572","https://openalex.org/W4206244553"],"related_works":["https://openalex.org/W1985714852","https://openalex.org/W2133492470","https://openalex.org/W2132360363","https://openalex.org/W2058300351","https://openalex.org/W2032696583","https://openalex.org/W1549679664","https://openalex.org/W2043725682","https://openalex.org/W1870281100","https://openalex.org/W2533935199","https://openalex.org/W4212954045"],"abstract_inverted_index":{"The":[0],"standard":[1,44,77,127],"cells":[2],"are":[3],"becoming":[4],"increasingly":[5],"smaller":[6],"due":[7],"to":[8,38,41,57,157],"aggressive":[9],"device":[10,104],"down-scaling,":[11],"and":[12,28,59,79,89,101,109,122,130,137,159,184],"power":[13,71,118,132],"rails":[14],"take":[15],"up":[16],"a":[17,67],"sizable":[18],"portion":[19],"of":[20,70,86,116,119,134],"the":[21,43,50,75,126,141,146,172],"available":[22],"space.":[23],"Buried":[24],"Power":[25,30,54,174],"Rail":[26,55],"(BPR)":[27],"Back-Side":[29],"(BSP)":[31],"have":[32],"been":[33],"gaining":[34],"more":[35],"attention":[36],"owing":[37],"their":[39],"capacity":[40],"reduce":[42],"cell":[45,128],"height":[46],"from":[47],"6-Track":[48],"in":[49,84,113,179],"traditional":[51],"Front":[52],"Side":[53],"(FS-PR)":[56],"5-Track":[58],"4-Track,":[60],"respectively.":[61],"In":[62],"this":[63],"paper,":[64],"we":[65],"provide":[66],"comprehensive":[68],"comparison":[69],"rail":[72],"topologies":[73],"at":[74,125,140],"device,":[76],"cell,":[78],"full":[80,142],"chip":[81,143],"design":[82],"level":[83],"terms":[85],"Power,":[87],"Performance":[88],"Area":[90],"(PPA).":[91],"Our":[92],"experiments":[93],"show":[94],"that":[95],"nanosheet":[96],"width":[97],"scaling":[98],"for":[99,182],"BPR":[100,155,183],"BSP":[102,185],"reduces":[103],"gate":[105],"capacitance":[106],"by":[107,152,162],"26%":[108],"40%,":[110,123],"respectively,":[111,124,139],"resulting":[112],"an":[114,163],"improvement":[115],"internal":[117],"over":[120,135],"33%":[121],"level,":[129],"total":[131],"drop":[133,181],"24%":[136],"30%,":[138],"level.":[144],"Additionally,":[145],"floorplan":[147],"can":[148],"be":[149],"shrunk":[150],"down":[151],"7%":[153],"with":[154,166],"compared":[156],"FSPR,":[158],"even":[160],"further":[161],"additional":[164],"17%":[165],"BSP.":[167],"This":[168],"study":[169],"also":[170],"demonstrates":[171],"Back-side":[173],"delivery":[175],"network":[176],"(BS-PDN)":[177],"benefits":[178],"IR":[180],"topologies.":[186]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":2}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2025-10-10T00:00:00"}