{"id":"https://openalex.org/W2800488734","doi":"https://doi.org/10.1109/iscas.2018.8351644","title":"High order MEMS models for system design","display_name":"High order MEMS models for system design","publication_year":2018,"publication_date":"2018-05-01","ids":{"openalex":"https://openalex.org/W2800488734","doi":"https://doi.org/10.1109/iscas.2018.8351644","mag":"2800488734"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2018.8351644","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2018.8351644","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087233940","display_name":"Joan Asselot","orcid":null},"institutions":[{"id":"https://openalex.org/I4210157365","display_name":"Coventor (France)","ror":"https://ror.org/04y5a4d40","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210157365"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Joan Asselot","raw_affiliation_strings":["Coventor, Inc, Villebon-sur-Yvette, France"],"affiliations":[{"raw_affiliation_string":"Coventor, Inc, Villebon-sur-Yvette, France","institution_ids":["https://openalex.org/I4210157365"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034462530","display_name":"Arnaud Krust","orcid":null},"institutions":[{"id":"https://openalex.org/I4210157365","display_name":"Coventor (France)","ror":"https://ror.org/04y5a4d40","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210157365"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Arnaud Krust","raw_affiliation_strings":["Coventor, Inc, Villebon-sur-Yvette, France"],"affiliations":[{"raw_affiliation_string":"Coventor, Inc, Villebon-sur-Yvette, France","institution_ids":["https://openalex.org/I4210157365"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020629042","display_name":"Arnaud Parent","orcid":"https://orcid.org/0000-0002-8089-5814"},"institutions":[{"id":"https://openalex.org/I4210157365","display_name":"Coventor (France)","ror":"https://ror.org/04y5a4d40","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210157365"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Arnaud Parent","raw_affiliation_strings":["Coventor, Inc, Villebon-sur-Yvette, France"],"affiliations":[{"raw_affiliation_string":"Coventor, Inc, Villebon-sur-Yvette, France","institution_ids":["https://openalex.org/I4210157365"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112362023","display_name":"Chris Welham","orcid":null},"institutions":[{"id":"https://openalex.org/I4210157365","display_name":"Coventor (France)","ror":"https://ror.org/04y5a4d40","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210157365"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Chris Welham","raw_affiliation_strings":["Coventor, Inc, Villebon-sur-Yvette, France"],"affiliations":[{"raw_affiliation_string":"Coventor, Inc, Villebon-sur-Yvette, France","institution_ids":["https://openalex.org/I4210157365"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5087233940"],"corresponding_institution_ids":["https://openalex.org/I4210157365"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.03684818,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8881064653396606},{"id":"https://openalex.org/keywords/context","display_name":"Context (archaeology)","score":0.6257485747337341},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.5855960249900818},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5209823250770569},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.42316678166389465},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.34993070363998413},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32785531878471375},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.12895387411117554},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.11911243200302124}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8881064653396606},{"id":"https://openalex.org/C2779343474","wikidata":"https://www.wikidata.org/wiki/Q3109175","display_name":"Context (archaeology)","level":2,"score":0.6257485747337341},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.5855960249900818},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5209823250770569},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42316678166389465},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.34993070363998413},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32785531878471375},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12895387411117554},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.11911243200302124},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2018.8351644","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2018.8351644","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.49000000953674316,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1504867139","https://openalex.org/W1529805464","https://openalex.org/W1554433668","https://openalex.org/W1605848165","https://openalex.org/W2049795434","https://openalex.org/W2080335229","https://openalex.org/W2109680836","https://openalex.org/W2476498141","https://openalex.org/W2620830951","https://openalex.org/W2743381014","https://openalex.org/W2774837633","https://openalex.org/W7058167835"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2272290532","https://openalex.org/W2009888974","https://openalex.org/W2355290145","https://openalex.org/W2353465659","https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152"],"abstract_inverted_index":{"This":[0],"paper":[1],"demonstrates":[2],"how":[3],"an":[4],"accurate":[5],"high":[6],"order":[7],"model":[8],"of":[9,46],"a":[10,29,47,52],"MEMS":[11,37,48],"device":[12],"can":[13],"be":[14],"used":[15],"for":[16,31],"efficient":[17],"system":[18],"design.":[19],"Leveraging":[20],"analyses":[21],"and":[22,38],"functionality":[23],"available":[24],"in":[25],"commercial":[26],"EDA":[27],"tools,":[28],"methodology":[30],"coupled,":[32],"multi-physics":[33],"simulation":[34],"essential":[35],"to":[36],"IC":[39],"design":[40],"is":[41],"presented":[42],"within":[43],"the":[44],"context":[45],"accelerometer":[49],"controlled":[50],"by":[51],"sigma-delta":[53],"modulator.":[54]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}