{"id":"https://openalex.org/W4312643702","doi":"https://doi.org/10.1109/iscas48785.2022.9937328","title":"Electronic technique and system for non-contact reading of temperature sensors based on piezoelectric MEMS resonators","display_name":"Electronic technique and system for non-contact reading of temperature sensors based on piezoelectric MEMS resonators","publication_year":2022,"publication_date":"2022-05-28","ids":{"openalex":"https://openalex.org/W4312643702","doi":"https://doi.org/10.1109/iscas48785.2022.9937328"},"language":"en","primary_location":{"id":"doi:10.1109/iscas48785.2022.9937328","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas48785.2022.9937328","pdf_url":null,"source":{"id":"https://openalex.org/S4363604393","display_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037493735","display_name":"Marco Ba\u00f9","orcid":"https://orcid.org/0000-0002-5696-4138"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Marco Bau'","raw_affiliation_strings":["Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy"],"affiliations":[{"raw_affiliation_string":"Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","institution_ids":["https://openalex.org/I79940851"]},{"raw_affiliation_string":"Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004355245","display_name":"Marco Zini","orcid":"https://orcid.org/0000-0002-1986-9537"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Marco Zini","raw_affiliation_strings":["Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy"],"affiliations":[{"raw_affiliation_string":"Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","institution_ids":["https://openalex.org/I79940851"]},{"raw_affiliation_string":"Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064890004","display_name":"Alessandro Nastro","orcid":"https://orcid.org/0000-0002-2387-0397"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alessandro Nastro","raw_affiliation_strings":["Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy"],"affiliations":[{"raw_affiliation_string":"Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","institution_ids":["https://openalex.org/I79940851"]},{"raw_affiliation_string":"Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100764572","display_name":"Marco Ferrari","orcid":"https://orcid.org/0000-0002-3310-7715"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Marco Ferrari","raw_affiliation_strings":["Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy"],"affiliations":[{"raw_affiliation_string":"Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","institution_ids":["https://openalex.org/I79940851"]},{"raw_affiliation_string":"Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003940396","display_name":"Vittorio Ferrari","orcid":"https://orcid.org/0000-0002-3949-9975"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Vittorio Ferrari","raw_affiliation_strings":["Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy"],"affiliations":[{"raw_affiliation_string":"Univeristy of Brescia,Dept. Of Information Engineering,Brescia,Italy","institution_ids":["https://openalex.org/I79940851"]},{"raw_affiliation_string":"Dept. Of Information Engineering, Univeristy of Brescia, Brescia, Italy","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100604069","display_name":"Joshua E.-Y. Lee","orcid":"https://orcid.org/0000-0002-1741-1485"},"institutions":[{"id":"https://openalex.org/I168719708","display_name":"City University of Hong Kong","ror":"https://ror.org/03q8dnn23","country_code":"HK","type":"education","lineage":["https://openalex.org/I168719708"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["HK","SG"],"is_corresponding":false,"raw_author_name":"Joshua E.-Y. Lee","raw_affiliation_strings":["City University of Hong Kong, Kowloon,Department of Electrical Engineering,Hong Kong,China","Institute of Microelectronics, A*STAR, Singapore","Department of Electrical Engineering, City University of Hong Kong, Kowloon, Hong Kong, China"],"affiliations":[{"raw_affiliation_string":"City University of Hong Kong, Kowloon,Department of Electrical Engineering,Hong Kong,China","institution_ids":["https://openalex.org/I168719708"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Department of Electrical Engineering, City University of Hong Kong, Kowloon, Hong Kong, China","institution_ids":["https://openalex.org/I168719708"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5037493735"],"corresponding_institution_ids":["https://openalex.org/I79940851"],"apc_list":null,"apc_paid":null,"fwci":0.9641,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.741551,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"2409","last_page":"2413"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.839063286781311},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7186946272850037},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6206887364387512},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5118717551231384},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.4871673285961151},{"id":"https://openalex.org/keywords/coupling-coefficient-of-resonators","display_name":"Coupling