{"id":"https://openalex.org/W2016306717","doi":"https://doi.org/10.1109/isicir.2014.7029484","title":"ASIC front-end for sensing MEMS-mirror position","display_name":"ASIC front-end for sensing MEMS-mirror position","publication_year":2014,"publication_date":"2014-12-01","ids":{"openalex":"https://openalex.org/W2016306717","doi":"https://doi.org/10.1109/isicir.2014.7029484","mag":"2016306717"},"language":"en","primary_location":{"id":"doi:10.1109/isicir.2014.7029484","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isicir.2014.7029484","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 International Symposium on Integrated Circuits (ISIC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084383826","display_name":"Leo John Chemmanda","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"Leo John Chemmanda","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085332316","display_name":"Colin Chue Jianrong","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Colin Chue Jianrong","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020000927","display_name":"Ravinder Pal Singh","orcid":"https://orcid.org/0000-0003-0563-6481"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Ravinder Pal Singh","raw_affiliation_strings":["Maradin Ltd, Israel","Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685"],"affiliations":[{"raw_affiliation_string":"Maradin Ltd, Israel","institution_ids":[]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science, Technology, and Research), Singapore 117685","institution_ids":["https://openalex.org/I115228651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066587486","display_name":"Yalon Roterman","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yalon Roterman","raw_affiliation_strings":["Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","Maradin Ltd. Israel 20692"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR (Agency for Science Technology and Research), Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Maradin Ltd. Israel 20692","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5084383826"],"corresponding_institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.07485271,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"396","last_page":"399"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7922817468643188},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7113710045814514},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5872911810874939},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5495877265930176},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.4964905381202698},{"id":"https://openalex.org/keywords/application-specific-integrated-circuit","display_name":"Application-specific integrated circuit","score":0.4883536994457245},{"id":"https://openalex.org/keywords/position-sensor","display_name":"Position sensor","score":0.42043691873550415},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.40502282977104187},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36473822593688965},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3256657123565674},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2864869236946106},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22978204488754272},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.18026810884475708},{"id":"https://openalex.org/keywords/rotor","display_name":"Rotor (electric)","score":0.10099348425865173}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7922817468643188},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7113710045814514},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5872911810874939},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5495877265930176},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.4964905381202698},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.4883536994457245},{"id":"https://openalex.org/C29258643","wikidata":"https://www.wikidata.org/wiki/Q2937669","display_name":"Position sensor","level":3,"score":0.42043691873550415},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.40502282977104187},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36473822593688965},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3256657123565674},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2864869236946106},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22978204488754272},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.18026810884475708},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.10099348425865173},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isicir.2014.7029484","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isicir.2014.7029484","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 International Symposium on Integrated Circuits (ISIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2085146192","https://openalex.org/W2103198996","https://openalex.org/W2107983594","https://openalex.org/W2146719344","https://openalex.org/W2148493030","https://openalex.org/W2151770745","https://openalex.org/W2154375071","https://openalex.org/W2160177455"],"related_works":["https://openalex.org/W2922271745","https://openalex.org/W4232743211","https://openalex.org/W2978594305","https://openalex.org/W2310543875","https://openalex.org/W2127116786","https://openalex.org/W2024175055","https://openalex.org/W2053577253","https://openalex.org/W4200211466","https://openalex.org/W2900480837","https://openalex.org/W756886103"],"abstract_inverted_index":{"Capacitive":[0],"sensing":[1,125],"circuit":[2],"for":[3,59,69,108,126],"MEMS":[4,96],"mirror":[5,38,47],"based":[6],"pico-projector":[7],"scanning":[8],"system":[9],"is":[10,49,57,67,101,113],"realized":[11],"in":[12,40,94],"this":[13],"work.":[14],"Two":[15],"dimensional":[16],"(2D)":[17],"movements":[18,39],"of":[19],"the":[20,37,60,70,78,82,85,95,105,117],"MEMS-mirror":[21],"produce":[22],"capacitive":[23],"variations":[24],"\u0394Cx":[25],"and":[26,31,35,64,88,123,128],"\u0394Cy.":[27],"These":[28],"are":[29,131],"sensed":[30],"used":[32,58,68,114],"to":[33,103,115],"monitor":[34],"control":[36],"a":[41],"closed":[42],"feedback":[43],"loop.":[44],"The":[45,74,98],"2D":[46],"movement":[48,62,72],"produced":[50],"using":[51],"dual-actuation":[52],"mechanism.":[53],"High-voltage":[54],"electro-static":[55],"actuation":[56,66],"horizontal":[61],"(X-axis)":[63],"electro-magnetic":[65],"vertical":[71],"(Y-axis).":[73],"high-voltage":[75,99,118],"noise":[76,100],"from":[77],"XSENSE":[79,127],"couples":[80],"into":[81],"YSENSE":[83,109,129],"via":[84],"proof-mass":[86],"(PM)":[87],"through":[89],"other":[90],"parasitic":[91],"elements":[92],"present":[93],"device.":[97],"found":[102],"be":[104],"limiting":[106],"factor":[107],"resolution.":[110],"Multi-pronged":[111],"approach":[112],"suppress":[116],"noise.":[119],"High":[120],"resolution":[121],"temporal":[122],"position":[124],"respectively":[130],"successfully":[132],"demonstrated.":[133]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}