{"id":"https://openalex.org/W2513448503","doi":"https://doi.org/10.1109/iscas.2016.7539079","title":"A low-noise closed-loop interface for high-G capacitive micro-accelerometer","display_name":"A low-noise closed-loop interface for high-G capacitive micro-accelerometer","publication_year":2016,"publication_date":"2016-05-01","ids":{"openalex":"https://openalex.org/W2513448503","doi":"https://doi.org/10.1109/iscas.2016.7539079","mag":"2513448503"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2016.7539079","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2016.7539079","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103058407","display_name":"Meng Zhao","orcid":"https://orcid.org/0000-0002-1357-7808"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Meng Zhao","raw_affiliation_strings":["Beida (Binhai) Information Research, Tianjin, China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beida (Binhai) Information Research, Tianjin, China","institution_ids":[]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103111982","display_name":"Zhongjian Chen","orcid":"https://orcid.org/0000-0003-4211-5511"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhongjian Chen","raw_affiliation_strings":["Beida (Binhai) Information Research, Tianjin, China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beida (Binhai) Information Research, Tianjin, China","institution_ids":[]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5106181622","display_name":"Yixin Yang","orcid":"https://orcid.org/0000-0001-8214-8583"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yixin Yang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010372283","display_name":"Yuze Niu","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuze Niu","raw_affiliation_strings":["Beida (Binhai) Information Research, Tianjin, China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beida (Binhai) Information Research, Tianjin, China","institution_ids":[]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113867364","display_name":"Guangyi Chen","orcid":"https://orcid.org/0009-0008-9986-9430"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guangyi Chen","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016974271","display_name":"Wengao Lu","orcid":"https://orcid.org/0000-0002-8990-4844"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wengao Lu","raw_affiliation_strings":["Beida (Binhai) Information Research, Tianjin, China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beida (Binhai) Information Research, Tianjin, China","institution_ids":[]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051549576","display_name":"Yacong Zhang","orcid":"https://orcid.org/0000-0003-0708-940X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yacong Zhang","raw_affiliation_strings":["Beida (Binhai) Information Research, Tianjin, China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beida (Binhai) Information Research, Tianjin, China","institution_ids":[]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":null,"apc_paid":null,"fwci":0.4036,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.49672745,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"2415","last_page":"2418"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/correlated-double-sampling","display_name":"Correlated double sampling","score":0.7380197644233704},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6620317101478577},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.6356943249702454},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.5763130784034729},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.5721060633659363},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5534638166427612},{"id":"https://openalex.org/keywords/charge-amplifier","display_name":"Charge amplifier","score":0.5432653427124023},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.49082645773887634},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.48106956481933594},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4609295725822449},{"id":"https://openalex.org/keywords/switched-capacitor","display_name":"Switched capacitor","score":0.44297322630882263},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.41629254817962646},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.41159695386886597},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.39536190032958984},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.38457441329956055},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3698276877403259},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24903127551078796},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.17817336320877075}],"concepts":[{"id":"https://openalex.org/C118277053","wikidata":"https://www.wikidata.org/wiki/Q5172837","display_name":"Correlated double sampling","level":4,"score":0.7380197644233704},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6620317101478577},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.6356943249702454},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.5763130784034729},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.5721060633659363},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5534638166427612},{"id":"https://openalex.org/C169076538","wikidata":"https://www.wikidata.org/wiki/Q1800062","display_name":"Charge amplifier","level":5,"score":0.5432653427124023},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.49082645773887634},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.48106956481933594},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4609295725822449},{"id":"https://openalex.org/C103357873","wikidata":"https://www.wikidata.org/wiki/Q572656","display_name":"Switched capacitor","level":4,"score":0.44297322630882263},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.41629254817962646},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.41159695386886597},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.39536190032958984},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.38457441329956055},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3698276877403259},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24903127551078796},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.17817336320877075},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2016.7539079","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2016.7539079","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8600000143051147,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1544559780","https://openalex.org/W1581627921","https://openalex.org/W1974526631","https://openalex.org/W2006173084","https://openalex.org/W2066784588","https://openalex.org/W2076579867","https://openalex.org/W2145154079","https://openalex.org/W3083985513","https://openalex.org/W6782790851"],"related_works":["https://openalex.org/W2259288840","https://openalex.org/W2044524120","https://openalex.org/W3141909902","https://openalex.org/W2127389397","https://openalex.org/W4386071891","https://openalex.org/W1590462832","https://openalex.org/W1964349758","https://openalex.org/W2143589838","https://openalex.org/W2376138791","https://openalex.org/W2620866998"],"abstract_inverted_index":{"A":[0,65],"switched":[1,26],"capacitor":[2,27],"interface":[3,87],"is":[4,40,71,88,105,133,148],"presented":[5],"in":[6,90],"this":[7],"paper":[8],"for":[9],"a":[10,25,32,45,75,91,121,128,152],"\u00b150":[11],"g":[12],"capacitive":[13],"micro-accelerometer.":[14],"In":[15],"order":[16],"to":[17,73],"suppress":[18],"the":[19,23,55,59,69,79,83,100,103,136,146],"flicker":[20],"noise":[21],"of":[22,51,57,82,102,124,130,139,145,155],"frontend,":[24],"proportional-integral":[28],"controller":[29,43,70],"combined":[30],"with":[31,48,135],"charge":[33,60],"sensitive":[34,61],"amplifier":[35,62],"using":[36],"correlated":[37],"double":[38],"sampling":[39,122],"proposed.":[41],"The":[42,86,108,142],"has":[44],"simple":[46],"structure":[47],"minimized":[49],"number":[50],"switches":[52],"and":[53,63,77,99,116],"cancels":[54],"offset":[56],"both":[58],"itself.":[64],"delay":[66],"buffer":[67],"following":[68],"used":[72],"generate":[74],"z-1/2delay":[76],"drive":[78],"middle":[80],"plate":[81],"sensing":[84],"element.":[85],"implemented":[89],"0.35":[92],"\u03bcm":[93],"3.3":[94,117],"V/15":[95],"V":[96,115,118],"CMOS":[97],"process":[98],"area":[101],"chip":[104],"11.75":[106],"mm2.":[107],"fabricated":[109],"prototype":[110],"circuit":[111],"operates":[112],"under":[113],"15":[114],"supply":[119],"at":[120],"clock":[123],"100":[125],"kHz.":[126],"Meanwhile,":[127],"sensitivity":[129],"99.7":[131],"mV/g":[132],"achieved":[134],"bias":[137],"instability":[138],"200":[140,156],"\u03bcg.":[141],"dynamic":[143],"range":[144],"accelerometer":[147],"106.16":[149],"dB":[150],"over":[151],"signal":[153],"bandwidth":[154],"Hz.":[157]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}