coefficient of resonators","score":0.4747341573238373},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4391281008720398},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.4142519235610962},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3736633062362671},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.363272488117218},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18050864338874817},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16224324703216553}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.839063286781311},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7186946272850037},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6206887364387512},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5118717551231384},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4871673285961151},{"id":"https://openalex.org/C91397564","wikidata":"https://www.wikidata.org/wiki/Q15059729","display_name":"Coupling coefficient of resonators","level":3,"score":0.4747341573238373},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4391281008720398},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4142519235610962},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3736633062362671},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.363272488117218},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18050864338874817},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16224324703216553},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iscas48785.2022.9937328","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas48785.2022.9937328","pdf_url":null,"source":{"id":"https://openalex.org/S4363604393","display_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},{"id":"pmh:oai:iris.unibs.it:11379/565561","is_oa":false,"landing_page_url":"https://ieeexplore.ieee.org/document/9937328","pdf_url":null,"source":{"id":"https://openalex.org/S4306400804","display_name":"Institutional Research Information System (Universit\u00e0 degli Studi di Brescia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I66752286","host_organization_name":"University of Milano-Bicocca","host_organization_lineage":["https://openalex.org/I66752286"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1491641403","https://openalex.org/W2006514057","https://openalex.org/W2012101846","https://openalex.org/W2018806435","https://openalex.org/W2077734223","https://openalex.org/W2100506356","https://openalex.org/W2114823893","https://openalex.org/W2168772655","https://openalex.org/W2318725859","https://openalex.org/W2325613351","https://openalex.org/W2507212778","https://openalex.org/W2511614264","https://openalex.org/W2621213025","https://openalex.org/W2890468898","https://openalex.org/W3004807962","https://openalex.org/W3036129113","https://openalex.org/W3126903387"],"related_works":["https://openalex.org/W2573086479","https://openalex.org/W2030024880","https://openalex.org/W2804989667","https://openalex.org/W2030471483","https://openalex.org/W2568152611","https://openalex.org/W2078116069","https://openalex.org/W3094144334","https://openalex.org/W2594745722","https://openalex.org/W2549947928","https://openalex.org/W2101239713"],"abstract_inverted_index":{"This":[0],"work":[1],"investigates":[2],"an":[3,27],"electronic":[4,40,87],"technique":[5,108],"and":[6,30,53,96],"system":[7,49,113,144],"for":[8],"non-contact":[9,36,143],"reading":[10,119],"of":[11,16,93,99,120,141,149,151],"the":[12,43,48,51,65,73,83,90,94,97,100,118,142,146,152,163,169],"temperature-dependent":[13],"resonant":[14],"frequency":[15,98,150],"piezoelectric":[17],"MEMS":[18,62,127,153],"resonators.":[19],"The":[20,61,112,138],"proposed":[21],"approach":[22],"exploits":[23],"magnetic":[24],"coupling":[25],"between":[26,50],"interrogation":[28,44],"unit":[29,33,45,67],"a":[31,58,106,121,126],"sensor":[32,66,123],"to":[34,117,155],"achieve":[35],"operation.":[37],"A":[38],"dedicated":[39],"circuit":[41,88],"in":[42,64,82,134,159],"alternatively":[46],"switches":[47],"excitation":[52,74],"detection":[54,84],"phases,":[55],"thus":[56],"implementing":[57],"time-gated":[59],"technique.":[60],"resonator":[63,95,132,154],"is":[68,80,103],"driven":[69],"into":[70],"resonance":[71],"during":[72],"phase,":[75],"while":[76],"its":[77],"damped":[78,91],"response":[79,92],"sensed":[81],"phase.":[85],"An":[86],"down-mixes":[89],"resulting":[101],"signal":[102],"measured":[104],"through":[105],"post-processing":[107],"based":[109,124],"on":[110,125],"autocorrelation.":[111],"has":[114],"been":[115],"applied":[116],"temperature":[122,147],"aluminum-nitride":[128],"thin-film":[129],"piezoelectric-on-silicon":[130],"disk":[131],"vibrating":[133],"radial":[135],"contour":[136],"mode.":[137],"experimental":[139],"characterization":[140],"determined":[145],"coefficient":[148],"be":[156],"\u221247.4":[157],"ppm/\u00b0C,":[158],"good":[160],"agreement":[161],"with":[162],"measurements":[164],"taken":[165],"by":[166],"directly":[167],"probing":[168],"resonator.":[170]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}