{"id":"https://openalex.org/W4312725605","doi":"https://doi.org/10.1109/iscas48785.2022.9937944","title":"A Novel CMOS-SOI High-Responsivity Thermopile for Thermal Sensing Applications","display_name":"A Novel CMOS-SOI High-Responsivity Thermopile for Thermal Sensing Applications","publication_year":2022,"publication_date":"2022-05-28","ids":{"openalex":"https://openalex.org/W4312725605","doi":"https://doi.org/10.1109/iscas48785.2022.9937944"},"language":"en","primary_location":{"id":"doi:10.1109/iscas48785.2022.9937944","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas48785.2022.9937944","pdf_url":null,"source":{"id":"https://openalex.org/S4363604393","display_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5034882137","display_name":"Elisabetta Moisello","orcid":"https://orcid.org/0000-0001-8535-4227"},"institutions":[{"id":"https://openalex.org/I4210127672","display_name":"Engineering (Italy)","ror":"https://ror.org/045s9b323","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210127672"]},{"id":"https://openalex.org/I25217355","display_name":"University of Pavia","ror":"https://ror.org/00s6t1f81","country_code":"IT","type":"education","lineage":["https://openalex.org/I25217355"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Elisabetta Moisello","raw_affiliation_strings":["University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy"],"affiliations":[{"raw_affiliation_string":"University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","institution_ids":["https://openalex.org/I25217355","https://openalex.org/I4210127672"]},{"raw_affiliation_string":"Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy","institution_ids":["https://openalex.org/I25217355"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061456496","display_name":"Michele Vaiana","orcid":"https://orcid.org/0000-0002-6072-281X"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Michele Vaiana","raw_affiliation_strings":["STMicroelectronics,Catania,Italy","STMicroelectronics, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Catania,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044409603","display_name":"Maria Eloisa Castagna","orcid":"https://orcid.org/0000-0002-7864-6085"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Maria Eloisa Castagna","raw_affiliation_strings":["STMicroelectronics,Catania,Italy","STMicroelectronics, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Catania,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086803832","display_name":"Antonella La Malfa","orcid":"https://orcid.org/0009-0009-5913-3565"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Antonella La Malfa","raw_affiliation_strings":["STMicroelectronics,Catania,Italy","STMicroelectronics, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Catania,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101473509","display_name":"Giuseppe Bruno","orcid":"https://orcid.org/0000-0001-6398-2142"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giuseppe Bruno","raw_affiliation_strings":["STMicroelectronics,Catania,Italy","STMicroelectronics, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Catania,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002715573","display_name":"Edoardo Bonizzoni","orcid":"https://orcid.org/0000-0002-8398-8506"},"institutions":[{"id":"https://openalex.org/I4210127672","display_name":"Engineering (Italy)","ror":"https://ror.org/045s9b323","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210127672"]},{"id":"https://openalex.org/I25217355","display_name":"University of Pavia","ror":"https://ror.org/00s6t1f81","country_code":"IT","type":"education","lineage":["https://openalex.org/I25217355"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Edoardo Bonizzoni","raw_affiliation_strings":["University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy"],"affiliations":[{"raw_affiliation_string":"University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","institution_ids":["https://openalex.org/I25217355","https://openalex.org/I4210127672"]},{"raw_affiliation_string":"Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy","institution_ids":["https://openalex.org/I25217355"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012770413","display_name":"P. Malcovati","orcid":"https://orcid.org/0000-0001-6514-9672"},"institutions":[{"id":"https://openalex.org/I25217355","display_name":"University of Pavia","ror":"https://ror.org/00s6t1f81","country_code":"IT","type":"education","lineage":["https://openalex.org/I25217355"]},{"id":"https://openalex.org/I4210127672","display_name":"Engineering (Italy)","ror":"https://ror.org/045s9b323","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210127672"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Piero Malcovati","raw_affiliation_strings":["University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy"],"affiliations":[{"raw_affiliation_string":"University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy","institution_ids":["https://openalex.org/I25217355","https://openalex.org/I4210127672"]},{"raw_affiliation_string":"Dept. of Electrical, Computer and Biomedical Engineering, University of