{"id":"https://openalex.org/W1491007994","doi":"https://doi.org/10.1109/iscas.2015.7168885","title":"Modelling of the dynamical behaviour of floating electrode MEMS","display_name":"Modelling of the dynamical behaviour of floating electrode MEMS","publication_year":2015,"publication_date":"2015-05-01","ids":{"openalex":"https://openalex.org/W1491007994","doi":"https://doi.org/10.1109/iscas.2015.7168885","mag":"1491007994"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2015.7168885","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2015.7168885","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045044695","display_name":"Panagiotis Giounanlis","orcid":"https://orcid.org/0000-0002-6109-5598"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Panagiotis Giounanlis","raw_affiliation_strings":["School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001003834","display_name":"Elena Blokhina","orcid":"https://orcid.org/0000-0002-4164-4350"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Elena Blokhina","raw_affiliation_strings":["School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074660128","display_name":"Orla Feely","orcid":"https://orcid.org/0000-0003-3426-6854"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Orla Feely","raw_affiliation_strings":["School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078395765","display_name":"L. Michalas","orcid":"https://orcid.org/0000-0002-0753-2574"},"institutions":[{"id":"https://openalex.org/I200777214","display_name":"National and Kapodistrian University of Athens","ror":"https://ror.org/04gnjpq42","country_code":"GR","type":"education","lineage":["https://openalex.org/I200777214"]}],"countries":["GR"],"is_corresponding":false,"raw_author_name":"Loukas Michalas","raw_affiliation_strings":["Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece","institution_ids":["https://openalex.org/I200777214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022400356","display_name":"M. Koutsoureli","orcid":"https://orcid.org/0000-0002-4635-3691"},"institutions":[{"id":"https://openalex.org/I200777214","display_name":"National and Kapodistrian University of Athens","ror":"https://ror.org/04gnjpq42","country_code":"GR","type":"education","lineage":["https://openalex.org/I200777214"]}],"countries":["GR"],"is_corresponding":false,"raw_author_name":"Matroni Koutsoureli","raw_affiliation_strings":["Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece","institution_ids":["https://openalex.org/I200777214"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068701965","display_name":"G. Papaioannou","orcid":"https://orcid.org/0000-0002-1036-3986"},"institutions":[{"id":"https://openalex.org/I200777214","display_name":"National and Kapodistrian University of Athens","ror":"https://ror.org/04gnjpq42","country_code":"GR","type":"education","lineage":["https://openalex.org/I200777214"]}],"countries":["GR"],"is_corresponding":false,"raw_author_name":"George Papaioannou","raw_affiliation_strings":["Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Solid State Section, Physics Department, National and Kapodistrian University of Athens, Athens, Greece","institution_ids":["https://openalex.org/I200777214"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2008,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.56175854,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1322","last_page":"1325"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8368895053863525},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6498429775238037},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6238335371017456},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5288798809051514},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.5055520534515381},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.49721625447273254},{"id":"https://openalex.org/keywords/electric-field","display_name":"Electric field","score":0.4898225963115692},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.4428524971008301},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.4314185380935669},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3691976070404053},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3591327667236328},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3264031410217285},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.27985966205596924},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.27041345834732056},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19617107510566711},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17139074206352234}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8368895053863525},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6498429775238037},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6238335371017456},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5288798809051514},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5055520534515381},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.49721625447273254},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.4898225963115692},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.4428524971008301},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.4314185380935669},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3691976070404053},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3591327667236328},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3264031410217285},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.27985966205596924},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.27041345834732056},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19617107510566711},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17139074206352234},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2015.7168885","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2015.7168885","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.75}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1581828884","https://openalex.org/W1992955416","https://openalex.org/W2022344696","https://openalex.org/W2022366430","https://openalex.org/W2048908512","https://openalex.org/W2094433804","https://openalex.org/W2097157908","https://openalex.org/W2135948982","https://openalex.org/W2139472582","https://openalex.org/W2466217033","https://openalex.org/W3142476759","https://openalex.org/W3150163573","https://openalex.org/W6634914694"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W3102847316","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W3172386668","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2053577253","https://openalex.org/W2211812010"],"abstract_inverted_index":{"In":[0],"this":[1,67],"work":[2],"we":[3],"investigate":[4],"the":[5,32,57,85,88,100,113,118,129,134,137],"dynamics":[6],"of":[7,18,43,56,87,94,112,124,128,136],"a":[8,16,29,40,44,48,80,92,108,122,125],"floating":[9,36],"electrode":[10,37,114],"microelectromechanical":[11],"(MEMS)":[12],"switch.":[13],"This":[14],"is":[15,39,52],"type":[17],"very":[19],"common":[20],"MEMS":[21,38,76],"that":[22,97],"are":[23],"actuated":[24],"electrostatically,":[25],"i.e.,":[26],"by":[27],"applying":[28],"voltage":[30],"across":[31],"micromechanical":[33],"structure.":[34],"A":[35],"novel":[41],"modification":[42,68],"capacitive":[45],"switch":[46,89],"where":[47],"thin":[49],"metal":[50],"layer":[51],"deposited":[53],"on":[54],"top":[55],"isolating":[58],"dielectric":[59],"layer.":[60],"Although":[61],"these":[62],"devices":[63],"have":[64],"promising":[65],"characteristics,":[66],"alters":[69],"their":[70],"behaviour":[71,86,139],"in":[72,99],"comparison":[73,135],"with":[74,140],"conventional":[75],"switches.":[77],"We":[78,106,132],"develop":[79],"multi-physics":[81],"model":[82,91,117],"to":[83,116],"simulate":[84],"and":[90,102],"number":[93],"physical":[95],"effects":[96],"occur":[98],"system":[101],"influence":[103],"its":[104],"dynamics.":[105],"used":[107],"fractal":[109],"as":[110,121],"representation":[111],"surface":[115],"field":[119],"emission":[120],"result":[123],"local":[126],"enhancement":[127],"electric":[130],"field.":[131],"provide":[133],"simulated":[138],"experimental":[141],"results.":[142]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}