Pavia, Pavia, Italy","institution_ids":["https://openalex.org/I25217355"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5034882137"],"corresponding_institution_ids":["https://openalex.org/I25217355","https://openalex.org/I4210127672"],"apc_list":null,"apc_paid":null,"fwci":1.0812,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.76702025,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"1","issue":null,"first_page":"871","last_page":"875"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermopile","display_name":"Thermopile","score":0.9980051517486572},{"id":"https://openalex.org/keywords/responsivity","display_name":"Responsivity","score":0.9683092832565308},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.7202933430671692},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6579136848449707},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.534641683101654},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4792468547821045},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4674936830997467},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.45149940252304077},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.3088168799877167},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2932189106941223},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2857760787010193},{"id":"https://openalex.org/keywords/photodetector","display_name":"Photodetector","score":0.2633424997329712},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22949913144111633},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.21540376543998718},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1989459991455078}],"concepts":[{"id":"https://openalex.org/C47279676","wikidata":"https://www.wikidata.org/wiki/Q915693","display_name":"Thermopile","level":3,"score":0.9980051517486572},{"id":"https://openalex.org/C178889773","wikidata":"https://www.wikidata.org/wiki/Q7316011","display_name":"Responsivity","level":3,"score":0.9683092832565308},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.7202933430671692},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6579136848449707},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.534641683101654},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4792468547821045},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4674936830997467},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.45149940252304077},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.3088168799877167},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2932189106941223},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2857760787010193},{"id":"https://openalex.org/C23125352","wikidata":"https://www.wikidata.org/wiki/Q210765","display_name":"Photodetector","level":2,"score":0.2633424997329712},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22949913144111633},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.21540376543998718},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1989459991455078}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas48785.2022.9937944","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas48785.2022.9937944","pdf_url":null,"source":{"id":"https://openalex.org/S4363604393","display_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1967492714","https://openalex.org/W2151550841","https://openalex.org/W2892316873","https://openalex.org/W2933874420","https://openalex.org/W2943651275","https://openalex.org/W2966558914","https://openalex.org/W2974756827","https://openalex.org/W2995591055","https://openalex.org/W3025322823","https://openalex.org/W3084387738","https://openalex.org/W3128734034","https://openalex.org/W3173322683","https://openalex.org/W3180382873"],"related_works":["https://openalex.org/W2995591055","https://openalex.org/W620848874","https://openalex.org/W4312725605","https://openalex.org/W3047127944","https://openalex.org/W2905250181","https://openalex.org/W2797482087","https://openalex.org/W2352772338","https://openalex.org/W1987263313","https://openalex.org/W2007599256","https://openalex.org/W2098432557"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,20,49],"novel":[4],"micromachined":[5],"high-responsivity":[6],"thermopile":[7,18,46,72,80],"sensor,":[8,47],"fully":[9,58],"compatible":[10],"with":[11],"standard":[12],"CMOS-SOI":[13],"(Silicon-On-Insulator)":[14],"processes.":[15],"The":[16,60,74],"proposed":[17,45],"features":[19,66],"versatile":[21],"mosaic":[22],"structure,":[23],"based":[24],"on":[25],"128":[26],"60":[27,31],"\u03bc":[28,32],"m":[29,33],"\u00d7":[30],"pixels":[34],"connected":[35],"in":[36,39],"series":[37],"and/or":[38],"parallel.":[40],"Two":[41],"versions":[42],"of":[43,52,63,76],"the":[44,64,77],"featuring":[48],"different":[50],"number":[51],"equivalent":[53],"pixels,":[54],"are":[55],"presented":[56],"and":[57,83],"characterized.":[59],"most":[61,78],"performing":[62,79],"two":[65],"$2.9\\cdot":[67],"10^{4}\\frac{V}{W}$-responsivity,":[68],"outperforming":[69],"other":[70],"state-of-the-art":[71],"sensors.":[73],"application":[75],"as":[81],"proximity":[82],"motion":[84],"detector":[85],"was":[86],"also":[87],"verified":[88],"through":[89],"measurements.":[90]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}